Ukufakwa kwe-SiC kunokulungiswa nge-chemical vapor deposition (CVD), ukuguqulwa kwe-precursor, ukutshiza i-plasma, njl njl. I-coating elungiselelwe yi-CHEMICAL yokubeka umphunga ifana kwaye ihlangene, kwaye inokwakheka okulungileyo. Ukusebenzisa i-methyl trichlorsilane. (CHzSiCl3, MTS) njengomthombo we-silicon, ukulungiswa kwe-SiC yokwambathisa...
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