PECVD La'u Fau'u Fa'ailoga Fa'a'ofu'ofu Graphite Fata

PECVD La'uina Fata Fa'asaoina Ata Fa'ailoga Ata

Fa'amatalaga Puupuu:

O le VET Energy's PECVD Loading Tray ua mamanuina ina ia maua ai le saogalemu ma e oo lava i le lagolago mo wafers i le taimi o le teuina, faʻaleleia le tutusa ma le lelei o le faʻagasologa o le teuina. Fa'atasi ai ma lona malosi lelei o le vevela, o le Graphite Tray e fesoasoani e fa'atumauina se si'osi'omaga fa'atonutonu i totonu o potu PECVD, fa'aitiitia ai le lamatiaga o le fa'aleagaina ma fa'amautinoa le lelei o le faagasologa.

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Fa'amatalaga Oloa

Faailoga o oloa

VET Energy PECVD fata uta ose fa'amomoli sa'o ua fuafuaina mo le PECVD (plasma enhanced chemical vapor deposition). O lenei fata fa'apipi'i maualuga maualuga e fai i mea fa'amea graphite maualuga-mama, maualuga. E sili atu le maualuga o le vevela, faʻafefeteina, faʻamautu tulaga ma isi uiga. E mafai ona tuʻuina atu se faʻavae faʻamautu mo le PECVD faʻagasologa ma faʻamautinoa le tutusa ma le mafolafola o le faʻapipiʻiina o ata.

VET Malosiaga PECVD fata uta o loʻo faʻaaogaina lautele i semiconductor, photovoltaic, LED ma isi fanua. Faataitaiga:

▪ Semiconductor: PECVD faagasologa mo mea semiconductor e pei ole silicon wafers ma epitaxial wafers.

▪ Photovoltaic: faiga PECVD mo ata manifinifi sela sola.

▪ LED: PECVD fa'agasologa mo chips LED.

Tulaga Lelei

▪Fa'aleleia le lelei o ata:Fa'amautinoa le tu'u tutusa o ata tifaga ma fa'aleleia le lelei o ata.

▪Fa'ateleina le ola o meafaigaluega:E sili atu le teteʻe o le corrosion, faʻalautele le ola tautua o meafaigaluega PECVD.

▪Fa'aitiitia tau o gaosiga:O fata graphite sili ona lelei e mafai ona faʻaititia ai le tau o meaʻai ma faʻaititia le tau o gaosiga.

Mea kalafi mai le SGL:

Fa'ailoga masani: R6510
Fa'asinomaga	Su'ega tulaga	Taua	Vaega
Ole fua ole fua	ISO 13320	10	μm
Fa'atosina tele	DIN IEC 60413/204	1.83	g/cm³
Matala porosity	DIN66133	10	%
Lapo'a pore feololo	DIN66133	1.8	μm
Talitonu	DIN 51935	0.06	cm²/s
Malosi Rockwell HR5/100	DIN IEC60413/303	90	HR
Fa'asao eletise fa'apitoa	DIN IEC 60413/402	13	μΩm
Malosi fa'apa'u	DIN IEC 60413/501	60	MPa
Malosi fa'amalosi	DIN 51910	130	MPa
Modulus a talavou	DIN 51915	11.5×10³	MPa
Fa'alautelega vevela(20-200℃)	DIN 51909	4.2X10^-6	K^-1
Amioga vevela (20℃)	DIN 51908	105	Wm^-1K^-1

O lo'o fa'atulagaina fa'apitoa mo le gaosiga maualuga o le la, e lagolagoina le G12 tele-tele-tele fa'agaoioiga. Fa'ata'ita'iga fa'ata'ita'iga va'ava'a e matua fa'atuputeleina le fa'aulufaleina, fa'atupuina ai le maualuga o fua fa'atatau ma fa'aitiitia tau o gaosiga.

Aitema	Ituaiga	Numera wafer ave
PEVCD Grephite vaa - Le 156 faasologa	156-13 vaa grephite	144
	156-19 vaa grephite	216
	156-21 vaa grephite	240
	156-23 vaa kalafi	308
PEVCD Grephite vaa - Le 125 faasologa	125-15 vaa grephite	196
	125-19 vaa grephite	252
	125-21 vaa griphite	280