VET Energy silicon carbide (SiC) epitaxial wafer bụ ihe na-arụ ọrụ obosara bandgap semiconductor ihe nwere oke nguzogide okpomọkụ dị elu, ugboro dị elu na njirimara ike dị elu. Ọ bụ ezigbo mkpụrụ maka ọgbọ ọhụrụ nke ngwaọrụ eletrọnịkị ike. VET Energy na-eji teknụzụ epitaxial MOCVD dị elu na-eto eto SiC epitaxial layers na mkpụrụ SiC, na-ahụ na arụmọrụ dị mma na nkwụsi ike nke wafer.
Silicon Carbide (SiC) Epitaxial Wafer na-enye ezigbo ndakọrịta yana ọtụtụ ihe semiconductor gụnyere Si Wafer, SiC Substrate, SOI Wafer, na SiN Substrate. Site na oyi akwa epitaxial ya siri ike, ọ na-akwado usoro dị elu dị ka uto Epi Wafer na ntinye ya na ihe ndị dị ka Gallium Oxide Ga2O3 na AlN Wafer, na-eme ka ojiji dị iche iche na teknụzụ dị iche iche. Ezubere ka ọ dakọtara na sistemụ njikwa Cassette ọkọlọtọ nke ụlọ ọrụ, ọ na-eme ka arụ ọrụ dị mma na nke dabara adaba na gburugburu nrụpụta semiconductor.
Ahịrị ngwaahịa VET Energy ejedebeghị na wafers SiC epitaxial. Anyị na-enyekwa ihe dị iche iche nke semiconductor ihe, gụnyere Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, wdg. Na mgbakwunye, anyị na-arụsi ọrụ ike na-emepụta ihe ọhụrụ bandgap semiconductor, dị ka Gallium Oxide Ga2O3 na AlN. Wafer, iji gboo mkpa ụlọ ọrụ eletrọnịkị ike n'ọdịnihu maka ngwaọrụ arụmọrụ dị elu.
Nkọwapụta WAFERING
*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara-lnsulating
Ihe | 8-anụ ọhịa | 6-anụ ọhịa | 4-anụ ọhịa | ||
nP | n-Pm | n-Ps | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Ụta(GF3YFCD)-Uru zuru oke | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV (SBIR) -10mmx10mm | <2μm | ||||
Wafer Edge | Beveling |
IMEcha elu ala
*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara-lnsulating
Ihe | 8-anụ ọhịa | 6-anụ ọhịa | 4-anụ ọhịa | ||
nP | n-Pm | n-Ps | SI | SI | |
Emecha elu elu | Akụkụ abụọ Optical Polish, Si- Face CMP | ||||
Ọdịdị elu | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
ibe ibe | Ọnweghị nke ekwenyere (ogologo na obosara≥0.5mm) | ||||
Indents | Ọnweghị nke ekwenyere | ||||
Scratches (Si-Ihu) | Qty.≤5,Nchịkọta | Qty.≤5,Nchịkọta | Qty.≤5,Nchịkọta | ||
Mgbawa | Ọnweghị nke ekwenyere | ||||
Mwepu ihu | 3mm |