Sezvakaratidzwa pamusoro apa, inowanzoitika
Chikamu chekutanga:
▪ Heating Element (heating coil) :
inowanikwa yakatenderedza chubhu yechoto, kazhinji inogadzirwa newaya dzekudzivirira, dzinoshandiswa kupisa mukati mechoto chubhu.
▪ Quartz Tube:
Nheyo yevira inopisa oxidation, yakagadzirwa nepamusoro-purity quartz iyo inogona kumira kutonhora kwepamusoro uye inoramba iine makemikari inert.
▪ Kudyisa Gasi:
Inowanikwa kumusoro kana kudivi rechoto chubhu, inoshandiswa kutakura okisijeni kana mamwe magasi kusvika mukati mechoto chubhu.
▪ SS Flange:
zvikamu zvinobatanidza quartz tubes uye gasi mitsara, kuve nechokwadi kusimba uye kugadzikana kwekubatanidza.
▪ Gas Feed Lines:
Mapombi anobatanidza MFC kune gasi rekutakura chiteshi chekufambisa gasi.
▪ MFC (Mass Flow Controller) :
Mudziyo unodzora kufamba kwegasi mukati mechubhu yequartz kunyatsoronga huwandu hwegasi hunodiwa.
▪ Mhepo:
Inoshandiswa kuburitsa gasi rekuburitsa kubva mukati mechoto chubhu kuenda kunze kwemidziyo.
Chikamu chepasi:
▪ Silicon Wafers in Holder:
Silicon wafers akaiswa mune yakakosha Holder kuti ave nechokwadi chekupisa yunifomu panguva yeoxidation.
▪ Wafer Holder:
Inoshandiswa kubata iyo silicon wafer uye kuona kuti iyo silicon wafer inoramba yakagadzikana panguva yekuita.
▪ Pedestal:
Chimiro chinobata silicon wafer Holder, kazhinji inogadzirwa neyepamusoro tembiricha inodzivirira zvinhu.
▪ Elevator:
Inoshandiswa kusimudza zvibatiso zveWafer kupinda nekubuda mumachubhu equartz ekurodha otomatiki uye kuburitsa masilicon wafers.
▪ Wafer Transfer Robot:
iri padivi pechoto chechubhu mudziyo, inoshandiswa kubvisa otomatiki silicon wafer kubva mubhokisi uye kuiisa muchoto chubhu, kana kuibvisa mushure mekugadzirisa.
▪ Cassette Storage Carousel:
Cassette yekuchengetedza carousel inoshandiswa kuchengeta bhokisi rine silicon wafers uye rinogona kutenderedzwa kuti robhoti iwane.
▪ Wafer Cassette:
wafer kaseti inoshandiswa kuchengeta uye kuendesa masilicon wafers kuti agadziriswe.
Nguva yekutumira: Kubvumbi-22-2024