I-SiC Coated Graphite Carrier / Susceptor

Incazelo emfushane:

I-VET Energy SiC Coated Graphite Carrier/Susceptor iwumkhiqizo osebenza kahle kakhulu oklanyelwe ukunikeza ukusebenza okungaguquki nokuthembekile esikhathini eside. Inokumelana nokushisa okuhle kakhulu nokufana okushisayo, ukuhlanzeka okuphezulu, ukumelana nokuguguleka, okuyenza ibe yisixazululo esiphelele sezinhlelo zokusebenza zokucubungula ama-wafer.

 


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-SiC coated suscetpor iyisici esibalulekile esisetshenziswa ezinqubweni zokukhiqiza ezahlukahlukene ze-semiconductor. Sisebenzisa ubuchwepheshe bethu obunelungelo lobunikazi ukwenza i-SiC coated suscetpor ibe nokuhlanzeka okuphezulu kakhulu, ukufana okuhle kokunamathela nempilo yesevisi enhle kakhulu, kanye nokumelana namakhemikhali okuphezulu kanye nezakhiwo ezishisayo ezishisayo.

Izici zemikhiqizo yethu:

1. Ukumelana nokushisa okuphezulu kwe-oxidation kufika ku-1700 ℃.
2. Ukuhlanzeka okuphezulu nokufana okushisayo
3. Ukumelana nokugqwala okuhle kakhulu: i-asidi, i-alkali, usawoti kanye nama-organic reagents.
4. Ukuqina okuphezulu, indawo ehlangene, izinhlayiya ezinhle.
5. Impilo yesevisi ende futhi ihlala isikhathi eside

umthwali2 umthwali4

umthwali1 umthwali3

 

I-CVD SiC薄膜基本物理性能

Izakhiwo eziyisisekelo ze-CVD SiCenamathela

性质 / Impahla

典型数值 / Inani Elijwayelekile

晶体结构 / Isakhiwo seCrystal

I-FCC β isigaba多晶,主要為(111)取向

密度 / Ukuminyana

3.21 g/cm³

硬度 / Ukuqina

2500 维氏硬度 (500g umthwalo)

晶粒大小 / Uhlamvu SiZe

2 ~ 10μm

纯度 / Ukuhlanzeka Kwamakhemikhali

99.99995%

热容 / Amandla Okushisa

640 J·kg-1·K-1

升华温度 / I-Sublimation Temperature

2700 ℃

抗弯强度 / Amandla Aguquguqukayo

415 MPa RT 4-iphoyinti

杨氏模量 / I-Modulus Encane

430 Gpa 4pt ukugoba, 1300℃

导热系数 / ThermalI-Conductivity

300Wm-1·K-1

热膨胀系数 / Ukwandiswa Kokushisa (CTE)

4.5×10-6K-1

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