TaC e koahetsoeng ka reng ea graphite

Tlhaloso e Khutšoanyane:

VET Energy Tantalum carbide coated susceptor for wafer ke sehlahisoa se sebetsang hantle se etselitsoeng ho fana ka ts'ebetso e tsitsitseng le e tšepahalang ka nako e telele. E na le ho hanyetsa mocheso o motle haholo le ho tšoana ha mocheso, bohloeki bo phahameng, ho hanyetsa khoholeho ea mobu, e leng se etsang hore e be tharollo e phethahetseng bakeng sa lisebelisoa tsa ho lokisa li-wafer.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Ho roala ha TaC ke mofuta oa tantalum carbide (TaC) e lokiselitsoeng ke theknoloji ea ho beha mouoane oa 'mele, e na le litšobotsi tse latelang:

1. Boima bo phahameng: boima ba ho roala ha TaC bo phahame, hangata bo ka fihla ho 2500-3000HV, ke seaparo se thata se babatsehang.

2. Ho hanyetsa ho roala: Ho roala ha TaC ho thata haholo, ho ka fokotsang ho senyeha ha likarolo tsa mochine nakong ea tšebeliso.

3. Ho hanyetsa mocheso o phahameng: Ho roala ha TaC ho ka boela ha boloka ts'ebetso ea eona e babatsehang tlas'a tikoloho ea mocheso o phahameng.

4. Botsitso bo botle ba lik'hemik'hale: Ho roala ha TaC ho na le botsitso bo botle ba lik'hemik'hale 'me ho ka hanela liphetoho tse ngata tsa lik'hemik'hale, tse kang li-acids le metheo.

TaC Coating15
Tantalum carbide TaC e koahetsoeng ka sekoahelo bakeng sa semiconductor Featured Image

碳化钽涂层物理特性物理特性

Lintho tse bonahalang tsa TaC ho roala

密度/ Ho teteana

14.3 (g/cm³)

比辐射率 / Mosi o kgethehileng

0.3

热膨胀系数 / Coefficient ea katoloso ea mocheso

6.3 10-6/K

努氏硬度/ Ho thatafala (HK)

2000 HK

电阻 / Khanyetso

1×10-5 Ohm*cm

热稳定性 / Ho tsitsa ha mocheso

<2500℃

石墨尺寸变化 / Liphetoho tsa boholo ba graphite

-10 ~ 20um

涂层厚度 / Botenya ba ho roala

≥20um boleng bo tloaelehileng (35um±10um)

 

Ningbo VET Energy Technology Co., Ltd ke khoebo ea theknoloji e phahameng e shebaneng le tlhahiso le thekiso ea thepa e tsoetseng pele ea maemo a holimo, thepa le theknoloji e koahelang graphite, silicon carbide, ceramics, kalafo ea holim'a metsi joalo-joalo. Lihlahisoa li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, joalo-joalo.

Sehlopha sa rona sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka u fa litharollo tsa lisebelisoa tse eketsehileng bakeng sa hau.

Re u amohela ka mofuthu hore u etele feme ea rona, ha re buisaneng ka ho eketsehileng!

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