Sesepa se koahetsoeng sa Tantalum carbide bakeng sa sephaphatha

Tantalum carbide coated susceptor for wafer Featured Image

Tlhaloso e Khutšoanyane:

Semicera ke moetapele oa theknoloji ea ts'ireletso ea mocheso o phahameng 'me re motlotlo ho hlahisa lihlahisoa tsa ho roala tsa CVD Tantalum Carbide (TaC) ho fana ka tšireletso e phahameng ea mocheso bakeng sa likarolo tsa hau tsa graphite.Graphite ke ntho e ntle haholo e hanyetsanang le mocheso o phahameng, empa e na le oxidation ka mocheso o phahameng, o ke keng oa qojoa ka ho feletseng esita le ka sebōping sa vacuum.Seaparo sa rona sa CVD Tantalum Carbide (TaC) se ka thibela oxidation ea graphite substrate ha e ntse e boloka ts'ebetso ea eona e ntle ea mocheso o phahameng.TaC hape ke thepa e sa sebetseng e ka hananang le karabelo ea likhase tse joalo ka argon le hydrogen.Buisana le Semicera kajeno ho ithuta haholoanyane ka li-susceptors tsa EPI tsa Tantalum Carbide CVD ho netefatsa botsitso le ts'epahalo ea lits'ebetso tsa hau tsa mocheso o phahameng.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Ho roala ha TaC ke mofuta oa tantalum carbide (TaC) e lokiselitsoeng ke theknoloji ea ho beha mouoane oa 'mele, e na le litšobotsi tse latelang:

1. Boima bo phahameng: boima ba ho roala ha TaC bo phahame, hangata bo ka fihla ho 2500-3000HV, ke seaparo se thata se babatsehang.

2. Ho hanyetsa ho apara: Ho roala ha TaC ho thata haholo, ho ka fokotsang ho senyeha ha likarolo tsa mochine nakong ea tšebeliso.

3. Ho hanyetsa mocheso o phahameng: Ho roala ha TaC ho ka boela ha boloka ts'ebetso ea eona e babatsehang tlas'a tikoloho ea mocheso o phahameng.

4. Botsitso bo botle ba lik'hemik'hale: Ho roala ha TaC ho na le botsitso bo botle ba lik'hemik'hale 'me ho ka hanela liphetoho tse ngata tsa lik'hemik'hale, tse kang li-acids le metheo.

Tantalum Carbide CVD Coating EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性 Lintho tse bonahalang tsa TaC ho roala
密度/ Ho teteana	14.3 (g/cm³)
比辐射率 / Mosi o kgethehileng	0.3
热膨胀系数 / Coefficient ea katoloso ea mocheso	6.3 10^-6/K
努氏硬度/ Ho thatafala (HK)	2000 HK
电阻 / Khanyetso	1×10^-5 Ohm*cm
热稳定性 / Ho tsitsa ha mocheso	<2500℃
石墨尺寸变化 / Liphetoho tsa boholo ba graphite	-10 ~ 20um
涂层厚度 / Botenya ba ho roala	≥20um boleng bo tloaelehileng (35um±10um)

Ningbo VET Energy Technology Co., Ltd ke khoebo ea theknoloji e phahameng e shebaneng le tlhahiso le thekiso ea thepa ea boleng bo holimo, thepa le theknoloji e koahelang graphite, silicon carbide, ceramics, kalafo ea holim'a metsi joalo-joalo.Lihlahisoa li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, joalo-joalo.

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