O le VET Energy silicon carbide (SiC) epitaxial wafer o se mea faʻapipiʻi semiconductor lautele lautele ma sili atu le maualuga o le teteʻeina o le vevela, maualuga taimi ma uiga maualuga. O se mea e sili ona lelei mo le augatupulaga fou o masini eletise eletise. E fa'aogaina e le VET Energy fa'atekonolosi epitaxial MOCVD e fa'atupuina ai siC epitaxial layers i luga ole SiC substrates, fa'amautinoa le lelei lelei o le fa'atinoga ma le fa'amalieina ole wafer.
Ole matou Silicon Carbide (SiC) Epitaxial Wafer e ofoina atu le fetaui lelei ma le tele o mea semiconductor e aofia ai Si Wafer, SiC Substrate, SOI Wafer, ma SiN Substrate. Faatasi ai ma lona malosi epitaxial layer, e lagolagoina faiga alualu i luma e pei o le Epi Wafer tuputupu ae ma le tuufaatasia ma mea e pei o Gallium Oxide Ga2O3 ma AlN Wafer, faʻamautinoa le faʻaogaina tele i luga o tekinolosi eseese. Fuafuaina ina ia fetaui lelei ma faiga fa'atautaia o Kaseti fa'apitoa tau pisinisi, e fa'amautinoa ai le lelei ma le fa'agaoioia o galuega i totonu o si'osi'omaga fa'ata'otoga semiconductor.
Ole laina ole oloa ole VET Energy e le gata ile SiC epitaxial wafers. Matou te tuʻuina atu foʻi le tele o mea faʻapipiʻi semiconductor substrate, e aofia ai le Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, ma isi. Wafer, e faʻafetaui ai le manaʻoga eletise eletise i le lumanaʻi mo masini faʻatinoina maualuga.
FAAMATALAGA WAFERING
*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating
Aitema | 8-Inisi | 6-Inisi | 4-Inisi | ||
nP | n-Pm | n-Sa | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Aufana(GF3YFCD)-Taua atoatoa | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
A'ai(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR)-10mmx10mm | <2μm | ||||
Wafer Edge | Fa'ata'oto |
FA'AI'U LELEI
*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating
Aitema | 8-Inisi | 6-Inisi | 4-Inisi | ||
nP | n-Pm | n-Sa | SI | SI | |
Fa'ai'uga | Itulua Optical Polish, Si- Face CMP | ||||
Lau'ele'ele | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Tipi Chips | Leai se Fa'ataga (umi ma le lautele≥0.5mm) | ||||
Indents | Leai se Fa'ataga | ||||
Manu'ese(Si-Fua'i) | Qty.≤5, Fa'aopoopo | Qty.≤5, Fa'aopoopo | Qty.≤5, Fa'aopoopo | ||
Ta'eta'ei | Leai se Fa'ataga | ||||
Tuusaunoaga Tupito | 3mm |