Moetsi oa likoahelo tsa graphite tse koahetsoeng ke TaC

Tlhaloso e Khutšoanyane:

Semicera e etella pele indasteri ea semiconductor ka mohala oa sehlahisoa sa tantalum carbide (TaC) o fihlelang litlhoko tse ntseng li eketseha.Ka ho fihla ha li-wafers tsa 8-inch silicon carbide (SiC), litlhoko tsa mocheso bakeng sa mekhoa e fapaneng ea semiconductor li fetohile tse thata haholoanyane, haholo-holo mokhoa oa epitaxial, o ka fihlang ho feta likhato tse 2000 tsa Celsius.Lisebelisoa tsa motheo tsa setso, tse kang graphite e koahetsoeng ka silicon carbide, e atisa ho theoha mocheso o phahameng le ho senya mokhoa oa epitaxial.CvD tantalum carbide (TaC) e fana ka tharollo e sebetsang bothateng bona, e khona ho mamella mocheso ho fihla ho likhato tse 2300 tsa Celsius le ho fana ka bophelo bo bolelele ba ts'ebeletso.Rea u amohela ho ikopanya le Semicera ho ithuta ka lipoleiti tsa rona tse koahetsoeng ka tantalum carbide le ho ithuta haholoanyane ka litharollo tsa rona tse tsoetseng pele.Lihlahisoa tsa rona li tla fana ka tšireletso e babatsehang bakeng sa ts'ebetso ea hau ea epitaxial, ho netefatsa botsitso ba mocheso le bophelo bo bolelele ba tšebeletso, kahoo ho ntlafatsa ts'ebetso ea ts'ebetso, ho fokotsa litšenyehelo, le ho u thusa ho finyella katleho e kholoanyane.