4 inch GaN lori SiC Wafer

Apejuwe kukuru:

VET Energy's 4-inch GaN lori wafer SiC jẹ ọja rogbodiyan ni aaye ti itanna agbara. Wafer yii daapọ adaṣe igbona ti o dara julọ ti ohun alumọni carbide (SiC) pẹlu iwuwo agbara giga ati isonu kekere ti gallium nitride (GaN), ti o jẹ ki o jẹ yiyan ti o dara julọ fun ṣiṣe igbohunsafẹfẹ giga, awọn ẹrọ agbara giga. Agbara VET ṣe idaniloju iṣẹ ṣiṣe ti o dara julọ ati aitasera ti wafer nipasẹ imọ-ẹrọ epitaxial MOCVD ti ilọsiwaju.


Alaye ọja

ọja Tags

Laini ọja VET Energy ko ni opin si GaN lori awọn wafers SiC. A tun pese ọpọlọpọ awọn ohun elo sobusitireti semikondokito, pẹlu Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, bbl Ni afikun, a tun n ṣiṣẹ lọwọ ni idagbasoke awọn ohun elo semikondokito jakejado bandgap tuntun, gẹgẹ bi Gallium Oxide Ga2O3 ati AlN Wafer, lati pade ibeere ile-iṣẹ eletiriki agbara iwaju fun awọn ẹrọ iṣẹ ṣiṣe ti o ga julọ.

Agbara VET n pese awọn iṣẹ isọdi ti o rọ, ati pe o le ṣe akanṣe awọn ipele GaN epitaxial ti awọn sisanra oriṣiriṣi, awọn oriṣiriṣi doping, ati awọn iwọn wafer oriṣiriṣi gẹgẹbi awọn iwulo pato ti awọn alabara. Ni afikun, a tun pese atilẹyin imọ-ẹrọ ọjọgbọn ati iṣẹ-tita lẹhin-tita lati ṣe iranlọwọ fun awọn alabara ni iyara lati dagbasoke awọn ẹrọ itanna agbara-giga.

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WAFERING ni pato

*n-Pm=n-iru Pm-Grade,n-Ps=n-iru Ps-Grade,Sl=Ogbede-lnsulating

Nkan

8-inch

6-inch

4-inch

nP

n-Pm

n-Ps

SI

SI

TTV(GBIR)

≤6um

≤6um

Teriba(GF3YFCD) -Iye pipe

≤15μm

≤15μm

≤25μm

≤15μm

Warp(GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV (SBIR) -10mmx10mm

<2μm

Wafer eti

Beveling

Ipari dada

*n-Pm=n-iru Pm-Grade,n-Ps=n-iru Ps-Grade,Sl=Ogbede-lnsulating

Nkan

8-inch

6-inch

4-inch

nP

n-Pm

n-Ps

SI

SI

Dada Ipari

Polish Optical ẹgbẹ meji, Si- Face CMP

SurfaceRoughness

(10um x 10um) Si-FaceRa≤0.2nm
C-Oju Ra≤ 0.5nm

(5umx5um) Si-Face Ra≤0.2nm
C-Oju Ra≤0.5nm

Awọn eerun eti

Ko si Gbigbanilaaye (ipari ati iwọn≥0.5mm)

Indents

Ko Si Iyọọda

Awọn idọti (Si-Face)

Qty.≤5, Akopọ
Ipari≤0.5× wafer opin

Qty.≤5, Akopọ
Ipari≤0.5× wafer opin

Qty.≤5, Akopọ
Ipari≤0.5× wafer opin

Awọn dojuijako

Ko Si Iyọọda

Iyasoto eti

3mm

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