TheCVD TaC CoatedPlate Susceptor e tsoang ho vet-china e entsoe bakeng sa ts'ebetso e phahameng ea ts'ebetso ea lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD). Sesebelisoa sena se na le sebopeho se matlaHo roala ha TaC (Tantalum Carbide)., e fanang ka botsitso bo ikhethang ba mocheso, ho hanyetsa lik'hemik'hale, le ho tšoarella, ho e etsa tharollo e loketseng bakeng sa tlhahiso ea semiconductor le lisebelisoa tse phahameng tsa mocheso. TheHo roala ha CVD TaCe netefatsa khanyetso e babatsehang ea oxidation le ho apara, ho lumella susceptor ho boloka botšepehi le ho sebetsa libakeng tse thata.
li-vet-chinaCVD TaC CoatedPlate Susceptor e hlahella ka bokhoni ba eona ba ho aba mocheso ka mokhoa o lekanang nakong ea lits'ebetso tsa CVD, ho netefatsa ho beoa ha lera le ho ntlafatsa katleho ea masela a semiconductor. Thepa ea Ta-C e fana ka tšireletso e eketsehileng khahlanong le ho bola ha lik'hemik'hale, e lelefatsa nako ea bophelo ea sebatli le ho ntlafatsa ts'ebetso ka kakaretso. Ka motsoako oa theknoloji e tsoetseng pele ea CVD susceptor le liaparo tsa boleng bo phahameng tsa lik'hemik'hale tsa TaC, sesebelisoa sena ke karolo ea bohlokoa bakeng sa liindasteri tse hlokang ho nepahala le ho tšepahala libakeng tse phahameng tsa mocheso.
Ebang e sebelisoa ho hlahisa li-semiconductors kapa lisebelisoa tse ling tsa theknoloji e phahameng, theCVD TaC Coated Plate Susceptore etselitsoe ho fihlela litlhoko tsa tlhahiso ea sejoale-joale. E tšehetsoa ke botumo ba Semicera bakeng sa boqapi le boleng, sehlahisoa sena se fana ka ts'ebetso e phahameng le ho tšoarella ha nako e telele, se etsa hore e be khetho e tšepahalang bakeng sa lits'ebetso tsa CVD.
Ho roala ha TaC ke mofuta oa tantalum carbide (TaC) e lokiselitsoeng ke theknoloji ea ho beha mouoane oa 'mele, e na le litšobotsi tse latelang:
1. Boima bo phahameng: boima ba ho roala ha TaC bo phahame, hangata bo ka fihla ho 2500-3000HV, ke seaparo se thata se babatsehang.
2. Ho hanyetsa ho roala: Ho roala ha TaC ho thata haholo, ho ka fokotsang ho senyeha ha likarolo tsa mochine nakong ea tšebeliso.
3. Ho hanyetsa mocheso o phahameng: Ho roala ha TaC ho ka boela ha boloka ts'ebetso ea eona e babatsehang tlas'a tikoloho ea mocheso o phahameng.
4. Botsitso bo botle ba lik'hemik'hale: Ho roala ha TaC ho na le botsitso bo botle ba lik'hemik'hale 'me ho ka hanela liphetoho tse ngata tsa lik'hemik'hale, tse kang li-acids le metheo.
| 碳化钽涂层物理特性物理特性 Lintho tse bonahalang tsa TaC ho roala | |
| 密度/ Ho teteana | 14.3 (g/cm³) |
| 比辐射率 / Mosi o kgethehileng | 0.3 |
| 热膨胀系数 / Coefficient ea katoloso ea mocheso | 6.3 10-6/K |
| 努氏硬度/ Ho thatafala (HK) | 2000 HK |
| 电阻 / Khanyetso | 1×10-5 Ohm*cm |
| 热稳定性 / Ho tsitsa ha mocheso | <2500℃ |
| 石墨尺寸变化 / Liphetoho tsa boholo ba graphite | -10 ~ 20um |
| 涂层厚度 / Botenya ba ho roala | ≥20um boleng bo tloaelehileng (35um±10um) |
Ningbo VET Energy Technology Co., Ltd ke khoebo ea theknoloji e phahameng e shebaneng le tlhahiso le thekiso ea thepa e tsoetseng pele ea maemo a holimo, thepa le theknoloji e koahelang graphite, silicon carbide, ceramics, kalafo ea holim'a metsi joalo-joalo. Lihlahisoa li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, joalo-joalo.
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