SiC Coating / Coated Graphite Substrate/Tray bakeng sa Semiconductor

SiC Coating/Coated Graphite Substrate/Tray for Semiconductor Featured Image

Tlhaloso e Khutšoanyane:

VET Energy SiC Coated Graphite Susceptor for Epitaxial Growth ke sehlahisoa se sebetsang hantle se etselitsoeng ho fana ka ts'ebetso e tsitsitseng le e tšepahalang ka nako e telele. E na le ho hanyetsa mocheso o motle haholo le ho tšoana ha mocheso, bohloeki bo phahameng, ho hanyetsa khoholeho ea mobu, e leng se etsang hore e be tharollo e phethahetseng bakeng sa lisebelisoa tsa ho lokisa li-wafer.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

SiC e koahetsoeng / e koahetsoeng ka susceptor ea Graphite bakeng sa Semiconductor

TheSiC Coated Graphite Substrateke tharollo e tšoarellang haholo le e sebetsang hantle e etselitsoeng ho fihlela litlhoko tse matla tsa indasteri ea ts'ebetso ea semiconductor. E nang le lera la bohloeki bo holimosilicon carbide (SiC) ho roala, substrate ena e fana ka botsitso bo ikhethang ba mocheso, khanyetso ea oxidation, le bophelo ba nako e telele ea ts'ebeletso, e etsa hore e be e loketseng bakeng sa lits'ebetso tsa MOCVD, li-graphite wafer carriers, le libaka tse ling tse phahameng tsa mocheso.

Likaroloana:
· Excellent Thermal Shock Resistance
· Ho Hanyetsa ho Tšoaroa ha 'Mele ho babatsehang
· Excellent Chemical Resistance
· Bohloeki bo Phahameng ka ho Fetisisa
· Ho fumaneha ka Sebopeho se Ratang
· E ka sebelisoa tlas'a Atmosphere ea Oxidizing

Kopo:

Likarolo tsa Sehlahisoa le Melemo:

1. Ho Khanyetso e Phahameng ea Thermal:Ka bohloeki bo phahamengHo roala ha SiC, substrate e mamella mocheso o feteletseng, ho netefatsa ts'ebetso e tsitsitseng libakeng tse hlokang tse kang epitaxy le semiconductor fabrication.

2. Matlafatso ea nako e telele:Likarolo tsa graphite tse koahetsoeng ke SiC li etselitsoe ho hanela ho bola ha lik'hemik'hale le oxidation, ho eketsa nako ea bophelo ea substrate ha e bapisoa le substrate e tloaelehileng ea graphite.

3. Vitreous Coated Graphite:Sebopeho se ikhethang sa vitreous eaHo roala ha SiCe fana ka boima bo botle ba holim'a metsi, ho fokotsa ho khathala le ho taboha nakong ea ts'ebetso e phahameng ea mocheso.

4. High Hloekile SiC Coating:Substrate ea rona e netefatsa tšilafalo e fokolang lits'ebetsong tse bonolo tsa semiconductor, e fanang ka ts'epo bakeng sa liindasteri tse hlokang bohloeki bo thata ba thepa.

5. Wide Market Kopo:TheSiC e koahetsoeng ka graphite susceptor'maraka o ntse o hola ha tlhoko ea lihlahisoa tse halikiloeng tsa SiC e ntse e eketseha tlhahisong ea semiconductor, e beha karoloana ena e le sebapali sa bohlokoa' marakeng oa graphite wafer carrier le mmaraka oa silicon carbide coated graphite trays.

Maemo a Tloaelehileng a Base Graphite Material:

Tekano e Hlahang:	1.85 g/cm3
Ho hanyetsa Motlakase:	11 μΩm
Flexural Strenth:	49 MPa (500kgf/cm2)
Bothata ba Lebōpo:	58
Molora:	<5ppm
Thermal Conductivity:	116 W/mK (100 kcal/mhr-℃)

CVD SiC薄膜基本物理性能 Lintho tsa motheo tsa 'mele tsa CVD SiCho roala
性质 / Thepa	典型数值 / Tloaelehileng Value
晶体结构 / Crystal Structure	FCC β phase 多晶，主要為(111）取向)
密度 / Density	3.21 g/cm³
硬度 / Ho thatafala	2500 维氏硬度 (moroalo oa 500g)
晶粒大小 / Grain SiZe	2 ~ 10μm
纯度 / Chemical Purity	99.99995%
热容 / Heat Capacity	640 J·kg^-1·K^-1
升华温度 / Sublimation Mocheso	2700 ℃
抗弯强度 / Flexural Strength	415 MPa RT 4-ntlha
杨氏模量 / Young's Modulus	430 Gpa 4pt kobeha, 1300 ℃
导热系数 / Thermal Conductivity	300Wm^-1·K^-1
热膨胀系数 / Thermal Expansion(CTE)	4.5×10^-6K^-1

VET Energy ke moetsi oa 'nete oa lihlahisoa tsa graphite le silicon carbide tse nang le liphahlo tse fapaneng tse kang SiC coating, TaC coating, glassy coating, pyrolytic carbon coating, joalo-joalo, e ka fana ka likarolo tse fapaneng tse hlophisitsoeng bakeng sa indasteri ea semiconductor le photovoltaic.

Sehlopha sa rona sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka u fa litharollo tsa lisebelisoa tse eketsehileng bakeng sa hau.

Re ntse re tsoela pele ho nts'etsapele lits'ebetso tse tsoetseng pele ho fana ka lisebelisoa tse tsoetseng pele, 'me re entse theknoloji e ikhethileng e nang le tokelo ea molao, e ka etsang hore maqhama lipakeng tsa pente le substrate e tiee le hore e se ke ea oela habonolo.

Re u amohela ka mofuthu hore u etele feme ea rona, ha re buisaneng ka ho eketsehileng!