SiC Coated Barrel Susceptor

ʻO ka wehewehe pōkole:

ʻO VET Energy SiC Coated Barrel Susceptor kahi huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūpaʻa a hilinaʻi i ka manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ka like ʻana o ka wela, ka maʻemaʻe kiʻekiʻe, ka pale ʻana i ka erosion, e hana ana i ka hopena kūpono no nā noi hana wafer.


  • Kahi i kumu:Kina
  • Hoʻokumu Crystal:Māhele FCCβ
  • ʻO ka mānoanoa:3.21 g/cm;
  • ʻoʻoleʻa:2500 Vickers;
  • Ka nui o ka palaoa:2~10μm;
  • Maʻemaʻe Kemika:99.99995%;
  • Kaha wela:640J·kg-1·K-1;
  • Mahana Sublimation:2700 ℃;
  • Ka ikaika o ke kino:415 Mpa (RT 4-Point);
  • 'Ōpio's Modulus:430 Gpa (4pt piko, 1300 ℃);
  • Hoʻonui Thermal (CTE):4.5 10-6K-1;
  • ʻO ka wela wela:300(W/MK);
  • Huahana Huahana

    Huahana Huahana

    Barela mea hoʻopili is a ʻāpana i hoʻohana ʻia i nā kaʻina hana semiconductor.Hoʻohana mākou i kā mākou ʻenehana patented e hana i kabarrel susceptormeka maemae loa,maikaʻi loaka uhi ʻanalokahia me kahi ola lawelawe maikaʻi loa, a ʻo kekahikiʻekiʻe kemika kū'ē a me ka wela paʻa waiwai.

    ʻO VET Energy ka kamea hana maoli o ka graphite maʻamau a me nā huahana silicon carbide me ka uhi CVD,hiki ke hoolakoʻokoʻanā ʻāpana i hana ʻia no ka semiconductor a me ka ʻoihana photovoltaic. OʻO kāu hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā ʻoihana ʻoihana ʻoi aku ka nuināu.

    Hoʻomau mau mākou i nā kaʻina hana kiʻekiʻe e hāʻawi i nā mea ʻoi aku ka holomua,aUa hana ʻo ia i kahi ʻenehana patented kūʻokoʻa, hiki iā ia ke hana i ka hoʻopaʻa ʻana ma waena o ka uhi a me ka substrate i ʻoi aku ka paʻa a emi ʻole i ka wehe.

    Fnā ʻano o kā mākou huahana:

    1. Kiʻekiʻe wela oxidation kū'ē a hiki i 1700.
    2. Maʻemaʻe kiʻekiʻe ahoʻolikelike wela
    3. ʻOi aku ka maikaʻi o ka corrosion resistance: acid, alkali, paʻakai a me nā mea hoʻohui.
    4. ʻO ka paʻakikī kiʻekiʻe, ka ʻili paʻa, nā ʻāpana maikaʻi.
    5. ʻOi aku ka lōʻihi o ke ola lawelawe a ʻoi aku ka lōʻihi

    CVD SiC薄膜基本物理性能

    Nā waiwai kino kumu o CVD SiCka uhi ʻana

    性质 / Waiwai

    典型数值 / Waiwai maʻamau

    晶体结构 / Hoʻomoe Crystal

    Māhele FCC β多晶,主要为(111)取向

    密度 / Paʻa

    3.21 g/cm³

    硬度 / Oolea

    2500 维氏硬度(500g load)

    晶粒大小 / ʻAiʻa palaoa

    2~10μm

    纯度 / Maemae Kemika

    99.99995%

    热容 / Hikina Wela

    640 J·kg-1·K-1

    升华温度 / Kaumaha Sublimation

    2700 ℃

    抗弯强度 / Ka Ikaika Pilikia

    415 MPa RT 4-point

    杨氏模量 / 'Ōpio's Modulus

    430 Gpa 4pt piko, 1300 ℃

    导热系数 / ThermalʻO ka hoʻokō

    300W·m-1·K-1

    热膨胀系数 / Hoʻonui wela (CTE)

    4.5×10-6K-1

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