Mofuta oa Silicon Wafer oa 8 Inch P o tsoang ho VET Energy ke sephaphatha sa silicon se sebetsang hantle se etselitsoeng mefuta e mengata ea lisebelisoa tsa semiconductor, ho kenyeletsa lisele tsa letsatsi, lisebelisoa tsa MEMS, le lipotoloho tse kopantsoeng. E tsebahala ka ho sebetsa ha eona hantle ha motlakase le ts'ebetso e tsitsitseng, sephaphatha sena ke khetho e ratoang ke baetsi ba batlang ho hlahisa likarolo tsa elektronike tse tšepahalang le tse sebetsang hantle. VET Energy e netefatsa maemo a nepahetseng a doping le pheletso ea boleng bo holimo bakeng sa tlhahiso e nepahetseng ea lisebelisoa.
Li-Silicon Wafers tsena tsa 8 Inch P li lumellana ka botlalo le lisebelisoa tse fapaneng tse kang SiC Substrate, SOI Wafer, SiN Substrate, 'me li loketse kholo ea Epi Wafer, e netefatsang ho feto-fetoha ha maemo bakeng sa lits'ebetso tse tsoetseng pele tsa tlhahiso ea semiconductor. Li-wafers li ka boela tsa sebelisoa hammoho le lisebelisoa tse ling tsa theknoloji e phahameng joaloka Gallium Oxide Ga2O3 le AlN Wafer, e leng se etsang hore e be tse loketseng bakeng sa lisebelisoa tsa elektroniki tsa moloko o latelang. Moralo oa bona o matla o boetse o lumellana hantle le lits'ebetso tse thehiloeng ho Cassette, ho netefatsa ts'ebetso ea tlhahiso e sebetsang hantle le e phahameng.
VET Energy e fa bareki litharollo tse ikhethileng tsa liphaephe. Re ka Customize li-wafers ka resistivity fapaneng, dikahare oksijene, botenya, joalo-joalo ho ea ka litlhoko tse khethehileng tsa bareki. Ntle le moo, re boetse re fana ka ts'ehetso ea botekgeniki le ts'ebeletso ea morao-rao ho thusa bareki ho rarolla mathata a fapaneng a kopaneng nakong ea tlhahiso.
LIEKETSENG TSIETSO
*n-Pm=n-mofuta oa Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulation
Ntho | 8-Intshi | 6-Intshi | 4-Intshi | ||
nP | n-Pm | n-Pes | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Bow(GF3YFCD)-Boleng bo Felletseng | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR) -10mmx10mm | <2μm | ||||
Wafer Edge | Beveling |
SEBAKA PHETHA
*n-Pm=n-mofuta oa Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulation
Ntho | 8-Intshi | 6-Intshi | 4-Intshi | ||
nP | n-Pm | n-Pes | SI | SI | |
Surface Finish | Mahlakore a mabeli a Optical Polish, Si- Face CMP | ||||
SurfaceRoughness | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Li-Chips tsa Edge | Ha ho e dumellwe (bolelele le bophara≥0.5mm) | ||||
Li-indent | Ha ho le e 'ngoe e Lumelloang | ||||
Scratches(Si-Face) | Kty.≤5, Kakaretso | Kty.≤5, Kakaretso | Kty.≤5, Kakaretso | ||
Mapetso | Ha ho le e 'ngoe e Lumelloang | ||||
Kenyelletso ea Edge | 3mm |