Zvakanakira zvesilicon carbide chikepe tsigiro kana ichienzaniswa nequartz boat rutsigiro

Mabasa makuru esilicon carbide chikeperutsigiro uye quartz chikepe rutsigiro zvakafanana.Silicon carbide chikeperutsigiro rune kuita kwakanakisa asi mutengo wakakwira. Inoumba humwe hukama nerutsigiro rwechikepe chequartz mumidziyo yekugadzira bhatiri ine hutsinye hwekushanda (senge LPCVD michina uye boron diffusion michina). Mumidziyo yekugadzira bhatiri ine akajairwa mamiriro ekushanda, nekuda kwehukama hwemitengo, silicon carbide uye quartz chikepe tsigiro inova inogarisana uye inokwikwidza mapoka.

① Kutsiva hukama muLPCVD uye boron diffusion michina

LPCVD michina inoshandiswa bhatiri cell tunneling oxidation uye doped polysilicon layer yekugadzirira maitiro. Working principle:

Pasi pemhepo yakadzika-kudzvanywa, yakasanganiswa nekudziya kwakakodzera, kemikari kuita uye deposition firimu kuumbwa kunowanikwa kugadzirira yekupedzisira-yakaonda tunneling oxide layer uye polysilicon firimu. Mune tunneling oxidation uye doped polysilicon layer yekugadzirira process, iyo chikepe inotsigira ine yakanyanya tembiricha yekushanda uye firimu resilicon richaiswa pamusoro. Iyo yekupisa yekuwedzera coefficient yequartz yakasiyana chaizvo neyesilicon. Kana ichishandiswa mukuita kwepamusoro, zvinodikanwa kugara uchinyura uye kubvisa silicon yakaiswa pamusoro kudzivirira iyo quartz chikepe rutsigiro kubva pakuputsika nekuda kwekuwedzera kwekupisa uye kuputika nekuda kwekusiyana kwekupisa kwekuwedzera coefficient kubva kusilicon. Nekuda kwekugara kunhonga uye kudzika-kupisa kwesimba, iyo quartz bhoti inobata ine hupenyu hupfupi uye inowanzotsiviwa mugero oxidation uye doped polysilicon layer yekugadzirira maitiro, ayo anowedzera zvakanyanya mutengo wekugadzirwa kwesero rebhatiri. Iyo yekuwedzera coefficient yesilicon carbideiri pedyo neiyo yesilicon. The Integratedsilicon carbide chikepechibatiso hachidi kunhonga mune tunnel oxidation uye doped polysilicon layer yekugadzirira maitiro. Iine simba repamusoro-soro uye hupenyu hurefu hwebasa. Iyo yakanaka imwe nzira kune quartz boat holder.

Midziyo yekuwedzera yeBoron inonyanya kushandiswa kuita doping boron zvinhu paN-mhando silicon wafer substrate yebhatiri cell kugadzirira P-type emitter kugadzira PN junction. Iyo yekushanda musimboti ndeyekuona kemikari kuita uye molecular deposition firimu kuumbwa mune yakakwirira-tembiricha mamiriro. Mushure mekunge firimu raumbwa, rinogona kuparadzirwa nekupisa-kupisa kwepamusoro kuti uone basa rekuita doping resilicon wafer pamusoro. Nekuda kwekushisa kwakanyanya kwekushanda kwebhoroni yekuwedzera midziyo, quartz chikepe inobata ine yakaderera-yepamusoro-tembiricha simba uye hupenyu hupfupi hwesevhisi mumidziyo yekuwedzera boron. The Integratedsilicon carbide chikepemubati ane simba repamusoro-tembiricha uye iri imwe nzira yakanaka kune quartz boat holder mune boron yekuwedzera maitiro.

② Kutsiva hukama mune mamwe maitiro ekushandisa

SiC bhoti inotsigira ine yakasimba yekugadzira kugona uye kuita kwakanakisa. Mitengo yavo inowanzokwira kupfuura iyo yequartz boat inotsigira. Mune zvakajairika mamiriro ekushanda emidziyo yekugadzirisa maseru, mutsauko muhupenyu hwesevhisi pakati peSiC bhoti zvinotsigira uye quartz bhoti zvinotsigira idiki. Vatengi vepasi vanonyanya kuenzanisa uye sarudza pakati pemutengo nekuita zvinoenderana nemaitiro avo uye zvavanoda. SiC bhoti inotsigira uye quartz chikepe zvinotsigira zvave kugarisana uye kukwikwidza. Nekudaro, iyo gross profit margin yeSiC boat inotsigira yakakwira pari zvino. Nekudzikira kwemutengo wekugadzira weSiC boat inotsigira, kana mutengo wekutengesa weSiC boat uchitsigira uchidzikira, zvinounzawo kukwikwidza kukuru kune quartz boat inotsigira.

Usage ratio

Iyo sero tekinoroji nzira inonyanya PERC tekinoroji uye TOPCon tekinoroji. Mugove wemusika wePERC tekinoroji i88%, uye chikamu chemusika cheTOPCon tekinoroji i8.3%. Mugove wemusika wakabatanidzwa wevaviri ndeye 96.30%.

Sezvinoratidzwa mumufananidzo uri pasi apa:

MuPERC tekinoroji, zvitsigiso zvechikepe zvinodikanwa kune yekumberi phosphorus diffusion uye annealing maitiro. MuTOPCon tekinoroji, zvitsigiso zvechikepe zvinodikanwa kune yekumberi boron diffusion, LPCVD, kumashure phosphorus diffusion uye annealing maitiro. Parizvino, silicon carbide boat inotsigira inonyanya kushandiswa muLPCVD maitiro eTOPCon tekinoroji, uye mashandisiro avo muBoron diffusion process akanyanyosimbiswa.

Mufananidzo Kushandiswa kwechikepe kunotsigira mune sero kugadzirisa maitiro

Ongorora: Mushure mekupfekedzwa kwepamberi nekumashure kwePERC uye TOPCon tekinoroji, pachine zvinongedzo senge kudhinda skrini, sintering uye kuyedza uye kuronga, izvo zvisingabatanidzi kushandiswa kwezvitsigiro zvechikepe uye hazvina kunyorwa mumufananidzo uri pamusoro.