ʻO ka VET EnergyʻO SiC i uhi ʻia ʻo MOCVD Susceptorhe huahana hana kiʻekiʻe i hana ʻia no ka hana kūpaʻa a hilinaʻi i nā noi hana wafer. E hōʻike ana i kahi kiʻekiʻeKa uhi ʻana o SiC, hāʻawi ia i ke kūʻokoʻa wela, ka like ʻana o ka wela, a me ka pale ʻana i ka corrosion. Kūpono noMea lako MOCVD, keiasusceptor i uhi ʻia i ka carbide silikahōʻoia i ka maikaʻiwaferka ulu ʻana a me ka lōʻihi o ke ola o nā mea hana.
Nā hiʻohiʻona huahana:
1. Ke kū'ē kū'ē i ka wela wela a hiki i 1700 ℃: Hāʻawi kā mākou uhi SiC i ke kūpaʻa wela ʻokoʻa, ʻoiai ma nā wahi MOCVD koi nui loa.
2. ʻO ka hoʻomaʻemaʻe kiʻekiʻe a me ke kūlike wela: ʻO ka silicon carbide susceptor e hōʻoiaʻiʻo i ka liʻiliʻi o nā haumia a me ka hoʻomehana mau ʻana i ka wafer, e hōʻoiaʻiʻo ana i ka maikaʻi o ke aniani.
3. Kūleʻa corrosion maikaʻi loa: Ke kū'ē i nāʻakika, nā alkali, nā paʻakai, a me nā mea hoʻoheheʻe organik, mālama ko mākou susceptor i kona kūpaʻa i nāʻano kemika.
4. ʻO ka paʻakikī kiʻekiʻe, ka ʻili ākea, a me nā ʻāpana maikaʻi: Hāʻawi kēia mau waiwai i kahi ola lawelawe lōʻihi a hoʻonui i ka lōʻihi.
ʻO kā mākou CVD silicon carbide i uhi ʻia i nā pono a me nā noi
Hāʻawi nā mea susceptors MOCVD i nā pōmaikaʻi nui i ka hana semiconductor. Hoʻonui ka SiC coating i ka maikaʻi o ka wafer, hōʻemi i nā hemahema, a hoʻonui i ka pono hana. Hāʻawi ʻo VET Energy i kahi ākea o nā huahana silicon carbide i kūpono i nā pono kikoʻī o ka semiconductor a me nā ʻoihana photovoltaic.
Hoʻoponopono huahana a me ke kākoʻo ʻenehana
Ma ke ʻano he mea hana nui o nā huahana silicon carbide a me graphite, hāʻawi ʻo VET Energy i nā hoʻonā maʻamau me nā uhi like ʻole e like me SiC, TaC, kalapona aniani, a me ka carbon pyrolytic. Hiki i kā mākou hui akamai ke hāʻawi i ke alakaʻi a me ke kākoʻo no kāu noi kikoʻī.