To ti ni ilọsiwajuSiC Cantilever Paddlefun Ṣiṣeto Wafer ti a ṣẹda nipasẹ vet-china pese ojutu ti o dara julọ fun iṣelọpọ semikondokito. Paddle cantilever yii jẹ ti ohun elo SiC (silicon carbide), ati lile giga rẹ ati resistance ooru jẹ ki o ṣetọju iṣẹ ṣiṣe ti o dara julọ ni iwọn otutu giga ati awọn agbegbe ibajẹ. Apẹrẹ ti Cantilever Paddle gba wafer laaye lati ni atilẹyin igbẹkẹle lakoko sisẹ, idinku eewu ti pipin ati ibajẹ.
SiC Cantilever Paddlejẹ paati amọja ti a lo ninu awọn ohun elo iṣelọpọ semikondokito bii ileru ifoyina, ileru kaakiri, ati ileru annealing, lilo akọkọ jẹ fun ikojọpọ wafer ati ṣiṣi silẹ, ṣe atilẹyin ati gbigbe awọn wafers lakoko awọn ilana iwọn otutu.
Awọn ẹya ti o wọpọtiSiCcantileverpadie: a cantilever be, ti o wa titi ni ọkan opin ati ki o free ni awọn miiran, ojo melo ni alapin ati paddle-bi oniru.
Agbara VET lo awọn ohun elo ohun elo carbide ohun alumọni mimọ giga lati ṣe iṣeduro didara naa.
| Awọn ohun-ini ti ara ti Silicon Carbide Recrystallized | |
| Ohun ini | Iye Aṣoju |
| Iwọn otutu iṣẹ (°C) | 1600°C (pẹlu atẹgun), 1700°C (idinku ayika) |
| SiC akoonu | > 99.96% |
| Si akoonu ọfẹ | <0.1% |
| Olopobobo iwuwo | 2,60-2,70 g / cm3 |
| Porosity ti o han gbangba | <16% |
| Agbara funmorawon | > 600MPa |
| Agbara atunse tutu | 80-90 MPa (20°C) |
| Gbona atunse agbara | 90-100 MPa (1400°C) |
| Gbona imugboroosi @1500°C | 4.70 10-6/°C |
| Gbona elekitiriki @1200°C | 23W/m•K |
| Iwọn rirọ | 240 GPA |
| Gbona mọnamọna resistance | O dara pupọ |
Awọn anfani ti VET Energy's To ti ni ilọsiwaju SiC Cantilever Paddle fun Ṣiṣeto Wafer jẹ:
-Iduroṣinṣin iwọn otutu: lilo ni awọn agbegbe loke 1600 ° C;
-Iwọn imugboroja igbona kekere: n ṣetọju iduroṣinṣin iwọn, idinku eewu warpage wafer;
-High ti nw: kekere ewu ti irin kontaminesonu;
-Kẹmika inertness: ipata-sooro, o dara fun orisirisi awọn agbegbe gaasi;
-Agbara giga ati lile: Sooro-sooro, igbesi aye iṣẹ pipẹ;
-O dara gbona elekitiriki: iranlọwọ ni aṣọ wafer alapapo.
