Silicon Carbide Coated Graphite Susceptor for LED Etching

ʻO ka wehewehe pōkole:

Silicon carbide susceptor no LED etching (SiC tray) he mea kōkua kūikawā no ka hohonu silicon etching (ICP etching machine). ʻO ka mea lawe wafer, ʻike ʻia hoʻi ʻo ka wafer carrier, silicone wafer carrier, ʻike ʻia hoʻi ʻo pocket wafer. Hoʻohana nui ʻia i ka semiconductor CVD a me ka vacuum sputtering.


Huahana Huahana

Huahana Huahana

ʻO ka susceptor i uhi ʻia ʻo Silicon carbidea ʻāpana i hoʻohana ʻia i nā kaʻina hana semiconductor.Hoʻohana mākou i kā mākou ʻenehana patent e hana i ka susceptor i uhi ʻia me ka silicon carbideka maemae loa,maikaʻi loaka uhi ʻanalokahia me kahi ola lawelawe maikaʻi loa, a ʻo kekahikiʻekiʻe kemika kū'ē a me ka wela paʻa waiwai.

ʻO VET Energy ka kamea hana maoli o ka graphite maʻamau a me nā huahana silicon carbide me ka uhi CVD,hiki ke hoolakoʻokoʻanā ʻāpana i hana ʻia no ka semiconductor a me ka ʻoihana photovoltaic. OʻO kāu hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā ʻoihana ʻoihana ʻoi aku ka nuināu.

Hoʻomau mau mākou i nā kaʻina hana kiʻekiʻe e hāʻawi i nā mea ʻoi aku ka holomua,aUa hana ʻo ia i kahi ʻenehana patented kūʻokoʻa, hiki iā ia ke hana i ka hoʻopaʻa ʻana ma waena o ka uhi a me ka substrate i ʻoi aku ka paʻa a emi ʻole i ka wehe.

Fnā ʻano o kā mākou huahana:

1. Kiʻekiʻe wela oxidation kū'ē a hiki i 1700.
2. Maʻemaʻe kiʻekiʻe ahoʻolikelike wela
3. ʻOi aku ka maikaʻi o ka corrosion resistance: acid, alkali, paʻakai a me nā mea hoʻohui.
4. ʻO ka paʻakikī kiʻekiʻe, ka ʻili paʻa, nā ʻāpana maikaʻi.
5. ʻOi aku ka lōʻihi o ke ola a ʻoi aku ka lōʻihi

CVD SiC薄膜基本物理性能

Nā waiwai kino kumu o CVD SiCka uhi ʻana

性质 / Waiwai

典型数值 / Waiwai maʻamau

晶体结构 / Hoʻomoe Crystal

Māhele FCC β多晶,主要为(111)取向

密度 / Paʻa

3.21 g/cm³

硬度 / Oolea

2500 维氏硬度(500g load)

晶粒大小 / ʻAiʻa palaoa

2~10μm

纯度 / Maemae Kemika

99.99995%

热容 / Hikina Wela

640 J·kg-1·K-1

升华温度 / Kaumaha Sublimation

2700 ℃

抗弯强度 / Ka Ikaika Pilikia

415 MPa RT 4-point

杨氏模量 / 'Ōpio's Modulus

430 Gpa 4pt piko, 1300 ℃

导热系数 / ThermalʻO ka hoʻokō

300W·m-1·K-1

热膨胀系数 / Hoʻonui wela (CTE)

4.5×10-6K-1

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Hoʻokipa maikaʻi iā ʻoe e kipa i kā mākou hale hana, e kūkākūkā hou kāua!

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