Bohloeki bo Phahameng CVD Solid SiC Bulk

High Purity CVD Solid SiC Bulk Featured Image

Tlhaloso e Khutšoanyane:

Khōlo e potlakileng ea likristale tse le 'ngoe tsa SiC tse sebelisang mehloli e mengata ea CVD-SiC (Chemical Vapor Deposition - SiC) ke mokhoa o tloaelehileng oa ho lokisetsa lisebelisoa tse phahameng tsa SiC single crystal. Likristale tsena tse le 'ngoe li ka sebelisoa lits'ebetsong tse fapaneng, ho kenyelletsa lisebelisoa tsa elektronike tse matla haholo, lisebelisoa tsa optoelectronic, li-sensor le lisebelisoa tsa semiconductor.

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

VET Energy e sebelisa bohloeki bo phahameng haholosilicon carbide (SiC)e entsoeng ka ho beha mouoane oa lik'hemik'hale(CVD)joalo ka mohloli oa lisebelisoa tsa ho holaLikristale tsa SiCka sepalangoang sa mouoane oa 'mele (PVT). Ho PVT, lisebelisoa tsa mohloli li kenngoa ka har'a acrucible'me a nyenyefatsoa holim'a kristale ea peo.

Ho hlokahala mohloli o phahameng oa bohloeki ho etsa boleng ba boleng bo holimoLikristale tsa SiC.

VET Energy e sebetsa ka ho khetheha ho faneng ka SiC ea likaroloana tse kholo bakeng sa PVT hobane e na le sesupo se phahameng ho feta sa likaroloana tse nyane tse entsoeng ke ho tuka ho sa feleng ha likhase tse nang le Si le C. Ho fapana le "solid-phase sintering" kapa karabelo ea Si le C, ha e hloke sebopi se inehetseng kapa mohato o nkang nako e ngata seboping sa ho hola. Sesebediswa sena se seholo se na le sekhahla se batlang se sa fetohe sa mouoane, se ntlafatsang ho ts'oana ha ts'ebetso.

Selelekela:
1. Lokisetsa mohloli oa thibelo ea CVD-SiC: Ntlha ea pele, u lokela ho lokisetsa mohloli oa boleng bo phahameng ba CVD-SiC thibela, eo hangata e leng ea bohloeki bo phahameng le botenya bo phahameng. Sena se ka lokisoa ka mokhoa oa "chemical vapor deposition" (CVD) tlas'a maemo a nepahetseng a karabelo.

2. Tokiso ea substrate: Khetha substrate e loketseng e le substrate bakeng sa kholo ea kristale e le 'ngoe ea SiC. Lisebelisoa tsa substrate tse sebelisoang ka tloaelo li kenyelletsa silicon carbide, silicon nitride, joalo-joalo, tse lumellanang hantle le kristale e le 'ngoe ea SiC e ntseng e hola.

3. Ho futhumatsa le sublimation: Beha mohloli oa thibela CVD-SiC le substrate ka sebōping sa mocheso o phahameng oa mocheso 'me u fane ka maemo a loketseng a sublimation. Sublimation e bolela hore mocheso o phahameng, mohloli oa li-block o fetoha ka ho toba ho tloha ho tiileng ho ea ho mouoane, ebe o kopanya hape holim'a substrate ho etsa kristale e le 'ngoe.

4. Taolo ea mocheso: Nakong ea ts'ebetso ea sublimation, mocheso oa mocheso le kabo ea mocheso o hloka ho laoloa ka nepo ho ntšetsa pele sublimation ea mohloli oa li-block le kholo ea likristale tse le 'ngoe. Taolo e nepahetseng ea mocheso e ka fihlela boleng bo loketseng ba kristale le sekhahla sa kholo.

5. Taolo ea sepakapaka: Nakong ea ts'ebetso ea sublimation, sepakapaka sa karabelo le sona se hloka ho laoloa. Khase e nang le bohloeki bo phahameng (e kang argon) hangata e sebelisoa e le khase e tsamaisang ho boloka khatello e nepahetseng le bohloeki le ho thibela ho silafatsoa ke litšila.

6. Khōlo ea kristale e le 'ngoe: Mohloli oa thibela CVD-SiC o kena phetohong ea mouoane nakong ea ts'ebetso ea sublimation le ho tsosolosa holim'a substrate ho etsa sebopeho se le seng sa kristale. Khōlo e potlakileng ea likristale tse le 'ngoe tsa SiC e ka finyelloa ka maemo a loketseng a sublimation le taolo ea mocheso oa mocheso.