4 Inisi GaN i luga ole SiC Wafer

Fa'amatalaga Puupuu:

VET Energy's 4-inisi GaN i luga o le SiC wafer o se oloa fa'afouina i le fanua o eletise eletise. O lenei wafer e tuʻufaʻatasia ai le faʻaogaina lelei o le vevela o le silicon carbide (SiC) faʻatasi ai ma le maualuga o le malosi ma le maualalo o le gau o le gallium nitride (GaN), ma avea ai ma se filifiliga lelei mo le faia o masini eletise maualuga. E fa'amautinoa e le VET Energy le fa'atinoga lelei ma le fa'atumauina o le wafer e ala ile fa'atekonolosi epitaxial maualuga ole MOCVD.

Auina imeli ia matou La'u mai ile PDF

Fa'amatalaga Oloa

Faailoga o oloa

Ole laina ole oloa ole VET Energy e le gata ile GaN ile SiC wafers. Matou te tuʻuina atu foʻi le tele o mea faʻapipiʻi semiconductor substrate, e aofia ai le Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, ma isi. Wafer, e faʻafetaui ai le manaʻoga eletise eletise i le lumanaʻi mo masini faʻatinoina maualuga.

O le VET Energy e tu'uina atu auaunaga fa'apitoa e fetu'una'i, ma e mafai ona fa'avasega GaN epitaxial layers o mafiafia eseese, ituaiga o doping, ma lapopo'a eseese e tusa ai ma mana'oga patino o tagata fa'atau. E le gata i lea, matou te tuʻuina atu foʻi le lagolago faʻapitoa faʻapolofesa ma le maeʻa o le faʻatau atu auaunaga e fesoasoani ai i tagata faʻatau e vave ona atiaʻe masini eletise eletise maualuga.

FAAMATALAGA WAFERING

*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating

Aitema	8-Inisi	6-Inisi			4-Inisi
Aitema	nP	n-Pm	n-Sa	SI	SI
TTV(GBIR)	≤6um	≤6um
Aufana(GF3YFCD)-Taua atoatoa	≤15μm	≤15μm	≤25μm		≤15μm
A'ai(GF3YFER)	≤25μm	≤25μm	≤40μm		≤25μm
LTV(SBIR)-10mmx10mm	<2μm
Wafer Edge	Fa'ata'oto

FA'AI'U LELEI

*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating

Aitema	8-Inisi	6-Inisi			4-Inisi
	nP	n-Pm	n-Sa	SI	SI
Fa'ai'uga	Itulua Optical Polish, Si- Face CMP
Lau'ele'ele	(10um x 10um) Si-FaceRa≤0.2nm C-Face Ra≤ 0.5nm			(5umx5um) Si-Face Ra≤0.2nm C-Face Ra≤0.5nm
Tipi Chips	Leai se Fa'ataga (umi ma le lautele≥0.5mm)
Indents	Leai se Fa'ataga
Manu'ese(Si-Fua'i)	Qty.≤5, Fa'aopoopo Length≤0.5×wafer diameter	Qty.≤5, Fa'aopoopo Length≤0.5×wafer diameter			Qty.≤5, Fa'aopoopo Length≤0.5×wafer diameter
Ta'eta'ei	Leai se Fa'ataga
Tuusaunoaga Tupito	3mm