SiC Coating/Coated Graphite Substrate/Tray for Semiconductor

ʻO ka wehewehe pōkole:

ʻO VET Energy SiC Coated Graphite Susceptor for Epitaxial Growth he huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūpaʻa a hilinaʻi hoʻi i kahi manawa lōʻihi.Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ka like ʻana o ka wela, ka maʻemaʻe kiʻekiʻe, ka pale ʻana i ka erosion, e hana ana i ka hopena kūpono no nā noi hana wafer.


Huahana Huahana

Huahana Huahana

ʻO ka uhi SiC / uhi ʻia o ka susceptor Graphite no Semiconductor
 
ʻO SiC Coated Graphite Susceptor kahi mea nui i hoʻohana ʻia i nā kaʻina hana semiconductor.Hoʻohana mākou i kā mākou ʻenehana patented e hana i ka mea lawe silicon carbide me ka maʻemaʻe kiʻekiʻe loa, ka like ʻana o ka uhi maikaʻi a me ke ola lawelawe maikaʻi loa, a me ke kūpaʻa kemika kiʻekiʻe a me nā waiwai paʻa wela.

 Nā hiʻohiʻona: 
· ʻOi loa ka Thermal Shock Resistance
· Kūleʻa haʻalulu kino maikaʻi
· Kūʻē Kemika maikaʻi loa
· Maʻemaʻe Kiʻekiʻe
· Loaʻa ma ke ʻano paʻakikī
· Hoʻohana ʻia ma lalo o ka Oxidizing Atmosphere

Noi:

3

Nā ʻano maʻamau o ka Material Graphite Base:

ʻIke ʻia ka mānoanoa: 1.85 g/cm3
Ke kū'ē uila: 11 μΩm
ʻO ke koʻikoʻi ʻoluʻolu: 49 MPa (500kgf/cm2)
Paʻa Paʻa: 58
lehu: <5ppm
ʻO ka wela wela: 116 W/mK (100 kcal/mhr- ℃)

 

CVD SiC薄膜基本物理性能

Nā waiwai kino kumu o CVD SiCka uhi ʻana

性质 / Waiwai

典型数值 / Waiwai maʻamau

晶体结构 / Hoʻokumu Crystal

FCC β phase 多晶,主要为(111)取向

密度 / Density

3.21 g/cm³

硬度 / Paʻakiki

2500 维氏硬度(500g load)

晶粒大小 / Grain SiZe

2~10μm

纯度 / Maʻemaʻe Kemika

99.99995%

热容 / Kaha Wela

640 J·kg-1·K-1

升华温度 / Kaumaha Sublimation

2700 ℃

抗弯强度 / Ka ikaika Flexural

415 MPa RT 4-point

杨氏模量 / Young's Modulus

430 Gpa 4pt piko, 1300 ℃

导热系数 / Hoʻokaʻawale wela

300W·m-1·K-1

热膨胀系数 / Hoʻonui Thermal(CTE)

4.5×10-6K-1

1

2

 

ʻO VET Energy ka mea hana maoli i nā huahana graphite a me nā silicon carbide me nā ʻāpana like ʻole e like me ka uhi SiC, ka uhi TaC, ka uhi kalapona aniani, ka uhi kalapona pyrolytic, a me nā mea ʻē aʻe, hiki ke hāʻawi i nā ʻāpana like ʻole no ka semiconductor a me ka ʻoihana photovoltaic.

Hele mai kā mākou hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki iā ia ke hāʻawi i nā hoʻonā ʻoihana ʻoihana hou aku no ʻoe.

Hoʻomohala mau mākou i nā kaʻina hana kiʻekiʻe e hāʻawi i nā mea ʻoi aku ka holomua, a ua hana mākou i kahi ʻenehana patented kūʻokoʻa, hiki ke hoʻoikaika i ka paʻa ʻana ma waena o ka uhi a me ka substrate a ʻoi aku ka liʻiliʻi o ka wehe.

Hoʻokipa maikaʻi iā ʻoe e kipa i kā mākou hale hana, e kūkākūkā hou kāua!

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