2022 umgangatho ophezulu we-MOCVD Susceptor Thenga kwi-intanethi e-China, i-Sic Graphite epitaxy susceptors,
Ii-substrates zeGraphite zenkxaso, I-Graphite Susceptors, I-Graphite Susceptors ye-SiC Epitaxy, I-Graphite Susceptors yeSilicon, Izixhasi zegraphite ezine-silicon carbide coating, IZIXHOBO ZESIXHOBO KWI-SEMICONDUCTOR Iitreyi zeGraphite ze-Wafer Susceptors, amaqonga esatellite e-MOCVD, Iiplatifti zesathelayithi ze-SiC ezigqunywe yi-MOCVD,
Izinto eziluncedo ezikhethekileyo ze-SiC-coated graphite susceptors ziquka ukucoceka okuphezulu kakhulu, ukugquma okulinganayo kunye nobomi benkonzo obugqwesileyo. Kananjalo banokumelana neekhemikhali eziphezulu kunye neempawu zokuzinza kwe-thermal.
Ukufakwa kwe-SiC ye-Graphite substrate yezicelo ze-Semiconductor ivelisa inxalenye enobunyulu obuphezulu kunye nokumelana nomoya we-oxidizing.
I-CVD SiC okanye i-CVI SiC isetyenziswa kwiGraphite yeendawo ezilula okanye ezintsonkothileyo zoyilo. Ukugquma kungasetyenziswa kubunzima obuhlukeneyo kunye namalungu amakhulu kakhulu.
Iimbonakalo:
· Okugqwesileyo kweThermal Shock Resistance
· Okugqwesileyo koKuxhathisa ukothuka koMzimba
· Ukumelana neMichiza okugqwesileyo
· Ukucoceka okuphezulu okuphezulu
· Ukufumaneka kobume obuntsonkothileyo
· Isetyenziswa phantsi kwe-Oxidizing Atmosphere
Iinkcazelo Ngeempawu zeSiseko seMathiriyeli yeGrafite:
Uxinzelelo olubonakalayo: | 1.85 g/cm3 |
Ukuxhathisa koMbane: | 11 μΩm |
Ukuqina kweFlexural: | 49 MPa (500kgf/cm2) |
Ukuqina konxweme: | 58 |
Uthuthu: | <5ppm |
I-Thermal Conductivity: | 116 W/mK (100 kcal/mhr-℃) |
Ikhabhoni ibonelela ngezinto zokurhafisa kunye namalungu egraphite kuzo zonke iireactors zangoku ze-epitaxy. Ipotfoliyo yethu ibandakanya i-barrel susceptors kwi-application kunye neeyunithi ze-LPE, i-pancake susceptors ye-LPE, i-CSD, kunye neeyunithi ze-Gemini, kunye ne-wafer-wafer susceptors kwi-application kunye neeyunithi ze-ASM. Ngokudibanisa intsebenziswano eqinile kunye nee-OEM ezikhokelayo, ubuchule bezinto eziphathekayo kunye nolwazi lokuvelisa, i-SGL. inikeza uyilo olulolona lufanelekileyo lwesicelo sakho.