TaC Coated Susceptor bakeng sa Epitaxy Equipment

Tlhaloso e Khutšoanyane:

VET e fana ka litlolo tse khethehileng tsa tantalum carbide (TaC) bakeng sa likarolo tse fapaneng le bajari. Mokhoa o ka sehloohong oa ho roala oa VET o nolofalletsa liphahlo tsa tantalum carbide (TaC) ho finyella bohloeki bo phahameng, botsitso bo phahameng ba mocheso le mamello e phahameng ea lik'hemik'hale, ho ntlafatsa boleng ba sehlahisoa sa likristale tsa SIC / GAN le likarolo tsa EPI, le ho lelefatsa bophelo ba likarolo tsa bohlokoa tsa reactor. Tšebeliso ea tantalum carbide coating TaC ke ho rarolla bothata le ho ntlafatsa boleng ba kholo ea kristale, 'me VET e rarollotse theknoloji ea tantalum carbide coating (CVD), e fihletseng boemo bo tsoetseng pele ba machaba.

Re romelle lengolo-tsoibila Khoasolla e le PDF

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

TaC e koahetsoesubstrate ke filimi e tšesaane e entsoeng katantalum carbidethepa, e sebelisoang holim'a substrate ea lisebelisoa tsa epitaxial.Ho roala ha TaCe na le lintho tse ngata tse ntle, tse etsang hore e be khetho e nepahetseng.

Ho roala ha TaC ke mofuta oa tantalum carbide (TaC) e lokiselitsoeng ke theknoloji ea ho beha mouoane oa 'mele, e na le litšobotsi tse latelang:

1. Boima bo phahameng: boima ba ho roala ha TaC bo phahame, hangata bo ka fihla ho 2500-3000HV, ke seaparo se thata se babatsehang.

2. Ho hanyetsa ho apara: Ho roala ha TaC ho thata haholo, ho ka fokotsang ho senyeha ha likarolo tsa mochine nakong ea tšebeliso.

3. Ho hanyetsa mocheso o phahameng: Ho roala ha TaC ho ka boela ha boloka ts'ebetso ea eona e babatsehang tlas'a tikoloho ea mocheso o phahameng.

4. Botsitso bo botle ba lik'hemik'hale: Ho roala ha TaC ho na le botsitso bo botle ba lik'hemik'hale 'me ho ka hanela liphetoho tse ngata tsa lik'hemik'hale, tse kang li-acids le metheo.

碳化钽涂层物理特性物理特性 Lintho tse bonahalang tsa TaC ho roala
密度/ Ho teteana	14.3 (g/cm³)
比辐射率 / Mosi o kgethehileng	0.3
热膨胀系数 / Coefficient ea katoloso ea mocheso	6.3 10^-6/K
努氏硬度/ Ho thatafala (HK)	2000 HK
电阻 / Khanyetso	1×10^-5 Ohm*cm
热稳定性 / Ho tsitsa ha mocheso	<2500℃
石墨尺寸变化 / Liphetoho tsa boholo ba graphite	-10 ~ 20um
涂层厚度 / Botenya ba ho roala	≥20um boleng bo tloaelehileng (35um±10um)

Ningbo VET Energy Technology Co., Ltd ke khoebo ea theknoloji e phahameng e shebaneng le tlhahiso le thekiso ea thepa ea boleng bo holimo, thepa le theknoloji e koahelang graphite, silicon carbide, ceramics, kalafo ea holim'a metsi joalo-joalo. Lihlahisoa li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, joalo-joalo.

Sehlopha sa rona sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka u fa litharollo tsa lisebelisoa tse eketsehileng bakeng sa hau.

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