I-Silicon Carbide Wafer Boat ehlaziyiweyo kwakhona ene-CVD Coating

Inkcazelo emfutshane:

I-VET Energy Recrystallized Silicon Carbide Wafer Boat yimveliso ephezulu yokusebenza eyilelwe ukubonelela ngokusebenza okungaguqukiyo nokuthembekileyo ngexesha elongeziweyo. Inokumelana nobushushu obuhle kakhulu kunye nokufana kwe-thermal, ukucoceka okuphezulu, ukuxhathisa ukhukuliseko, kuyenza ibe sisisombululo esifanelekileyo sokusetyenzwa kwe-wafer.


Iinkcukacha zeMveliso

Iithegi zeMveliso

Iipropati ze-silicon carbide ehlaziyiweyo

I-silicon carbide ehlaziyiweyo (i-R-SiC) yinto ephezulu yokusebenza enobunzima besibini kuphela kwidayimane, eyenziwe kubushushu obuphezulu obungaphezulu kwe-2000 ℃. Igcina iipropathi ezininzi ezigqwesileyo ze-SiC, ezinje ngamandla obushushu obuphezulu, ukuxhathisa okuqinileyo kwe-corrosion, ukuxhathisa okugqwesileyo kwe-oxidation, ukuchasana kakuhle nokothuka kwe-thermal njalo njalo.

● Iimpawu ezigqwesileyo zoomatshini. I-silicon carbide ehlaziyiweyo inamandla aphezulu kunye nokuqina kune-carbon fiber, ukuchasana kweempembelelo eziphezulu, kunokudlala ukusebenza kakuhle kwiindawo eziphakamileyo zokushisa, kunokudlala ukusebenza kakuhle kokulinganisa kwiimeko ezahlukeneyo. Ukongezelela, ibuye ibe nokuguquguquka okulungileyo kwaye ayonakaliswa lula ngokuzolula kunye nokugoba, okuphucula kakhulu ukusebenza kwayo.

● Ukumelana ne-corrosion ephezulu. I-silicon carbide ehlaziyiweyo inokumelana nokugqwala okuphezulu kwiindidi ezahlukeneyo zeendaba, inokuthintela ukukhukuliseka kweentlobo ezahlukeneyo zeendaba ezitshabalalisayo, inokugcina iipropathi zayo zemishini ixesha elide, inokuqina okuqinileyo, ukuze ibe nobomi obude benkonzo. Ukongezelela, ikwanayo nokuzinza okuhle kwe-thermal, iyakwazi ukulungelelanisa uluhlu oluthile lokutshintsha kweqondo lokushisa, ukuphucula umphumo wesicelo sayo.

● Ukuhlambalaza akufihli. Ngenxa yokuba inkqubo ye-sintering ayinciphisi, akukho xinzelelo olushiyekileyo luya kubangela ukuguqulwa okanye ukuqhekeka kwemveliso, kunye neengxenye ezinemilo enzima kunye nokuchaneka okuphezulu kunokulungiswa.

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重结晶碳化硅物理特性

Iimpawu ezibonakalayo zeRecrystallized Silicon Carbide

性质 / Ipropati

典型数值 / Ixabiso eliqhelekileyo

使用温度/ Ubushushu bokusebenza (°C)

1600°C (neoksijini), 1700°C (ukunciphisa okusingqongileyo)

SiC含量/ Umxholo weSiC

> 99.96%

自由Si含量/ Isiqulatho sasimahla seSi

< 0.1%

体积密度/Unizi lolwapho kuyiwa khona

2.60-2.70 g / cm3

气孔率/ I-porosity ebonakalayo

< 16%

抗压强度/ Amandla oxinzelelo

> 600MPa

常温抗弯强度/Amandla okugoba okubandayo

80-90 MPa (20°C)

高温抗弯强度Amandla okugoba ashushu

90-100 MPa (1400°C)

热膨胀系数/ Ukwandiswa kweThermal @1500°C

4.70 10-6/°C

导热系数/I-Thermal conductivity @1200°C

23W/m•K

杨氏模量/ Imodyuli yeelastiki

240 GPA

抗热震性/ Ukuxhathisa ukothuka kobushushu

Ulunge kakhulu

Amandla eVET yi iumenzi wokwenyani weemveliso ezenziwe ngokwezifiso zegraphite kunye nesilicon carbide ene-CVD coating,inokubonelelaezahlukeneyoiindawo ezilungiselelwe i-semiconductor kunye ne-photovoltaic industry. OIqela le-ur lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, linokubonelela ngezisombululo zemathiriyeli yobuchwepheshayeyakho.

Siqhubeka siphuhlisa iinkqubo eziphambili ukubonelela ngemathiriyeli ephezulu kakhulu,kwayebaye benza iteknoloji ekhethekileyo yelungelo elilodwa lomenzi wechiza, enokwenza iqhina phakathi kwengubo kunye ne-substrate ibe ngqongqo kwaye ingabikho lula kwi-detachment.

CVD SiC薄膜基本物理性能

Iimpawu ezisisiseko ze-CVD SiCukutyabeka

性质 / Ipropati

典型数值 / Ixabiso eliqhelekileyo

晶体结构 / Ulwakhiwo lweCrystal

FCC isigaba β多晶,主要為(111)取向

密度 / Ubuninzi

3.21 g/cm³

硬度 / Ukuqina

2500 维氏硬度 (500g umthwalo)

晶粒大小 / Ukhozo SiZe

2 ~ 10μm

纯度 / Ukucoceka kwemichiza

99.99995%

热容 / Umthamo wobushushu

640 J·kg-1·K-1

升华温度 / Iqondo lobushushu elisezantsi

2700℃

抗弯强度 / Amandla e-Flexural

415 MPa RT 4-inqaku

杨氏模量 / Imodyuli yabaselula

430 Gpa 4pt bend, 1300℃

导热系数 / ThermalUkuqhuba

300Wm-1·K-1

热膨胀系数 / Ukwandiswa kweThermal(CTE)

4.5×10-6K-1

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Wamkelekile ngokufudumeleyo ukuba undwendwele umzi-mveliso wethu, makhe sibenengxoxo eyongezelelekileyo!

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