Wafer susceptor e nang le TaC coating bakeng sa G5 G10

Tlhaloso e Khutšoanyane:

Semicera e etella pele indasteri ea semiconductor ka mohala o mocha oa lihlahisoa tsa tantalum carbide (TaC) ho fihlela litlhoko tsa ts'ebetso ea semiconductor e lulang e tiisa.Hore na re tobane le mocheso oa epitaxial process o fetang likhato tse 2000 tsa Celsius kapa litaba tsa sublimation ka thepa ea setso, CvD tantalum carbide ea rona (TaC) e fana ka tharollo e tšepahalang.Lihlahisoa tsa rona li ka mamella mocheso o feteletseng ho fihla ho likhato tse 2300 tsa Celsius le ho fana ka bophelo bo botle ba ts'ebeletso.Ka ho ikopanya le Semicera, o ka ithuta haholoanyane ka litharollo tsa rona tse tsoetseng pele, ho kenyelletsa le likhetho tse ikhethileng bakeng sa lipoleiti tse koahetsoeng ka tantalum carbide.Re ikemiselitse ho fana ka ts'ireletso e tšepahalang le ts'ebetso e ntle haholo bakeng sa ts'ebetso ea hau ea semiconductor ho u thusa ho atleha 'marakeng o hlolisanoang haholo.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Ho roala ha TaC ke mofuta oa tantalum carbide (TaC) e lokiselitsoeng ke theknoloji ea ho beha mouoane oa 'mele, e na le litšobotsi tse latelang:

1. Boima bo phahameng: boima ba ho roala ha TaC bo phahame, hangata bo ka fihla ho 2500-3000HV, ke seaparo se thata se babatsehang.

2. Ho hanyetsa ho apara: Ho roala ha TaC ho thata haholo, ho ka fokotsang ho senyeha ha likarolo tsa mochine nakong ea tšebeliso.

3. Ho hanyetsa mocheso o phahameng: Ho roala ha TaC ho ka boela ha boloka ts'ebetso ea eona e babatsehang tlas'a tikoloho ea mocheso o phahameng.

4. Botsitso bo botle ba lik'hemik'hale: Ho roala ha TaC ho na le botsitso bo botle ba lik'hemik'hale 'me ho ka hanela liphetoho tse ngata tsa lik'hemik'hale, tse kang li-acids le metheo.

碳化钽涂层物理特性物理特性 Lintho tse bonahalang tsa TaC ho roala
密度/ Ho teteana	14.3 (g/cm³)
比辐射率 / Mosi o kgethehileng	0.3
热膨胀系数 / Coefficient ea katoloso ea mocheso	6.3 10^-6/K
努氏硬度/ Ho thatafala (HK)	2000 HK
电阻 / Khanyetso	1×10^-5 Ohm*cm
热稳定性 / Ho tsitsa ha mocheso	<2500℃
石墨尺寸变化 / Liphetoho tsa boholo ba graphite	-10 ~ 20um
涂层厚度 / Botenya ba ho roala	≥20um boleng bo tloaelehileng (35um±10um)

Ningbo VET Energy Technology Co., Ltd ke khoebo ea theknoloji e phahameng e shebaneng le tlhahiso le thekiso ea thepa ea boleng bo holimo, thepa le theknoloji e koahelang graphite, silicon carbide, ceramics, kalafo ea holim'a metsi joalo-joalo.Lihlahisoa li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, joalo-joalo.

Sehlopha sa rona sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka u fa litharollo tsa lisebelisoa tse eketsehileng bakeng sa hau.

Re u amohela ka mofuthu hore u etele feme ea rona, ha re buisaneng ka ho eketsehileng!