Olu hlobo lwe-SiC Wafer ye-intshi ye-6 ye-intshi yenzelwe ukusebenza okuphuculweyo kwiimeko ezinzima, iyenza ibe lolona khetho lufanelekileyo kwizicelo ezifuna amandla aphezulu kunye nokumelana nobushushu. Iimveliso eziphambili ezinxulunyaniswa nesi siqwengana sibandakanya iSi Wafer, iSiC Substrate, iSOI Wafer, kunye neSiN Substrate. Ezi zixhobo ziqinisekisa ukusebenza kakuhle kwiinkqubo ezahlukeneyo zokuvelisa i-semiconductor, okwenza izixhobo ezisebenza ngamandla kwaye zihlala zihlala zihlala zihlala zihlala zikhona.
Kwiinkampani ezisebenza nge-Epi Wafer, i-Gallium Oxide Ga2O3, i-Cassette, okanye i-AlN Wafer, i-VET Energy's 6 Intshi ye-N Uhlobo lwe-SiC Wafer ibonelela ngesiseko esiyimfuneko kuphuhliso lwemveliso entsha. Nokuba ikwi-electronics enamandla amakhulu okanye iteknoloji yeRF yamva nje, ezi wafers ziqinisekisa ukuqhuba okugqwesileyo kunye nokumelana nobushushu obuncinci, ukutyhala imida yokusebenza kakuhle kunye nokusebenza.
IINGCACISO ZOKUXHAPHAZA
*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulation
Into | 8-intshi | 6-Intshi | 4-intshi | ||
nP | n-Pm | n-Nd | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
I-Bow(GF3YFCD)-Ixabiso elipheleleyo | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
I-LTV(SBIR)-10mmx10mm | <2μm | ||||
Wafer Edge | Beveling |
UBUPHAKAMBE GQIBELA
*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulation
Into | 8-intshi | 6-Intshi | 4-intshi | ||
nP | n-Pm | n-Nd | SI | SI | |
Umphezulu Gqiba | Icala eliphindwe kabini le-Optical Polish, iSi- Face CMP | ||||
Ubunzima boMphezulu | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
IiChips zoMda | Akukho okuvunyelweyo (ubude nobubanzi≥0.5mm) | ||||
Iindenti | Akukho Ivumelekileyo | ||||
Imikrwelo(Si-Face) | Ubuninzi.≤5,Yongezeleka | Ubuninzi.≤5,Yongezeleka | Ubuninzi.≤5,Yongezeleka | ||
Iintanda | Akukho Ivumelekileyo | ||||
Ukungabandakanywa kuMda | 3mm |