Semiconductor mudziyo kugadzirwa kunonyanya kusanganisira discrete zvishandiso, akasanganiswa maseketi uye maitiro avo ekurongedza.
Semiconductor kugadzirwa kunogona kukamurwa kuita matanho matatu: chigadzirwa chemuviri kugadzirwa kwezvinhu, chigadzirwawaferkugadzira uye kugadzira mudziyo. Pakati pavo, iyo yakanyanya kusvibiswa kusvibiswa idanho rekugadzira chigadzirwa.
Zvinosvibisa zvinonyanya kukamurwa kuita tsvina, gasi remarara uye tsvina yakasimba.
Chip kugadzira maitiro:
Silicon wafermushure mekugaya kwekunze - kuchenesa - oxidation - yunifomu kuramba - photolithography - kukura - etching - diffusion, ion implantation - kemikari vapor deposition - kemikari mechanical polishing - metallization, nezvimwewo.
Wastewater
Huwandu hwakakura hwemvura yetsvina inogadzirwa mune yega yega nhanho yekugadzira semiconductor uye kurongedza kuyedzwa, kunyanya acid-base mvura yetsvina, ammonia-ine tsvina yemvura uye organic tsvina.
1. Fluorine-ine tsvina yemvura:
Hydrofluoric acid inova iyo huru yekunyungudutsa inoshandiswa muoxidation uye etching maitiro nekuda kweiyo oxidizing uye inoparadza zvimiro. Fluorine-ine tsvina yemvura mukuita kazhinji inouya kubva mukuparadzira maitiro uye kemikari mekiniki yekupolisha maitiro mukugadzira chip. Mukuchenesa maitiro esilicon wafers uye midziyo yakabatana, hydrochloric acid inoshandiswawo kakawanda. Ese maitiro aya anopedzwa mumatangi akatsaurirwa etching kana michina yekuchenesa, saka fluorine-ine tsvina yemvura inogona kuburitswa yakazvimirira. Zvinoenderana neiyo yekumisikidza, inogona kukamurwa kuita yakakwira-concentration fluorine-ine tsvina yemvura uye yakaderera-yakadzika ammonia-ine tsvina yemvura. Kazhinji, kuwanda kwemvura yakasviba yakakwira-concentration ammonia inogona kusvika 100-1200 mg/L. Mazhinji makambani anodzokororazve chikamu ichi chemvura yetsvina kune maitiro asingade yakakwirira yemvura.
2. Acid-base wastewater:
Anenge ese maitirwo ari mumubatanidzwa wedunhu rekugadzira maitiro anoda kuti chip chicheneswe. Parizvino, sulfuric acid uye hydrogen peroxide ndiyo inonyanya kushandiswa yekuchenesa mvura mumubatanidzwa wedunhu rekugadzira maitiro. Panguva imwecheteyo, acid-base reagents senge nitric acid, hydrochloric acid uye ammonia mvura inoshandiswa zvakare.
Iyo acid-base mvura yetsvina yekugadzira maitiro inonyanya kuuya kubva pakuchenesa maitiro mune chip kugadzira maitiro. Mukugadzirisa kurongedza, chip inobatwa ne acid-base solution panguva ye electroplating uye kemikari kuongorora. Mushure mekurapa, inoda kugezwa nemvura yakachena kuti ibudise acid-base washing wastewater. Pamusoro pezvo, acid-base reagents senge sodium hydroxide uye hydrochloric acid inoshandiswawo muchiteshi chemvura yakachena kugadzirazve anion uye cation resins kugadzira acid-base regeneration tsvina. Kugeza muswe mvura inogadzirwa zvakare panguva yeasidhi-base tsvina gasi yekugeza maitiro. Mumakambani ekugadzira edunhu akabatanidzwa, huwandu hwe acid-base wastewater yakanyanya kukura.
3. Organic wastewater:
Nekuda kwemaitiro akasiyana ekugadzira, huwandu hwe organic solvents hunoshandiswa muindasitiri yesemiconductor hwakasiyana zvakanyanya. Nekudaro, sevashandi vekuchenesa, organic solvents ichiri kushandiswa zvakanyanya mumhando dzakasiyana dzekugadzira mapakeji. Zvimwe zvinonyungudutsa zvinova organic wastewater discharge.
4. Imwe mvura yetsvina:
Iyo etching process ye semiconductor yekugadzira process ichashandisa yakakura yeammonia, fluorine uye yakakwirira-yakachena mvura yekusvibisa, nekudaro ichigadzira yakakwira-concentration ammonia-ine tsvina yekuyerera.
Iyo electroplating process inodiwa mune semiconductor kurongedza maitiro. Iyo chip inoda kucheneswa mushure me electroplating, uye electroplating yekuchenesa tsvina yemvura inogadzirwa mune iyi maitiro. Sezvo mamwe simbi achishandiswa mu electroplating, pachave nesimbi ion emissions mumvura ye electroplating yekuchenesa tsvina, senge lead, tin, disc, zinc, aluminium, nezvimwe.
Gasi remarara
Sezvo iyo semiconductor process ine zvakanyanyisa zvinodikanwa zvehutsanana hwekamuri yekushandisa, mafeni anowanzo shandiswa kuburitsa akasiyana marudzi emarara gasi anoputika panguva yekuita. Naizvozvo, marara gasi anobuda muindasitiri yesemiconductor anoratidzirwa nehombe yekuburitsa vhoriyamu uye yakaderera emission concentration. Kuburitsa gasi remarara kunonyanya kushatiswa.
Uku kuburitsa gasi remarara kunogona kukamurwa zvakanyanya muzvikamu zvina: acidic gasi, alkaline gasi, organic tsvina gasi uye ine chepfu gasi.
1. Acid-base gasi remarara:
Acid-base gasi remarara rinonyanya kubva mukupararira,CVD, CMP uye etching maitiro, ayo anoshandisa acid-base yekuchenesa mhinduro kuchenesa wafer.
Parizvino, iyo inonyanya kushandiswa yekuchenesa solvent mu semiconductor kugadzira process musanganiswa wehydrogen peroxide uye sulfuric acid.
Gasi remarara rinogadzirwa mumaitiro aya rinosanganisira magasi ane acidic akadai sesulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid uye phosphoric acid, uye gasi realkaline rinonyanya ammonia.
2. Organic tsvina gasi:
Organic tsvina gasi inonyanya kuuya kubva kumaitiro akadai sephotolithography, budiriro, etching uye diffusion. Mune maitiro aya, organic solution (yakadai se isopropyl alcohol) inoshandiswa kuchenesa pamusoro pechifukidziro, uye gasi remarara rinogadzirwa nevolatilization ndeimwe yezvinobva kune organic tsvina gasi;
Panguva imwecheteyo, photoresist (photoresist) inoshandiswa mukuita photolithography uye etching ine volatile organic solvents, senge butyl acetate, iyo inoputika mumhepo panguva yekugadzira wafer process, inova imwe sosi yemarara emarara gasi.
3. Gasi remarara ane muchetura:
Chepfu gasi remarara rinonyanya kuuya kubva kumaitiro akadai sekristaro epitaxy, yakaoma etching uye CVD. Mune maitiro aya, akasiyana-siyana emhando yepamusoro-yakachena magasi anoshandiswa kugadzira wafer, sesilicon (SiHj), phosphorus (PH3), kabhoni tetrachloride (CFJ), borane, boron trioxide, nezvimwewo. Mamwe magasi akakosha ane chepfu, asphyxiating uye corrosive.
Panguva imwecheteyo, mukuoma kwekucheka uye kuchenesa mushure mekugadzirwa kwekemikari vapor mukugadzira semiconductor, yakawanda yakazara yakazara oxide (PFCS) gasi inodiwa, yakadai seNFS, C2F & CR, C3FS, CHF3, SF6, nezvimwewo. kuve nekunyura kwakasimba munzvimbo yechiedza che infrared uye kugara mumhepo kwenguva yakareba. Ivo vanowanzo onekwa sechinhu chikuru chepasi rose greenhouse effect.
4. Packaging process tsvina gasi:
Kuenzaniswa neyakagadzirwa semiconductor, gasi remarara rinogadzirwa neiyo semiconductor packaging process iri nyore, kunyanya acidic gasi, epoxy resin uye guruva.
Acid tsvina gasi inonyanya kugadzirwa mumaitiro akadai se electroplating;
Kubika tsvina gasi inogadzirwa mukugadzirisa kubheka mushure mekugadzira chigadzirwa uye kuiswa chisimbiso;
Muchina wekudhiza unogadzira gasi remarara rine trace silicon guruva panguva yekucheka wafer maitiro.
Matambudziko ekusvibiswa kwemhoteredzo
Kune matambudziko ekusvibiswa kwezvakatipoteredza muindasitiri yesemiconductor, matambudziko makuru anoda kugadziriswa ndeaya:
· Kuburitswa kwakakura kwezvinosvibisa mhepo uye zvinoputika organic komisheni (VOCs) mune yephotolithography process;
Kuburitswa kwemafuta efuruuorinated (PFCS) muplasma etching uye kemikari vapor deposition process;
· Kushandiswa kukuru kwesimba nemvura mukugadzira uye kuchengetedza kuchengetedza kwevashandi;
· Kudzokorodza uye kuongorora kusvibiswa kwezvakagadzirwa;
· Matambudziko ekushandisa makemikari ane njodzi mukurongedza.
Kugadzirwa kwakachena
Semiconductor mudziyo wakachena kugadzira tekinoroji inogona kuvandudzwa kubva kuzvinhu zveyakagadzirwa, maitiro uye maitiro ekugadzirisa.
Kuvandudza zvigadzirwa uye simba
Kutanga, kuchena kwezvinhu kunofanira kunyatsodzorwa kuderedza kuiswa kwetsvina uye zvidimbu.
Kechipiri, tembiricha dzakasiyana-siyana, kuona kuvuza, vibration, high-voltage electric shock uye mamwe maedzo anofanirwa kuitwa pane zvinopinda zvikamu kana semi-yakapedzwa zvigadzirwa zvisati zvaiswa mukugadzirwa.
Mukuwedzera, kuchena kwezvinhu zvekubatsira kunofanira kunyatsodzorwa. Kune akawanda matekinoroji anogona kushandiswa kuita yakachena kugadzirwa kwesimba.
Optimize maitiro ekugadzira
Iyo semiconductor indasitiri pachayo inoyedza kudzikisa maitiro ayo pane zvakatipoteredza kuburikidza nemaitiro ekuvandudza tekinoroji.
Semuenzaniso, muma1970s, organic solvents ainyanya kushandiswa kuchenesa wafers mune yakabatanidzwa yedunhu rekuchenesa tekinoroji. Mumakore ekuma1980, asidhi nealkali mhinduro dzakaita sesulfuric acid dzaishandiswa kuchenesa mapete. Kusvika kuma1990, tekinoroji yekuchenesa okisijeni yeplasma yakagadzirwa.
Panyaya yekurongedza, makambani mazhinji parizvino anoshandisa tekinoroji yemagetsi, izvo zvinokonzeresa kusvibiswa kwesimbi kune nharaunda.
Nekudaro, zvidyarwa zvekurongedza muShanghai hazvichashandise tekinoroji yemagetsi, saka hapana kukanganisa kwesimbi inorema pane zvakatipoteredza. Zvinogona kuwanikwa kuti iyo semiconductor indasitiri iri kudzikisa zvishoma nezvishoma kukanganisa kwayo nharaunda kuburikidza nekuvandudzwa kwemaitiro uye kutsiva kemikari mune yayo yekuvandudza maitiro, ayo anoteverawo ikozvino budiriro yepasirese maitiro ekusimudzira maitiro uye dhizaini yechigadzirwa zvinoenderana nenharaunda.
Parizvino, mamwe maitiro ekugadzirisa emunharaunda ari kuitwa, anosanganisira:
·Kutsiviwa uye kuderedzwa kweese-ammonium PFCS gasi, sekushandisa PFCs gasi ine yakaderera greenhouse effect kutsiva gasi neyakakura greenhouse effect, sekuvandudza mafambiro ekuyerera uye kuderedza huwandu hwePFCS gasi rinoshandiswa mukuita;
·Kunatsiridza kuchenesa kwakawanda-wafer kune imwe-wafer yekuchenesa kudzikisa huwandu hwemakemikari ekuchenesa anoshandiswa mukuchenesa maitiro.
·Strict process control:
a. Ziva otomatiki yekugadzira maitiro, ayo anogona kuona chaiyo kugadzirisa uye kugadzira batch, uye kuderedza yakakwira yekukanganisa mwero wekushanda kwemanyorero;
b. Ultra-yakachena maitiro ezvakatipoteredza, inenge 5% kana zvishoma yekurasikirwa kwegoho kunokonzerwa nevanhu uye nharaunda. Ultra-yakachena process yezvakatipoteredza zvinhu zvinonyanya zvinosanganisira kuchena kwemhepo, mvura-yakachena, mhepo yakamanikidzwa, CO2, N2, tembiricha, unyoro, etc. Hutsanana hwemusangano wakachena hunowanzoyerwa nehuwandu hwehuwandu hwezvikamu zvinotenderwa pachiyero cheyuniti. mhepo, kureva, particle count concentration;
c. Simbisai kuona, uye sarudza mapoinzi akakodzera ekuonekwa panzvimbo dzebasa nemarara akawanda panguva yekugadzira.
Gamuchirai chero vatengi vanobva kumativi ese enyika kuti vatishanyire kune imwezve hurukuro!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Nguva yekutumira: Aug-13-2024