Kugadzirwa kwega yega semiconductor chigadzirwa kunoda mazana emaitiro. Isu tinogovanisa maitiro ese ekugadzira kuita matanho masere:waferprocessing-oxidation-photolithography-etching-thin film deposition-epitaxial kukura-diffusion-ion implantation.
Kuti ikubatsire kunzwisisa uye kuziva semiconductors uye maitiro ane hukama, isu tichasundira WeChat zvinyorwa mumagazini yega yega kusuma yega yega nhanho dziri pamusoro rimwe nerimwe.
Munyaya yapfuura, zvakataurwa kuti kuitira kuchengetedzawaferkubva mukusachena kwakasiyana-siyana, firimu reoxide rakagadzirwa--oxidation process. Nhasi tichakurukura nezve "photolithography process" yekutora semiconductor dhizaini redunhu pawafer ine oxide firimu yakaumbwa.
Photolithography process
1. Chii chinonzi photolithography process
Photolithography ndeyekugadzira maseketi nenzvimbo dzinoshanda dzinodiwa pakugadzira chip.
Chiedza chinoburitswa nemuchina wephotolithography chinoshandiswa kufumura firimu rakatetepa rakaputirwa nephotoresist kuburikidza nemasiki ine pateni. Iyo photoresist ichachinja maitiro ayo mushure mekuona chiedza, kuitira kuti mufananidzo uri pamasikisi ukopirwe kune firimu yakaonda, kuitira kuti firimu yakaonda ive nebasa redhiyabhorosi yemagetsi. Iri ndiro basa rephotolithography, rakafanana nekutora mifananidzo nekamera. Mifananidzo yakatorwa nekamera inodhindwa pafirimu, nepo photolithography hainyore mapikicha, asi madhiyamu edunhu uye zvimwe zvikamu zvemagetsi.
Photolithography ndiyo chaiyo micro-machining tekinoroji
Yakajairika photolithography inzira inoshandisa ultraviolet mwenje ine wavelength ye2000 kusvika 4500 angstroms semutakuri weruzivo rwemufananidzo, uye inoshandisa photoresist seyepakati (kurekodha mifananidzo) yepakati kuwana shanduko, kuendesa uye kugadzirisa magirafu, uye pakupedzisira kuendesa mufananidzo. ruzivo kune chip (kunyanya silicon chip) kana dielectric layer.
Zvinogona kutaurwa kuti photolithography ndiyo hwaro hwemazuva ano semiconductor, microelectronics, uye ruzivo maindasitiri, uye photolithography inosarudza zvakananga kukura kweiyi tekinoroji.
Mumakore anopfuura makumi matanhatu kubva pakubudirira kwekugadzirwa kwemasekete akabatanidzwa muna 1959, upamhi hwemutsara wemifananidzo yaro yakaderedzwa nemirairo ina yehukuru, uye kubatanidzwa kwedunhu kwakavandudzwa nemirairo inopfuura mitanhatu yehukuru. Kukurumidza kufambira mberi kweiyi tekinoroji kunonyanya kukonzerwa nekuvandudzwa kwephotolithography.
(Zvinodikanwa zvehunyanzvi hwefotolithography pamatanho akasiyana ekuvandudza kweyakasanganiswa redunhu kugadzira)
2. Mitemo inokosha ye photolithography
Photolithography zvinhu zvinowanzo reva mafotoresist, anozivikanwawo semafotoresists, ari iwo anonyanya kukosha anoshanda zvinhu mufotolithography. Rudzi urwu rwezvinhu zvine maitiro echiedza (kusanganisira chiedza chinooneka, ultraviolet light, electron beam, etc.) reaction. Mushure mekuita photochemical reaction, solubility yayo inoshanduka zvakanyanya.
Pakati pavo, iyo solubility yezvakanaka photoresist mumudziri inowedzera, uye iyo yakawanikwa pateni yakafanana nemask; negative photoresist inopesana, ndiko kuti, solubility inodzikira kana kutozonyungudika mushure mekufumurwa kune mugadziri, uye iyo yakawanikwa pateni yakatarisana nemask. Iyo minda yekushandisa yemhando mbiri dzephotoresist dzakasiyana. Positive photoresists anonyanya kushandiswa, achiverengera kupfuura 80% yehuwandu.
Izvo zviri pamusoro apa ndeye schematic diagram ye photolithography process
(1) Gluing:
Ndiko, kugadzira firimu rephotoresist rine yunifomu ukobvu, kunamatira kwakasimba uye pasina kukanganisa pasilicon wafer. Kuti uwedzere kunamatira pakati pefirimu rephotoresist uye silicon wafer, zvinowanzodiwa kutanga kugadzirisa pamusoro pesilicon wafer nezvinhu zvakadai se hexamethyldisilazane (HMDS) uye trimethylsilyldiethylamine (TMSDEA). Zvadaro, iyo photoresist firimu inogadzirwa ne spin coating.
(2) Pre-kubika:
Mushure mekuputira, iyo photoresist firimu ichine imwe chiyero che solvent. Mushure mokubikira pakupisa kwepamusoro, solvent inogona kubviswa zvishoma sezvinobvira. Mushure mekutanga kubika, zvinyorwa zve photoresist zvinoderedzwa kusvika pa5%.
(3) Kuratidzwa:
Ndiko kuti, photoresist inoratidzwa nechiedza. Panguva ino, photoreaction inoitika, uye musiyano wekunyungudika pakati pechikamu chakavhenekerwa uye chikamu chisina kuvhenekerwa chinoitika.
(4) Kuvandudza uye kuomesa:
Chigadzirwa chacho chakanyudzwa mumugadziri. Panguva ino, nzvimbo yakafumurwa yeakanaka photoresist uye iyo isina-yakafumurwa nzvimbo yeasina kunaka photoresist ichanyungudika mukusimudzira. Izvi zvinopa maitiro matatu-dimensional. Mushure mekuvandudzwa, iyo chip inoda yakanyanya-tembiricha yekurapa maitiro kuti ive yakaoma firimu, iyo inonyanya kushandira kuwedzera kunamira kweiyo photoresist kune substrate.
(5) Etching:
Zvinhu zviri pasi pephotoresist zvakaiswa. Inosanganisira mvura yakanyorova etching uye gaseous yakaoma etching. Semuenzaniso, pakunyorova etching yesilicon, an acidic aqueous solution yehydrofluoric acid inoshandiswa; nokuda kwekunyorova kwemhangura, mhinduro yakasimba yeasidhi yakadai se nitric acid uye sulfuric acid inoshandiswa, nepo etching yakaoma inowanzoshandisa plasma kana high-energy ion matanda kukuvadza pamusoro pechinhu uye kuchiisa.
(6) Degumming:
Pakupedzisira, photoresist inoda kubviswa kubva pamusoro pe lens. Danho iri rinonzi degumming.
Chengetedzo ndiyo inonyanya kukosha nyaya mune ese semiconductor kugadzirwa. Iyo huru ine njodzi uye inokuvadza photolithography magasi mune chip lithography maitiro ndeaya anotevera:
1. Hydrogen peroxide
Hydrogen peroxide (H2O2) ioxidant yakasimba. Kusangana kwakananga kunogona kukonzera kuzvimba kweganda uye ziso uye kupisa.
2. Xylene
Xylene is solvent uye mugadziri anoshandiswa mune negative lithography. Inopfuta uye ine tembiricha yakaderera ye27.3 ℃ chete (inenge tembiricha yekamuri). Inoputika kana kusungirirwa mumhepo kuri 1% -7%. Kudzokorora kubata ne xylene kunogona kukonzera kuzvimba kweganda. Xylene vapor inotapira, yakafanana nekunhuhwirira kwetack ndege; kuratidzirwa kune xylene kunogona kukonzera kuzvimba kwemaziso, mhuno nehuro. Inhalation yegesi inogona kukonzera misoro, dzungu, kurasikirwa kwechido uye kuneta.
3. Hexamethyldisilazane (HMDS)
Hexamethyldisilazane (HMDS) inonyanya kushandiswa seprimer layer kuti iwedzere kunamatira kwephotoresist pamusoro pechigadzirwa. Inobatidza moto uye ine flash point ye6.7°C. Inoputika kana kusungirirwa mumhepo kuri 0.8% -16%. HMDS inobata zvakasimba nemvura, doro uye mineral acids kusunungura ammonia.
4. Tetramethylammonium hydroxide
Tetramethylammonium hydroxide (TMAH) inoshandiswa zvakanyanya semugadziri weiyo yakanaka lithography. Ine chepfu uye inoparadza. Inogona kuuraya kana ikamedzwa kana kuti yakanangana neganda. Kubata neguruva reTMAH kana mhute kunogona kukonzera kuzvimba kwemaziso, ganda, mhuno nehuro. Inhalation yehuwandu hwehuwandu hweTMAH hunotungamirira kurufu.
5. Chlorine uye fluorine
Chlorine (Cl2) uye fluorine (F2) ese ari maviri anoshandiswa muexcimer lasers seyakadzika ultraviolet uye yakanyanyisa ultraviolet (EUV) magetsi masosi. Magasi ese ari maviri ane muchetura, anoita seakasvibira, uye ane kunhuhwirira kwakasimba. Kufemera pamusoro pegasi iri kunotungamira kurufu. Fluorine gasi inogona kuita nemvura kugadzira hydrogen fluoride gasi. Hydrogen fluoride gasi iasidhi yakasimba inoshatisa ganda, maziso uye nzira yekufema uye inogona kukonzera zviratidzo zvakaita sekutsva uye kunetseka kufema. High Concentrations yefluoride inogona kukonzera chepfu kumuviri wemunhu, zvichikonzera zviratidzo zvakadai semusoro, kurutsa, manyoka, uye coma.
6. Argon
Argon (Ar) igesi inert iyo kazhinji isingakonzere kukuvadza kwakananga kumuviri wemunhu. Mumamiriro ezvinhu akajairika, mhepo inofema vanhu ine inenge 0.93% argon, uye iyi yekuisa haina mhedzisiro yakajeka pamuviri wemunhu. Zvisinei, mune dzimwe nguva, argon inogona kukuvadza muviri wemunhu.
Heano mamwe mamiriro ezvinhu anogoneka: Munzvimbo yakavharwa, kusungirirwa kweargon kunogona kuwedzera, nekudaro kudzikisa huwandu hweokisijeni mumhepo uye kukonzera hypoxia. Izvi zvinogona kukonzera zviratidzo zvakadai sedzungu, kuneta, uye kupera kwekufema. Mukuwedzera, argon igesi inert, asi inogona kuputika pasi pekushisa kwepamusoro kana kudzvinyirira kukuru.
7. Neon
Neon (Ne) igasi rakagadzikana, risina ruvara uye risinganhuhwi risingabatanidzi muThe neon gasi haripindire mukufema kwemunhu, saka kufema mukuwanda kwegasi neon kunokonzeresa hypoxia. Kana iwe uri mumamiriro e hypoxia kwenguva yakareba, unogona kuona zviratidzo zvakadai semusoro, kusvotwa, uye kurutsa. Mukuwedzera, neon gasi rinogona kuita pamwe nezvimwe zvinhu pasi pekushisa kwepamusoro kana kumanikidzwa kukuru kukonzera moto kana kuputika.
8. Xenon gasi
Xenon gasi (Xe) igasi rakagadzikana, risina ruvara uye risinganhuhwi risingabatanidzi mumaitiro ekufema kwevanhu, saka kufema muhuwandu hwe xenon gasi kunokonzeresa hypoxia. Kana iwe uri mumamiriro e hypoxia kwenguva yakareba, unogona kuona zviratidzo zvakadai semusoro, kusvotwa, uye kurutsa. Mukuwedzera, neon gasi rinogona kuita pamwe nezvimwe zvinhu pasi pekushisa kwepamusoro kana kumanikidzwa kukuru kukonzera moto kana kuputika.
9. Krypton gasi
Krypton gasi (Kr) igasi rakagadzikana, risina ruvara uye risina kunhuwa risingabatanidzi muhutano hwekufema kwevanhu, saka kufema muhuwandu hwekripton gasi kunokonzera hypoxia. Kana iwe uri mumamiriro e hypoxia kwenguva yakareba, unogona kuona zviratidzo zvakadai semusoro, kusvotwa, uye kurutsa. Mukuwedzera, xenon gasi inogona kuita pamwe nezvimwe zvinhu pasi pekushisa kwepamusoro kana kudzvinyirira kukuru kukonzera moto kana kuputika. Kufema munzvimbo ine kushayiwa kweokisijeni kunogona kukonzera hypoxia. Kana iwe uri mumamiriro e hypoxia kwenguva yakareba, unogona kuona zviratidzo zvakadai semusoro, kusvotwa, uye kurutsa. Mukuwedzera, krypton gasi inogona kuita pamwe nezvimwe zvinhu pasi pekushisa kwepamusoro kana kudzvinyirira kukuru kukonzera moto kana kuputika.
Hazardous gasi kuona mhinduro kune iyo semiconductor indasitiri
Iyo semiconductor indasitiri inosanganisira kugadzirwa, kugadzira, uye maitiro eanopisa, anoputika, ane chepfu, uye anokuvadza magasi. Semushandisi wemagasi mumiti yekugadzira semiconductor, mushandi wese anofanirwa kunzwisisa data rekuchengetedza reakasiyana magasi ane njodzi asati ashandiswa, uye anofanirwa kuziva maitiro ekuita nemaitiro ekukurumidzira kana magasi aya adonha.
Mukugadzira, kugadzira, uye kuchengetwa kweiyo semiconductor indasitiri, kuitira kudzivirira kurasikirwa kwehupenyu uye pfuma kunokonzerwa nekudonha kweaya magasi ane njodzi, zvinodikanwa kuisa magasi ekuona zviridzwa kuti aone gasi rinonangwa.
Magetsi madhigirii ave akakosha ekutarisa nharaunda mune yanhasi semiconductor indasitiri, uye zvakare ndiwo akanyanya kutarisisa maturusi.
Riken Keiki agara akatarisa kusimudzira kwakachengeteka kweindasitiri yekugadzira semiconductor, nechinangwa chekugadzira nzvimbo yekushanda yakachengeteka yevanhu, uye yakazvipira kugadzira gasi sensors inokodzera semiconductor indasitiri, ichipa mhinduro dzinonzwisisika dzematambudziko akasiyana anosanganikwa nawo. vashandisi, uye vachienderera mberi nekusimudzira chigadzirwa mabasa uye optimization masisitimu.
Nguva yekutumira: Jul-16-2024