Silicon Wafer 12 inch maka nrụpụta Semiconductor

Nkọwa dị mkpirikpi:

VET Energy 12-inch silicon wafers bụ isi ihe bụ isi nke ụlọ ọrụ nrụpụta semiconductor. VET Energy na-eji teknụzụ uto CZ dị elu iji hụ na wafers nwere ọmarịcha kristal, njupụta dị ala na ịdị n'otu dị elu, na-enye mkpụrụ siri ike na ntụkwasị obi maka ngwaọrụ semiconductor gị.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Silicon Wafer nke anụ ọhịa iri na abụọ maka nrụpụta Semiconductor nke VET Energy na-enye ka emebere ya iji mezuo ụkpụrụ ziri ezi achọrọ na ụlọ ọrụ semiconductor. Dị ka otu n'ime ngwaahịa ndị na-eduga n'usoro anyị, VET Energy na-ahụ na a na-emepụta wafers ndị a n'ụzọ ziri ezi, ịdị ọcha na ịdị mma elu, na-eme ka ha dị mma maka ngwa ngwa semiconductor, gụnyere microchips, sensọ na ngwaọrụ eletrọnịkị dị elu.

Wafer a dakọtara na ihe dị iche iche dị ka Si Wafer, SiC Substrate, SOI Wafer, Sin Substrate, na Epi Wafer, na-enye ezigbo mgbanwe maka usoro mmepụta dị iche iche. Na mgbakwunye, ọ jikọtara nke ọma na teknụzụ dị elu dị ka Gallium Oxide Ga2O3 na AlN Wafer, na-ahụ na enwere ike itinye ya n'ime ngwa pụrụ iche. Maka ịrụ ọrụ nke ọma, a na-ahazi wafer maka iji ya na sistemụ Cassette ọkọlọtọ nke ụlọ ọrụ, na-ahụ na njikwa nke ọma na nrụpụta semiconductor.

Ahịrị ngwaahịa VET Energy ejedebeghị na wafer silicon. Anyị na-enyekwa ihe dị iche iche nke semiconductor ihe, gụnyere SiC Substrate, SOI Wafer, Sin Substrate, Epi Wafer, wdg, yana ihe ọhụrụ bandgap semiconductor ihe dị ka Gallium Oxide Ga2O3 na AlN Wafer. Ngwaahịa ndị a nwere ike gboo mkpa ngwa nke ndị ahịa dị iche iche na igwe eletrọnịkị ike, ugboro redio, sensọ na mpaghara ndị ọzọ.

Mpaghara ngwa:
Mpempe mgbagha:Ịmepụta ibe mgbagha dị elu dị ka CPU na GPU.
Mpempe ebe nchekwa:Imepụta ibe ebe nchekwa dị ka DRAM na NAND Flash.
Analog ibe:Imepụta ibe analọgụ dịka ADC na DAC.
Ihe mmetụta:Sensọ MEMS, ihe mmetụta onyonyo, wdg.

VET Energy na-enye ndị ahịa ihe ngwọta wafer ahaziri ahazi, ma nwee ike hazie wafers dị iche iche resistivity, ọdịnaya oxygen dị iche iche, ọkpụrụkpụ dị iche iche na nkọwa ndị ọzọ dịka mkpa ndị ahịa siri dị. Na mgbakwunye, anyị na-enyekwa nkwado teknụzụ ọkachamara na ọrụ ire ere iji nyere ndị ahịa aka ịkwalite usoro mmepụta ma melite mkpụrụ ngwaahịa.

6页-36
6页-35

Nkọwapụta WAFERING

*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara-lnsulating

Ihe

8-anụ ọhịa

6-anụ ọhịa

4-anụ ọhịa

nP

n-Pm

n-Ps

SI

SI

TTV(GBIR)

≤6um

≤6um

Ụta(GF3YFCD)-Uru zuru oke

≤15μm

≤15μm

≤25μm

≤15μm

Warp(GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV (SBIR) -10mmx10mm

<2μm

Wafer Edge

Beveling

IMEcha elu ala

*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara-lnsulating

Ihe

8-anụ ọhịa

6-anụ ọhịa

4-anụ ọhịa

nP

n-Pm

n-Ps

SI

SI

Emecha elu elu

Akụkụ abụọ Optical Polish, Si- Face CMP

Ọdịdị elu

(10um x 10um) Si-FaceRa≤0.2nm
C-Ihu Ra≤ 0.5nm

(5umx5um) Si-Face Ra≤0.2nm
C-Ihu Ra≤0.5nm

ibe ibe

Ọnweghị nke ekwenyere (ogologo na obosara≥0.5mm)

Indents

Ọnweghị nke ekwenyere

Scratches (Si-Ihu)

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Mgbawa

Ọnweghị nke ekwenyere

Mwepu ihu

3mm

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