I-Silicon Wafer engu-8 Inch P evela ku-VET Energy iyisicwecwana se-silicon esisebenza kahle esiklanyelwe uhla olubanzi lwezinhlelo zokusebenza ze-semiconductor, okuhlanganisa amaseli elanga, amadivaysi e-MEMS, namasekhethi ahlanganisiwe. Yaziwa ngokusebenza kwayo okuhle kakhulu kukagesi nokusebenza okungaguquguquki, le wafer iyinketho ekhethwayo kubakhiqizi abafuna ukukhiqiza izingxenye zikagesi ezithembekile nezisebenza kahle. I-VET Energy iqinisekisa amazinga anembile e-doping kanye nokuqedwa kwendawo ephezulu kwekhwalithi ephezulu ukuze kwenziwe idivayisi efanele.
Lawa ma-Silicon Wafers ohlobo lwe-8 Inch P ahambisana ngokuphelele nezinto ezahlukahlukene ezifana ne-SiC Substrate, i-SOI Wafer, i-SiN Substrate, futhi afanele ukukhula kwe-Epi Wafer, okuqinisekisa ukuguquguquka kwezinqubo zokukhiqiza ezisezingeni eliphezulu ze-semiconductor. Amawafa angasetshenziswa futhi ngokuhambisana nezinye izinto zobuchwepheshe obuphezulu njenge-Gallium Oxide Ga2O3 kanye ne-AlN Wafer, okuwenza alungele izinhlelo zokusebenza ze-elekthronikhi zesizukulwane esilandelayo. Idizayini yabo eqinile iphinde ingene ngaphandle komthungo ezinhlelweni ezisekelwe ku-Cassette, iqinisekisa ukuphathwa okusebenzayo nokukhiqiza ivolumu ephezulu.
I-VET Energy ihlinzeka amakhasimende ngezixazululo ezenziwe ngezifiso ze-wafer. Singakwazi ukwenza ngendlela oyifisayo ama-wafers ane-resistivity ehlukene, okuqukethwe komoya-mpilo, ukujiya, njll. ngokuya ngezidingo ezithile zamakhasimende. Ngaphezu kwalokho, siphinde sinikeze ukwesekwa kwezobuchwepheshe kanye nesevisi yangemuva kokuthengisa ukusiza amakhasimende axazulule izinkinga ezihlukahlukene okuhlangatshezwane nazo phakathi nenqubo yokukhiqiza.
IMICIMBI YOKUFAKA
*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating
Into | 8-Intshi | 6-Intshi | 4-Intshi | ||
nP | n-Pm | n-IHu | SI | SI | |
I-TTV(GBIR) | ≤6um | ≤6um | |||
Umnsalo(GF3YFCD)-Inani Eliphelele | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
I-Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
I-LTV(SBIR)-10mmx10mm | <2μm | ||||
I-Wafer Edge | Beveling |
UBUHLUNGU QEDA
*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating
Into | 8-Intshi | 6-Intshi | 4-Intshi | ||
nP | n-Pm | n-IHu | SI | SI | |
I-Surface Qeda | I-Double side Optical Polish, i-Si- Face CMP | ||||
I-SurfaceRoughness | (10um x 10um) I-Si-FaceRa≤0.2nm | (5umx5um) I-Si-Face Ra≤0.2nm | |||
Ama-Edge Chips | Akukho okuvunyelwe (ubude nobubanzi≥0.5mm) | ||||
Izindebe | Akukho Okuvunyelwe | ||||
Imihuzuko(Si-Face) | Ubuningi.≤5,Okuqoqekile | Ubuningi.≤5,Okuqoqekile | Ubuningi.≤5,Okuqoqekile | ||
Imifantu | Akukho Okuvunyelwe | ||||
Ukukhishwa komkhawulo | 3mm |