Mehele ea Karolo ea Graphite e nang le Tantalum Carbide Coating

Tlhaloso e Khutšoanyane:

Ho tsebahala ha li-wafers tsa 8-inch silicon carbide (SiC) ho entse hore litlhoko tsa mocheso oa mekhoa ea semiconductor li be thata haholoanyane.Leha ho le joalo, lisebelisoa tsa motheo tsa setso ha li khone ho mamella teko ea maemo a phahameng a mocheso 'me li na le tšekamelo ea ho fokotseha le ho senya ts'ebetso ea epitaxial.Ka lehlohonolo, lihlahisoa tsa Semicera tsa CvD tantalum carbide (TaC) li u fa tharollo e tšepahalang.Tantalum carbide (TaC) ea rona e na le khanyetso e ntle haholo ea mocheso o phahameng, e khona ho mamella mocheso o feteletseng ho fihla ho likhato tse 2300 tsa Celsius, 'me e fana ka bophelo bo bolelele ba ts'ebeletso.Ikopanye le Semicera kajeno ho ithuta haholoanyane ka tharollo ea rona e tsoetseng pele, ho kenyelletsa le likhetho tse ikhethileng bakeng sa lipoleiti tse koahetsoeng ka tantalum carbide.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Ho roala ha TaC ke mofuta oa tantalum carbide (TaC) e lokiselitsoeng ke theknoloji ea ho beha mouoane oa 'mele, e na le litšobotsi tse latelang:

1. Boima bo phahameng: boima ba ho roala ha TaC bo phahame, hangata bo ka fihla ho 2500-3000HV, ke seaparo se thata se babatsehang.

2. Ho hanyetsa ho apara: Ho roala ha TaC ho thata haholo, ho ka fokotsang ho senyeha ha likarolo tsa mochine nakong ea tšebeliso.

3. Ho hanyetsa mocheso o phahameng: Ho roala ha TaC ho ka boela ha boloka ts'ebetso ea eona e babatsehang tlas'a tikoloho ea mocheso o phahameng.

4. Botsitso bo botle ba lik'hemik'hale: Ho roala ha TaC ho na le botsitso bo botle ba lik'hemik'hale 'me ho ka hanela liphetoho tse ngata tsa lik'hemik'hale, tse kang li-acids le metheo.

碳化钽涂层物理特性物理特性 Lintho tse bonahalang tsa TaC ho roala
密度/ Ho teteana	14.3 (g/cm³)
比辐射率 / Mosi o kgethehileng	0.3
热膨胀系数 / Coefficient ea katoloso ea mocheso	6.3 10^-6/K
努氏硬度/ Ho thatafala (HK)	2000 HK
电阻 / Khanyetso	1×10^-5 Ohm*cm
热稳定性 / Ho tsitsa ha mocheso	<2500℃
石墨尺寸变化 / Liphetoho tsa boholo ba graphite	-10 ~ 20um
涂层厚度 / Botenya ba ho roala	≥20um boleng bo tloaelehileng (35um±10um)

Ningbo VET Energy Technology Co., Ltd ke khoebo ea theknoloji e phahameng e shebaneng le tlhahiso le thekiso ea thepa ea boleng bo holimo, thepa le theknoloji e koahelang graphite, silicon carbide, ceramics, kalafo ea holim'a metsi joalo-joalo.Lihlahisoa li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, joalo-joalo.

Sehlopha sa rona sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka u fa litharollo tsa lisebelisoa tse eketsehileng bakeng sa hau.

Re u amohela ka mofuthu hore u etele feme ea rona, ha re buisaneng ka ho eketsehileng!