Ipitingi ya SiC irashobora gutegurwa nububiko bwa chimique (CVD), guhindura preursor, gutera plasma, nibindi. Igipfundikizo cyateguwe nubushyuhe bwa CHEMICAL ni kimwe kandi cyoroshye, kandi gifite igishushanyo mbonera. Gukoresha methyl trichlosilane. (CHzSiCl3, MTS) nkisoko ya silicon, SiC coating itegura ...
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