Sezvakaratidzwa pamusoro apa, inowanzoitika
Chikamu chekutanga:
Heating Element (heating coil) : inowanikwa yakatenderedza chubhu yechoto, kazhinji yakagadzirwa newaya dzekupikisa, dzinoshandiswa kupisa mukati mechoto chubhu.
Quartz Tube: Nheyo yevira inopisa oxidation, yakagadzirwa nepamusoro-kuchena quartz iyo inogona kutsungirira tembiricha yepamusoro uye inoramba ine makemikari inert.
Kudya kweGasi: Inowanikwa nechepamusoro kana parutivi rwechubhu yevira, inoshandiswa kutakura okisijeni kana mamwe magasi kusvika mukati mehuni yevira.
SS Flange: zvikamu zvinobatanidza quartz tubes uye gasi mitsara, kuve nechokwadi kusimba uye kugadzikana kwekubatanidza.
Gasi Feed Lines: Mapombi anobatanidza MFC kune gasi rekupa chiteshi chekufambisa gasi.
MFC (Mass Flow Controller) : Chishandiso chinodzora kuyerera kwegasi mukati mequartz chubhu kunyatsogadzirisa huwandu hwegasi hunodiwa.
Vent: Inoshandiswa kuburitsa gasi rekuburitsa kubva mukati mechoto chubhu kuenda kunze kwemidziyo.
Chikamu chezasi
Silicon Wafers in Holder: Silicon wafers akaiswa mune yakakosha Holder kuti ave nechokwadi chekupisa yunifomu panguva yeoxidation.
Wafer Holder: Inoshandiswa kubata silicon wafer uye kuona kuti silicon wafer inoramba yakagadzikana panguva yekuita.
Pedestal: Chimiro chinobata silicon wafer Holder, kazhinji inogadzirwa neyepamusoro tembiricha inodzivirira zvinhu.
Elevator: Inoshandiswa kusimudza zvibatiso zveWafer kupinda nekubuda mumachubhu equartz kuti zvitakure otomatiki uye kuburitsa masilicon wafers.
Wafer Transfer Robot: iri padivi pechoto chubhu mudziyo, inoshandiswa kubvisa otomatiki silicon wafer kubva mubhokisi uye kuiisa muchoto chubhu, kana kuibvisa mushure mekugadzirisa.
Cassette Storage Carousel: Cassette yekuchengetedza carousel inoshandiswa kuchengeta bhokisi rine silicon wafers uye rinogona kutenderedzwa kuti robhoti iwane.
Wafer Cassette: wafer kaseti inoshandiswa kuchengeta uye kutamisa masilicon wafers kuti agadziriswe.
Nguva yekutumira: Kubvumbi-22-2024