Paddle SiC Cantilever To ti ni ilọsiwaju fun Sisẹ Wafer

Paddle SiC Cantilever To ti ni ilọsiwaju fun Ṣiṣẹda Wafer Aworan Ifihan

Apejuwe kukuru:

Awọn To ti ni ilọsiwaju SiC Cantilever Paddle fun Wafer Processing ti a ṣe nipasẹ vet-china nlo awọn ohun elo SiC ti o ga-giga lati mu ilọsiwaju daradara ati deede ti sisẹ wafer. Vet-china's cantilever paddle awọn ẹya ara ẹrọ resistance ooru to dara julọ ati resistance ipata, aridaju iṣẹ mimu wafer iduroṣinṣin ni awọn agbegbe iṣelọpọ lile, ti o jẹ ki o jẹ yiyan pipe fun imudara ikore iṣelọpọ.

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To ti ni ilọsiwajuSiC Cantilever Paddlefun Ṣiṣeto Wafer ti a ṣẹda nipasẹ vet-china pese ojutu ti o dara julọ fun iṣelọpọ semikondokito. Paddle cantilever yii jẹ ti ohun elo SiC (silicon carbide), ati lile giga rẹ ati resistance ooru jẹ ki o ṣetọju iṣẹ ṣiṣe ti o dara julọ ni iwọn otutu giga ati awọn agbegbe ibajẹ. Apẹrẹ ti Cantilever Paddle gba wafer laaye lati ni atilẹyin igbẹkẹle lakoko sisẹ, idinku eewu ti pipin ati ibajẹ.

SiC Cantilever Paddlejẹ paati amọja ti a lo ninu awọn ohun elo iṣelọpọ semikondokito bii ileru ifoyina, ileru kaakiri, ati ileru annealing, lilo akọkọ jẹ fun ikojọpọ wafer ati ṣiṣi silẹ, ṣe atilẹyin ati gbigbe awọn wafers lakoko awọn ilana iwọn otutu.

Awọn ẹya ti o wọpọtiSiCcantileverpadie: a cantilever be, ti o wa titi ni ọkan opin ati ki o free ni awọn miiran, ojo melo ni alapin ati paddle-bi oniru.

Agbara VET lo awọn ohun elo ohun elo carbide ohun alumọni mimọ giga lati ṣe iṣeduro didara naa.

Awọn ohun-ini ti ara ti Silicon Carbide Recrystallized
Ohun ini	Iye Aṣoju
Iwọn otutu iṣẹ (°C)	1600°C (pẹlu atẹgun), 1700°C (idinku ayika)
SiC akoonu	> 99.96%
Si akoonu ọfẹ	<0.1%
Olopobobo iwuwo	2,60-2,70 g / cm³
Porosity ti o han gbangba	<16%
Agbara funmorawon	> 600MPa
Agbara atunse tutu	80-90 MPa (20°C)
Gbona atunse agbara	90-100 MPa (1400°C)
Gbona imugboroosi @1500°C	4.70 10^-6/°C
Gbona elekitiriki @1200°C	23W/m•K
Iwọn rirọ	240 GPA
Gbona mọnamọna resistance	O dara pupọ