Silicon Carbide Coated Graphite Substrate bakeng sa Semiconductor, MOCVD Susceptor

Tlhaloso e Khutšoanyane:

VET Energy SiC Coated Susceptor ke sehlahisoa se sebetsang hantle haholo se etselitsoeng ho fana ka ts'ebetso e tsitsitseng le e tšepahalang ka nako e telele. E na le ho hanyetsa mocheso o motle haholo le ho tšoana ha mocheso, bohloeki bo phahameng, ho hanyetsa khoholeho ea mobu, e leng se etsang hore e be tharollo e phethahetseng bakeng sa lisebelisoa tsa ho lokisa li-wafer.

Sebaka sa Tšimoloho:Zhejiang, China (Bohareng)

Nomoro ea Mohlala:Nomoro ea Mohlala:

Sebopeho sa Lik'hemik'hale:SiC e koahetsoeng ka graphite

Flexural matla:470Mpa

Thermal conductivity:300 W/mK

Boleng:E phethahetseng

Mosebetsi:CVD-SiC

Kopo:Semiconductor /Photovoltaic

Tekano:3.21 g/cc

Katoloso ea mocheso:4 10-6/K

Molora: <5ppm

Mohlala:E fumaneha

Khoutu ea HS:6903100000

Re romelle lengolo-tsoibila Khoasolla e le PDF

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

VET Energy SiC Coated Susceptorke tharollo e sebetsang hantle haholo e entsoeng ka boqhetseke ho fana ka ts'ebetso e ts'epahalang, e tsitsitseng ho pholletsa le nako e telele ea bophelo, e fihlelang litlhoko tse matla tsa tlhahiso ea li-semiconductor. E na le khanyetso e ikhethang ea mocheso, ho tšoana ho holimo ha mocheso, le bohloeki bo phahameng, sehlahisoa sena se loketse lijari tsa liphaephe tsa MOCVD le lisebelisoa tse ling tsa ho lokisa liphaephe tse hlokang botsitso le ho nepahala. Ho hanyetsa khoholeho ea eona ho matla ho etsa hore e be khetho ea pele bakeng sa libaka tseo ho tsona ho hlokahalang nako e telele le ho mamella lik'hemik'hale.

Tsa ronaSiC Coated Graphite Susceptore eme e le karolo ea bohlokoa ts'ebetsong ea tlhahiso ea li-semiconductor, e sebelisa theknoloji e ikhethileng ea VET Energy ho fihlela bohloeki bo phahameng haholo, ho ts'oana ho holimo, le botsitso bo makatsang ba mocheso. Ho roala ho ntlafatsa karoloana ea graphite e nang le khanyetso e phahameng ea lik'hemik'hale le bophelo bo atolositsoeng ba ts'ebeletso. Boinehelo ba VET Energy ho boleng bo entse hore ho be le susceptor e koahetsoeng ka SiC e khotsofatsang litlhoko tse tsoelang pele tsa 'maraka oa graphite wafer carrier, ho beha maemo a holimo bakeng sa li-susceptors tsa graphite tse koahetsoeng ke SiC tse sebelisoangMekhoa ea MOCVD.

Lintlha tsa bohlokoa tsa SiC Coated Susceptors:

1. Ho hanyetsana le Oxidation ea Mocheso o Phahameng:E mamella mocheso ho fihla ho 1700 ℃, e etsa hore e loketse maemo a ts'ebetso e feteletseng.

2. Bohloeki bo Phahameng le ho Kopana ha Thermal:E netefatsa liphetho tse tsitsitseng, tse bohlokoa bakeng saLi-susceptors tsa MOCVDle lisebelisoa tse ling tse nepahetseng.

3. Haholo-holo Corrosion Resistance:E khona ho mamella acid, alkali, letsoai le li-reagents tse fapaneng tsa tlhaho.

4. Ho Thata ha Bokaho bo Matlafalitsoeng:Sebaka se kopaneng se nang le likaroloana tse ntle tse fanang ka nako e telele le ho phela nako e telele.

5. Bophelo bo Atolositsoeng ba Tšebeletso:E etselitsoe ts'ebetso e tsitsitseng, e sebetsang ho feta li-susceptors tse koahetsoeng ka silicon e maemong a thata.

E le moetsi ea ka sehloohong, VET Energy e sebetsa ka mokhoa o ikhethileng oa graphite lelihlahisoa tsa silicon carbideka likhetho tse fapaneng tsa ho roala, ho kenyelletsaHo roala ha SiC, Ho roala ha TaC, ho roala ha khalase ea khabone, le pyrolytic carbon coating. Re motlotlo ho sebeletsa liindasteri tsa semiconductor le photovoltaic, re fana ka li-silicon carbide coated graphite susceptors tse fihlelang litlhoko tse khethehileng tsa ts'ebetso.

Sehlopha sa rona sa tekheniki, se nang le boiphihlelo ho tsoa ho litsi tse holimo tsa lipatlisiso tsa lapeng, se ikemiselitse ho nts'etsapele tharollo ea lisebelisoa bakeng sa litlhoko tse tsoelang pele tsaSesebelisoa sa graphite se koahetsoeng ke SiCmmaraka. Ka ts'ebetso ea rona e nang le tokelo ea molao, VET Energy e hlahisitse theknoloji e ikhethang e ntlafatsang haholo matla a maqhama pakeng tsa silicon carbide coating le substrate, ho fokotsa kotsi ea ho thibela le ho matlafatsa botšepehi ba nako e telele.

Likopo le Melemo ho Ts'ebetso ea Semiconductor

TheHo roala SiC bakeng sa MOCVDthusasesebelisoa sa graphitelikarolo tsa ho boloka botšepehi tlas'a maemo a mocheso o phahameng le a senyang, e leng sa bohlokoa bakeng sa tlhahiso e nepahetseng ea semiconductor. Likarolo tsena tsa graphite tse koahetsoeng ka SiC li bohlokoa haholo lits'ebetsong tse hlokang li-susceptors tse koahetsoeng ka silicon bakeng sabajari ba sephaphatha sa graphite, tse hlokang botsitso bo phahameng ba mocheso, bohloeki, le ho hanyetsa khoholeho ea lik'hemik'hale.

Ka mekhoa ea rona e tsoetseng pele ea ho roala ka silicon carbide, VET Energy e ntse e tsoela pele ho tšehetsa 'maraka oa graphite wafer carrier ka ho fana ka mokhoa o ikhethileng, o sebetsang hantle haholo.Li-susceptors tsa graphite tse koahetsoeng ke SiCtse sebetsanang le liphephetso tse ikhethileng indastering, ho tloha lits'ebetsong tsa MOCVD ho isa lits'ebetsong tsa bohloeki bo phahameng tšimong ea semiconductor.