6 Inchi N Mtundu wa SiC Wafer

Kufotokozera Kwachidule:

6 Inchi N Type SiC Wafer yochokera ku VET Energy ndi gawo lapansi lochita bwino kwambiri lopangidwira mapulogalamu apamwamba a semiconductor, omwe amapereka matenthedwe apamwamba kwambiri komanso mphamvu zamagetsi. VET Energy imagwiritsa ntchito ukadaulo wotsogola kupanga zowotcha zapamwamba kwambiri zomwe zimakwaniritsa zofunikira zamagetsi amakono, kuwonetsetsa kudalirika komanso kulimba pazida zamagetsi.


Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Mtundu wa SiC Wafer wa 6 Inchi N umapangidwira kuti ugwire bwino ntchito m'malo ovuta kwambiri, ndikupangitsa kukhala chisankho chabwino pamapulogalamu omwe amafunikira mphamvu yayikulu komanso kukana kutentha. Zopangira zazikulu zomwe zimagwirizana ndi chophikachi ndi Si Wafer, SiC Substrate, SOI Wafer, ndi SiN Substrate. Zidazi zimawonetsetsa kuti zimagwira ntchito bwino m'njira zosiyanasiyana zopangira semiconductor, zomwe zimathandizira zida zomwe zili ndi mphamvu komanso zolimba.

Kwa makampani omwe amagwira ntchito ndi Epi Wafer, Gallium Oxide Ga2O3, Cassette, kapena AlN Wafer, VET Energy's 6 Inch N Type SiC Wafer imapereka maziko ofunikira pakupanga zinthu zatsopano. Kaya ndi zamagetsi zamagetsi zamphamvu kwambiri kapena zamakono zamakono za RF, zophika izi zimatsimikizira kusinthasintha kwabwino komanso kukana kutentha pang'ono, kukankhira malire a magwiridwe antchito ndi magwiridwe antchito.

Chithunzi cha 6-36
Chithunzi cha 6-35

ZINTHU ZONSE

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

Kanthu

8-inchi

6-inchi

4-inchi

nP

n-pm

n-Zam

SI

SI

TTV(GBIR)

≤6um

≤6um

Bow(GF3YFCD) -Mtheradi Wamtengo Wapatali

≤15μm

≤15μm

≤25μm

≤15μm

Warp(GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV(SBIR) -10mmx10mm

<2 mu

Wafer Edge

Beveling

PAMENE MALIZA

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

Kanthu

8-inchi

6-inchi

4-inchi

nP

n-pm

n-Zam

SI

SI

Pamwamba Pamwamba

Mbali ziwiri za Optical Polish, Si- Face CMP

SurfaceRoughness

(10um x 10um) Si-FaceRa≤0.2nm
C-Face Ra≤ 0.5nm

(5umx5um) Si-Face Ra≤0.2nm
C-Face Ra≤0.5nm

Chips za Edge

Palibe Chololedwa (kutalika ndi m'lifupi ≥0.5mm)

Inde

Palibe Chololedwa

Zikwapu (Si-Face)

Unyinji.≤5, Zowonjezera
Utali≤0.5× wafer awiri

Unyinji.≤5, Zowonjezera
Utali≤0.5× wafer awiri

Unyinji.≤5, Zowonjezera
Utali≤0.5× wafer awiri

Ming'alu

Palibe Chololedwa

Kupatula M'mphepete

3 mm

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