VET Energy 12-inch SOI wafer ke sesebelisoa sa semiconductor se sebetsang hantle haholo, se ratoang haholo bakeng sa thepa ea sona e ntle ea motlakase le sebopeho se ikhethileng. VET Energy e sebelisa mekhoa e tsoetseng pele ea ho etsa li-wafer tsa SOI ho netefatsa hore sephaphatha se na le ho lutla ha hona joale, lebelo le phahameng le ho hanyetsa mahlaseli, ho fana ka motheo o tiileng oa li-circuits tsa hau tse sebetsang hantle tse sebetsang hantle.
Mohala oa sehlahisoa oa VET Energy ha o felle feela ho liphaephe tsa SOI. Re boetse re fana ka lisebelisoa tse ngata tse fapaneng tsa semiconductor substrate, ho kenyelletsa Si Wafer, SiC Substrate, SiN Substrate, Epi Wafer, joalo-joalo, hammoho le lisebelisoa tse ncha tse pharalletseng tsa semiconductor tse kang Gallium Oxide Ga2O3 le AlN Wafer. Lihlahisoa tsena li ka fihlela litlhoko tsa ts'ebeliso ea bareki ba fapaneng ka matla a elektroniki, RF, li-sensor le likarolo tse ling.
Re tsepamisitse maikutlo holim'a bokhabane, li-wafers tsa rona tsa SOI li boetse li sebelisa lisebelisoa tse tsoetseng pele tse kang gallium oxide Ga2O3, lik'hasete le li-wafers tsa AlN ho netefatsa ho tšepahala le ho sebetsa hantle boemong bo bong le bo bong ba ts'ebetso. Tšepa VET Energy ho fana ka litharollo tsa morao-rao tse bulang tsela bakeng sa tsoelo-pele ea theknoloji.
Hlahisa bokhoni ba projeke ea hau ka ts'ebetso e phahameng ea VET Energy 12-inch SOI wafers. Matlafatsa bokhoni ba hau ba boqapi ka li-wafers tse kenyelletsang boleng, ho nepahala le boqapi, ho rala motheo oa katleho lefapheng le matla la theknoloji ea semiconductor. Khetha VET Energy bakeng sa litharollo tsa pele tsa SOI tse fetang tebello.


LIEKETSENG MATS'OA
*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulation
Ntho | 8-Intshi | 6-Intshi | 4-Intshi | ||
nP | n-Pm | n-Pes | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Bow(GF3YFCD)-Boleng bo Felletseng | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR) -10mmx10mm | <2μm | ||||
Wafer Edge | Beveling |
SEBAKA PHETHA
*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulation
Ntho | 8-Intshi | 6-Intshi | 4-Intshi | ||
nP | n-Pm | n-Pes | SI | SI | |
Surface Finish | Mahlakore a mabeli a Optical Polish, Si- Face CMP | ||||
SurfaceRoughness | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Li-Chips tsa Edge | Ha ho e dumellwe (bolelele le bophara≥0.5mm) | ||||
Li-indent | Ha ho le e 'ngoe e Lumelloang | ||||
Scratches(Si-Face) | Kty.≤5, Kakaretso | Kty.≤5, Kakaretso | Kty.≤5, Kakaretso | ||
Mapetso | Ha ho le e 'ngoe e Lumelloang | ||||
Kenyelletso ea Edge | 3mm |


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