Iyo yemukati chimiro chechoto chubhu midziyo inotsanangurwa zvakadzama

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Sezvakaratidzwa pamusoro apa, inowanzoitika

 

Chikamu chekutanga:

▪ Heating Element (heating coil) :

inowanikwa yakatenderedza chubhu yechoto, kazhinji inogadzirwa newaya dzekudzivirira, dzinoshandiswa kupisa mukati mechoto chubhu.

▪ Quartz Tube:

Nheyo yevira inopisa oxidation, yakagadzirwa nepamusoro-purity quartz iyo inogona kumira kutonhora kwepamusoro uye inoramba iine makemikari inert.

▪ Kudyisa Gasi:

Inowanikwa kumusoro kana kudivi rechoto chubhu, inoshandiswa kutakura okisijeni kana mamwe magasi kusvika mukati mechoto chubhu.

▪ SS Flange:

zvikamu zvinobatanidza quartz tubes uye gasi mitsara, kuve nechokwadi kusimba uye kugadzikana kwekubatanidza.

▪ Gas Feed Lines:

Mapombi anobatanidza MFC kune gasi rekutakura chiteshi chekufambisa gasi.

▪ MFC (Mass Flow Controller) :

Mudziyo unodzora kufamba kwegasi mukati mechubhu yequartz kunyatsoronga huwandu hwegasi hunodiwa.

▪ Mhepo:

Inoshandiswa kuburitsa gasi rekuburitsa kubva mukati mechoto chubhu kuenda kunze kwemidziyo.

 

Chikamu chepasi:

▪ Silicon Wafers in Holder:

Silicon wafers akaiswa mune yakakosha Holder kuti ave nechokwadi chekupisa yunifomu panguva yeoxidation.

▪ Wafer Holder:

Inoshandiswa kubata iyo silicon wafer uye kuona kuti iyo silicon wafer inoramba yakagadzikana panguva yekuita.

▪ Pedestal:

Chimiro chinobata silicon wafer Holder, kazhinji inogadzirwa neyepamusoro tembiricha inodzivirira zvinhu.

▪ Elevator:

Inoshandiswa kusimudza zvibatiso zveWafer kupinda nekubuda mumachubhu equartz ekurodha otomatiki uye kuburitsa masilicon wafers.

▪ Wafer Transfer Robot:

iri padivi pechoto chechubhu mudziyo, inoshandiswa kubvisa otomatiki silicon wafer kubva mubhokisi uye kuiisa muchoto chubhu, kana kuibvisa mushure mekugadzirisa.

▪ Cassette Storage Carousel:

Cassette yekuchengetedza carousel inoshandiswa kuchengeta bhokisi rine silicon wafers uye rinogona kutenderedzwa kuti robhoti iwane.

▪ Wafer Cassette:

wafer kaseti inoshandiswa kuchengeta uye kuendesa masilicon wafers kuti agadziriswe.


Nguva yekutumira: Kubvumbi-22-2024
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