Terei ea thepa ea silicon carbideis a senotlolokarolo e sebelisoang lits'ebetsong tse fapaneng tsa tlhahiso ea semiconductor.Re sebelisa theknoloji ea rona e nang le tokelo ea molao ho etsa sepalangoang sa silicon carbide kabohloeki bo phahameng haholo,molemoho roalaho tšoanale bophelo bo botle ba tšebeletso, moho leho hanyetsa lik'hemik'hale tse phahameng le thepa ea botsitso ba mocheso.
VET Energy ke themoetsi oa 'nete oa lihlahisoa tse ikhethileng tsa graphite le silicon carbide tse nang le CVD coating,e ka fana katse fapa-fapanenglikarolo tse ikhethileng bakeng sa indasteri ea semiconductor le photovoltaic. OSehlopha sa ur sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka fana ka litharollo tsa lisebelisoa tse ngata tsa litsebimolemong oa hau.
Re tsoela pele ho nts'etsapele lits'ebetso tse tsoetseng pele ho fana ka lisebelisoa tse tsoetseng pele,leba sebelitse theknoloji e ikhethileng e nang le tokelo ea molao, e ka etsang hore maqhama pakeng tsa ho roala le substrate e be thata le ho se khone ho arohana.
Flijo tsa lihlahisoa tsa rona:
1. Ho hanyetsa mocheso o phahameng oa oxidation ho fihlela ho 1700℃.
2. Bohloeki bo phahameng leho lumellana ha mocheso
3. Ho hanyetsa kutu e ntle haholo: acid, alkali, letsoai le li-reagents tsa manyolo.
4. Boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
5. Bophelo bo bolelele ba tšebeletso le bo tšoarellang haholoanyane
CVD SiC薄膜基本物理性能 Lintho tsa motheo tsa 'mele tsa CVD SiCho roala | |
性质 / Thepa | 典型数值 / Boleng bo Tlwaelehileng |
晶体结构 / Sebopeho sa Crystal | FCC mohato oa β多晶,主要為(111)取向 |
密度 / Ho teteana | 3.21 g/cm³ |
硬度 / Ho thatafala | 2500 维氏硬度 (500g mojaro) |
晶粒大小 / Mabele SiZe | 2 ~ 10μm |
纯度 / Bohloeki ba lik'hemik'hale | 99.99995% |
热容 / Bokhoni ba mocheso | 640 J·kg-1·K-1 |
升华温度 / Sublimation Mocheso | 2700 ℃ |
抗弯强度 / Flexural Matla | 415 MPa RT 4-ntlha |
杨氏模量 / Young's Modulus | 430 Gpa 4pt kobeha, 1300 ℃ |
导热系数 / ThermalBoikhantšo | 300Wm-1·K-1 |
热膨胀系数 / Katoloso ea Mocheso(CTE) | 4.5×10-6K-1 |
Re u amohela ka mofuthu hore u etele feme ea rona, ha re buisaneng ka ho eketsehileng!