SiC Yashushanyije Graphite Itwara / Susceptor

Ibisobanuro bigufi:

VET Ingufu SiC Coated Graphite Carrier / Susceptor nigicuruzwa cyiza cyane cyagenewe gutanga imikorere ihamye kandi yizewe mugihe kinini. Ifite ubushyuhe bwiza cyane hamwe nubushyuhe bwumuriro, ubuziranenge bwinshi, kurwanya isuri, bigatuma biba igisubizo cyiza kubisabwa gutunganya wafer.

 


Ibicuruzwa birambuye

Ibicuruzwa

SiC isize suscetpor nikintu cyingenzi gikoreshwa mubikorwa bitandukanye byo gukora igice cya kabiri. Twifashishije tekinoroji yacu yemewe kugirango dukore suscetpor ya SiC ifite isuku irenze urugero, uburinganire bwiza hamwe nubuzima bwiza bwa serivisi, hamwe n’imiti myinshi irwanya imiti hamwe nubushyuhe bwumuriro.

Ibiranga ibicuruzwa byacu:

1. Ubushyuhe bwo hejuru bwa okiside irwanya 1700 ℃.
2. Isuku ryinshi nuburinganire bwumuriro
3. Kurwanya ruswa nziza: aside, alkali, umunyu na reagent.
4. Gukomera cyane, hejuru yuzuye, ibice byiza.
5. Kuramba kumurimo muremure kandi biramba

umwikorezi2 umwikorezi4

umwikorezi1 umwikorezi3

 

CVD SiC薄膜基本物理性能

Ibyingenzi bifatika bya CVD SiCgutwikira

性质 / Umutungo

典型数值 / Agaciro gasanzwe

晶体结构 / Imiterere ya Crystal

FCC β icyiciro多晶,主要为(111 )取向

密度 Ubucucike

3.21 g / cm³

硬度 / Gukomera

2500 维氏硬度( 500g umutwaro)

晶粒大小 / Ibinyampeke SiZe

2 ~ 10 mm

纯度 / Ubuziranenge bwa Shimi

99.99995%

热容 / Ubushyuhe

640 J · kg-1· K.-1

升华温度 / Ubushyuhe bwo hejuru

2700 ℃

抗弯强度 / Imbaraga zoroshye

415 MPa RT amanota 4

杨氏模量 / Modulus

430 Gpa 4pt yunamye, 1300 ℃

导热系数 / ThermalImyitwarire

300W · m-1· K.-1

热膨胀系数 Kwagura Ubushyuhe (CTE)

4.5 × 10-6K-1

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Murakaza neza cyane gusura uruganda rwacu, reka tuganire kubindi biganiro!

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