Ubomi obude be-SIC eCoattethiweyo ngeGraphite Heater ye-MOCVD K465i, i-Graphite Heater ye-epitaxy

Ubomi obude be-SIC eNgqunyiweyo kwiHeatha yeGraphite ye-MOCVD K465i, isifudumezi seGraphite se-epitaxy Umfanekiso okhoyo

Inkcazelo emfutshane:

Amacandelo okufudumala kwegraphite asetyenziswa kwiziko lobushushu obuphezulu kunye nobushushu obufikelele kwi-2200 degree kwindawo ye-vacuum kunye ne-3000 degree kwindawo ye-deoxidized kunye ne-gas efakwe.
Iimpawu eziphambili zesifudumezi segraphite:
1. ukufana kwesakhiwo sokufudumala.
2. Ukuqhuba kakuhle kombane kunye nomthwalo ophezulu wombane.
3. ukumelana nomhlwa.
4. i-inoxidizability.
5. ukucoceka kweekhemikhali eziphezulu.
6. amandla aphezulu oomatshini.
Inzuzo inamandla okusebenza, ixabiso eliphezulu kunye nokugcinwa okuphantsi.
Sinokuvelisa i-anti-oxidation kunye nobomi obude be-graphite crucible, i-graphite mold kunye nazo zonke iindawo zesifudumezi se-graphite.
Iiparamitha eziphambili zesifudumezi segraphite:

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Ubomi obude be-SIC obufakwe kwi-Graphite Heater ye-MOCVD K465i, i-Graphite Heater ye-epitaxy,
Isifudumezisi seGraphite esigqunyiweyo se-MOCVD K465i isifudumezisi segraphite yeGraphite ye-MOCVD SIC eCoated kwiHeatha yegraphite,

Ubomi obude be-SIC Coated Graphite Heater ye-MOCVD K465i

Inkcazo yobuGcisa	IVET-M3
Ubuninzi Bobuninzi (g/cm3)	≥1.85
Umxholo wothuthu (PPM)	≤500
Ukuqina konxweme	≥45
Ukuchasa okuKhethekileyo (μ.Ω.m)	≤12
Amandla e-Flexural (Mpa)	≥40
Amandla acinezelayo (Mpa)	≥70
Max. Ubungakanani bozinkozo (μm)	≤43
I-Coefficient yoKwandiswa kweThermal Mm/°C	≤4.4 * 10-6

Isifudumezi seGraphite kwiziko lombane sineempawu zokumelana nobushushu, ukumelana ne-oxidation, ukuhanjiswa kombane okuhle kunye nokuqina komatshini. Sinomatshini weentlobo ezahlukeneyo zeheater yegraphite ngokoyilo lwabathengi.

Ubomi obude be-SIC Coated Graphite Heater ye-MOCVD K465i