O le 6 Inisi Semi Insulating SiC Wafer mai le VET Energy o se fofo sili atu mo le maualuga o le malosi ma le maualuga o faʻaoga, e ofoina atu le maualuga o le vevela ma le eletise eletise. O nei mea faʻapipiʻi semi-insulating e taua i le atinaʻeina o masini e pei o RF amplifier, sui eletise, ma isi vaega maualuga-voltage. E fa'amautinoaina e le VET Energy le tulaga lelei ma le fa'atinoga, ma fa'alelei lelei ai nei ma'i mo le tele o fa'agasologa o faiga fa'a-semiconductor.
I le faaopoopo atu i a latou mea faʻapitoa faʻamalama, o nei SiC wafers e fetaui ma mea eseese e aofia ai Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, ma Epi Wafer, e faʻaogaina ai mo ituaiga eseese o gaosiga. E le gata i lea, o mea faʻapitoa e pei o Gallium Oxide Ga2O3 ma AlN Wafer e mafai ona faʻaogaina faʻatasi ma nei SiC wafers, e maua ai le sili atu le fetuutuunai i masini eletise eletise. Ua mamanuina le fa'aputu mo le fa'aogaina lelei ma faiga fa'atautaia masani fa'apisinisi e pei o faiga Kaseti, fa'amautinoaina le faigofie o le fa'aoga i le tele o gaosiga.
O le VET Energy e ofoina atu se vaega atoatoa o mea faʻapipiʻi semiconductor, e aofia ai Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, Gallium Oxide Ga2O3, ma AlN Wafer. O la matou laina oloa eseese e fetaui ma manaʻoga o faʻaoga eletise eseese, mai le eletise eletise i le RF ma le optoelectronics.
6 inisi semi-insulating SiC wafer e ofoina atu le tele o tulaga lelei:
Volitele malepe maualuga: O le vaeluaga lautele o le SiC e mafai ai ona maualuga le malepelepe voltage, faʻatagaina mo masini eletise sili atu ma lelei.
Faʻatonuga maualuga-vevela: SiC's sili ona lelei le faʻaogaina o le vevela e mafai ai ona faʻaogaina i le maualuga o le vevela, faʻaleleia atili le faʻatuatuaina o masini.
E maualalo i luga o le tetee: SiC masini e faʻaalia le maualalo i luga o le tetee, faʻaitiitia le paʻu eletise ma faʻaleleia le malosi.
VET Energy ofo atu siC wafers fa'apitoa e fa'amalieina ou mana'oga fa'apitoa, e aofia ai mafiafia eseese, tulaga o le doping, ma fa'ai'uga o luga. O la matou 'au fa'apitoa e tu'uina atu le lagolago fa'apitoa ma le 'au'aunaga pe a uma ona fa'atau e fa'amautinoa ai lou manuia.
FAAMATALAGA WAFERING
*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating
Aitema | 8-Inisi | 6-Inisi | 4-Inisi | ||
nP | n-Pm | n-Sa | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Aufana(GF3YFCD)-Taua atoatoa | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
A'ai(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR)-10mmx10mm | <2μm | ||||
Wafer Edge | Fa'ata'oto |
FA'ATA'U LUGA
*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating
Aitema | 8-Inisi | 6-Inisi | 4-Inisi | ||
nP | n-Pm | n-Sa | SI | SI | |
Fa'ai'uga | Itulua Optical Polish, Si- Face CMP | ||||
Lau'ele'ele | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Tipi Chips | Leai se Fa'ataga (umi ma le lautele≥0.5mm) | ||||
Indents | Leai se Fa'ataga | ||||
Manu'ese(Si-Fua'i) | Qty.≤5, Fa'aopoopo | Qty.≤5, Fa'aopoopo | Qty.≤5, Fa'aopoopo | ||
Ta'eta'ei | Leai se Fa'ataga | ||||
Tuusaunoaga Tupito | 3mm |