Silicon carbide (SiC) inyowani semiconductor zvinhu. Silicon carbide ine hombe bhendi gap (inenge 3 nguva silicon), yakakwirira yakakosha munda simba (inenge 10 nguva nesilicon), yakakwirira yekupisa conductivity (inenge 3 nguva nesilicon). Icho chakakosha chinotevera-chizvarwa semiconductor zvinhu. SiC machira anoshandiswa zvakanyanya muindasitiri ye semiconductor uye solar photovoltaics. Kunyanya, ma susceptors anoshandiswa mu epitaxial kukura kwe LED uye Si single crystal epitaxy inoda kushandiswa kweSiC coating. Nekuda kwekusimba kukwira kumusoro kwema LED mune yekuvhenekesa uye kuratidza indasitiri, uye nekusimudzira kwakasimba kweiyo semiconductor indasitiri,SiC coating chigadzirwatarisiro yakanaka kwazvo.
APPLICATION FIELD
Kuchena, SEM Chimiro, kukobvu kuongororwa kweSiC coating
Kuchena kweSiC coatings pagraphite nekushandisa CVD kwakakwira se99.9995%. Chimiro chayo chiri fcc. Mafirimu eSiC akaputirwa pa graphite ndeye (111) yakatarisa sezvakaratidzwa mu data ye XRD (Fig.1) inoratidza yakakwirira yekristalline yehutano. Ukobvu hwefirimu reSiC hwakafanana chaizvo sezvakaratidzwa mumufananidzo 2.
Mufananidzo 2: Ukobvu yunifomu yeSiC mafirimu SEM uye XRD yebeta-SiC firimu pagraphite
SEM data yeCVD SiC yakaonda firimu, saizi yekristaro ndeye 2 ~ 1 Opm
Iyo kristaro chimiro cheCVD SiC firimu ndeye-yakatarisana-yakatarisana cubic chimiro, uye iyo firimu yekukura yekutarisa iri pedyo ne100%
Silicon carbide (SiC) yakavharwachigadziko ndicho chakanakisa chigadziko cheimwe crystal silicon uye GaN epitaxy, inova ndiyo yakakosha chikamu cheiyo epitaxy furnace. Nheyo ndiyo yakakosha yekugadzira yekuwedzera yemonocrystalline silicon yemasekete makuru akabatanidzwa. Iine kuchena kwepamusoro, kupikisa kwekushisa kwepamusoro, corrosion resistance, kunaka kwemhepo kusungirirwa uye humwe unhu hwakanaka hwezvinhu.
Chigadzirwa chekushandisa uye kushandiswa
Graphite base coating for single crystal silicon epitaxial growthInokodzera Aixtron muchina, etcCoating ukobvu: 90 ~ 150umDyamita yewafer crater i55mm.
Nguva yekutumira: Mar-14-2022