SiC Coated Graphite Carrier / Susceptor

Tsanangudzo Pfupi:

VET Energy SiC Coated Graphite Carrier/Susceptor chigadzirwa chepamusoro-soro chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwenguva yakareba. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.

 


Product Detail

Product Tags

SiC coated suscetpor chinhu chakakosha chinoshandiswa mune akasiyana semiconductor kugadzira maitiro. Isu tinoshandisa tekinoroji yedu ine patent kugadzira iyo SiC yakavharwa suscetpor nekuchena kwakanyanya, kunaka kwekupfeka kwakafanana uye hupenyu hwesevhisi hwakanakisa, pamwe nekukwirira kwemakemikari kuramba uye kugadzikana kwemafuta.

Zvimiro zvezvigadzirwa zvedu:

1. High tembiricha oxidation kuramba kusvika 1700 ℃.
2. Kuchena kwepamusoro uye kufanana kwekupisa
3. Yakanakisa corrosion resistance: acid, alkali, munyu uye organic reagents.
4. Kuoma kwepamusoro, compact surface, yakanaka particles.
5. Hupenyu hurefu hwebasa uye hunogara kwenguva refu

mutakuri2 mutakuri4

mutakuri1 mutakuri3

 

CVD SiC薄膜基本物理性能

Basic zvemuviri zvimiro zveCVD SiCcoating

性质 / Property

典型数值 / Typical Value

晶体结构 / Crystal Mamiriro

FCC β chikamu多晶,主要為(111)取向

密度 / Density

3.21 g/cm³

硬度 / Kuoma

2500 维氏硬度 (500g mutoro)

晶粒大小 / Zviyo SiZe

2~10μm

纯度 / Kemikari Kuchena

99.99995%

热容 / Kupisa Kugona

640 J·kg-1·K-1

升华温度 / Sublimation Temperature

2700 ℃

抗弯强度 / Flexural Simba

415 MPa RT 4-poindi

杨氏模量 / Young's Modulus

430 Gpa 4pt bend, 1300 ℃

导热系数 / ThermalConductivity

300Wm-1·K-1

热膨胀系数 / Kuwedzera Kupisa (CTE)

4.5 × 10-6K-1

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