VET Energy 12-inisi SOI wafer o se mea e sili ona maualuga le semiconductor substrate, lea e sili ona fiafia i ai ona o mea lelei eletise ma fausaga tulaga ese. E fa'aogaina e le VET Energy le tele o faiga o le gaosiga o le wafer SOI e fa'amautinoa ai o le wafer e matua maualalo le tafe o le taimi nei, maualuga le saoasaoa ma le fa'asalaina o le radiation, e maua ai se fa'avae mautu mo au ta'amilosaga tu'ufa'atasiga maualuga.
Ole laina ole oloa ole VET Energy e le fa'atapula'aina ile wafer SOI. Matou te tuʻuina atu foʻi le tele o mea faʻapipiʻi semiconductor substrate, e aofia ai Si Wafer, SiC Substrate, SiN Substrate, Epi Wafer, ma isi, faʻapea foʻi ma mea fou faʻapipiʻi semiconductor lautele e pei o Gallium Oxide Ga2O3 ma AlN Wafer. O nei oloa e mafai ona faʻafetaui manaoga faʻaoga o tagata faʻatau eseese i le eletise eletise, RF, masini ma isi fanua.
O le taula'i atu i le tulaga lelei, o lo'o fa'aogaina fo'i e a tatou u'amea so'o mea fa'apitoa e pei o le gallium oxide Ga2O3, kaseti ma AlN wafers e fa'amautinoa ai le fa'atuatuaina ma le lelei i tulaga fa'atino uma. Fa'alagolago i le VET Energy e tu'uina atu fofo fa'amutaina e fa'aola ai le ala mo le fa'agasologa o tekonolosi.
Fa'ailoa le gafatia o lau galuega fa'atasi ma le fa'atinoga sili o VET Energy 12-inisi SOI wafers. Fa'ateleina lou gafatia fa'afouga ma fa'a'ofu'ofu e fa'aalia ai le lelei, sa'o ma le fa'afouga, fa'ata'atia le fa'avae mo le manuia i le tulaga fa'amalosi o tekonolosi semiconductor. Filifili le VET Energy mo vaifofo wafer SOI e sili atu nai lo fa'amoemoega.
FAAMATALAGA WAFERING
*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating
Aitema | 8-Inisi | 6-Inisi | 4-Inisi | ||
nP | n-Pm | n-Sa | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Aufana(GF3YFCD)-Taua atoatoa | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
A'ai(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR)-10mmx10mm | <2μm | ||||
Wafer Edge | Fa'ata'oto |
FA'ATA'U LUGA
*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating
Aitema | 8-Inisi | 6-Inisi | 4-Inisi | ||
nP | n-Pm | n-Sa | SI | SI | |
Fa'ai'uga | Itulua Optical Polish, Si- Face CMP | ||||
Lau'ele'ele | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Tipi Chips | Leai se Fa'ataga (umi ma le lautele≥0.5mm) | ||||
Indents | Leai se Fa'ataga | ||||
Manu'ese(Si-Fua'i) | Qty.≤5, Fa'aopoopo | Qty.≤5, Fa'aopoopo | Qty.≤5, Fa'aopoopo | ||
Ta'eta'ei | Leai se Fa'ataga | ||||
Tuusaunoaga Tupito | 3mm |