I-Silicon Carbide ehlaziyiweyo yeSikhephe seCrystal ye-Semiconductor Industry

Recrystallized Silicon Carbide Crystal Boat For Semiconductor Industry Featured Featured Image

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I-VET Energy Recrystallized Silicon Carbide Crystal Boat yimveliso ephezulu yokusebenza eyenzelwe ukubonelela ngokusebenza okungaguqukiyo nokuthembekileyo ngexesha elongeziweyo.Inokumelana nobushushu obuhle kakhulu kunye nokufana kwe-thermal, ukucoceka okuphezulu, ukuxhathisa ukhukuliseko, kuyenza ibe sisisombululo esifanelekileyo sokusetyenzwa kwe-wafer.

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Iipropati ze-silicon carbide ehlaziyiweyo

I-silicon carbide ehlaziyiweyo (i-R-SiC) yinto ephezulu yokusebenza enobunzima besibini kuphela kwidayimane, eyenziwe kubushushu obuphezulu obungaphezulu kwe-2000 ℃.Igcina iipropathi ezininzi ezigqwesileyo ze-SiC, ezinje ngamandla obushushu obuphezulu, ukuxhathisa okuqinileyo kwe-corrosion, ukuxhathisa okugqwesileyo kwe-oxidation, ukuchasana kakuhle nokothuka kwe-thermal njalo njalo.

● Iimpawu ezigqwesileyo zoomatshini.I-silicon carbide ehlaziyiweyo inamandla aphezulu kunye nokuqina kune-carbon fiber, ukuchasana kweempembelelo eziphezulu, kunokudlala ukusebenza kakuhle kwiindawo eziphakamileyo zokushisa, kunokudlala ukusebenza kakuhle kokulinganisa kwiimeko ezahlukeneyo.Ukongezelela, ibuye ibe nokuguquguquka okulungileyo kwaye ayonakaliswa lula ngokuzolula kunye nokugoba, okuphucula kakhulu ukusebenza kwayo.

● Ukumelana ne-corrosion ephezulu.I-silicon carbide ehlaziyiweyo inokumelana nokugqwala okuphezulu kwiindidi ezahlukeneyo zeendaba, inokuthintela ukukhukuliseka kweentlobo ezahlukeneyo zeendaba ezitshabalalisayo, inokugcina iipropathi zayo zemishini ixesha elide, inokuqina okuqinileyo, ukuze ibe nobomi obude benkonzo.Ukongezelela, ikwanayo nokuzinza okuhle kwe-thermal, iyakwazi ukulungelelanisa uluhlu oluthile lokutshintsha kweqondo lokushisa, ukuphucula umphumo wesicelo sayo.

● Ukuhlambalaza akufihli.Ngenxa yokuba inkqubo ye-sintering ayinciphisi, akukho xinzelelo olushiyekileyo luya kubangela ukuguqulwa okanye ukuqhekeka kwemveliso, kunye neengxenye ezinemilo enzima kunye nokuchaneka okuphezulu kunokulungiswa.

重结晶碳化硅物理特性 Iimpawu ezibonakalayo zeRecrystallized Silicon Carbide
性质 / Ipropati	典型数值 / Ixabiso eliqhelekileyo
使用温度/ Ubushushu bokusebenza (°C)	1600°C (neoksijini), 1700°C (ukunciphisa okusingqongileyo)
SiC含量/ Umxholo weSiC	> 99.96%
自由Si含量/ Isiqulatho sasimahla seSi	< 0.1%
体积密度/Unizi lolwapho kuyiwa khona	2.60-2.70 g / cm³
气孔率/ I-porosity ebonakalayo	< 16%
抗压强度/ Amandla oxinzelelo	> 600MPa
常温抗弯强度/Amandla okugoba okubandayo	80-90 MPa (20°C)
高温抗弯强度Amandla okugoba ashushu	90-100 MPa (1400°C)
热膨胀系数/ Ukwandiswa kweThermal @1500°C	4.70 10^-6/°C
导热系数/I-Thermal conductivity @1200°C	23W/m•K
杨氏模量/ Imodyuli yeelastiki	240 GPA
抗热震性/ Ukuxhathisa ukothuka kobushushu	Ulunge kakhulu

I-VET Energy ngumvelisi wokwenyani weemveliso zegraphite kunye ne-silicon carbide ene-CVD yokwambathisa, inokubonelela ngeendawo ezahlukeneyo ezilungiselelwe i-semiconductor kunye ne-photovoltaic industry.Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, anokubonelela ngezisombululo zemathiriyeli yobuchwephesha.

Sisoloko siphuhlisa iinkqubo eziphambili zokubonelela ngemathiriyeli ephucukileyo, kwaye sisebenze itekhnoloji eyodwa enelungelo elilodwa lomenzi wechiza, enokwenza iqhina phakathi kwengubo kunye ne-substrate ibe ngqongqo kwaye ingabikho lula ekuthinteleni.

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