I-SiC coating ingalungiswa nge-chemical vapor deposition (CVD), ukuguqulwa kwesandulela, isifutho se-plasma, njll. I-coating elungiselelwe i-CHEMICAL vapor deposition ifana futhi ihlangene, futhi inokuklama okuhle. Ukusebenzisa i-methyl trichlorsilane. (CHzSiCl3, MTS) njengomthombo we-silicon, i-SiC coating ilungiselela...
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