SiC Coating Carrier Mo RTP/RTA

Fa'amatalaga Puupuu:

VET Energy SiC Coating Carrier For RTP/RTA ose oloa maualuga fa'atinoga ua fuafuaina e maua ai le fa'atinoga tumau ma fa'atuatuaina mo se vaitaimi umi. E sili atu le lelei o le vevela ma le tutusa o le vevela, maualuga le mama, teteʻe o le tafia, ma avea ai ma vaifofo lelei mo le gaosiga o talosaga.

Nofoaga na afua mai ai:Saina

Fauga tioata:FCCβphase

Malosi:3.21 g/cm;

Malosi :2500 Vickers;

Tele o Saito:2~10μm;

Vailaau mama:99.99995%;

Malosiaga vevela:640J·kg-1·K-1;

Sulimation vevela:2700 ℃;

Malosi Felexural:415 Mpa (RT 4-Point);

Young's Modulus:430 Gpa (4pt pi'o, 1300 ℃);

Fa'alauteleina o le vevela (CTE):4.5 10-6K-1;

Amioga vevela:300（W/MK）;

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Fa'amatalaga Oloa

Faailoga o oloa

SiC Coating Carrier Mo le RTP / RTA o se vaega autu o loʻo faʻaaogaina i le gaosiga o le semiconductor e taʻua o le Rapid Thermal Processing & Annealing, matou te faʻaogaina a matou tekonolosi pateni e fai ai le faʻapipiʻi carbide silicon ma le mama maualuga, lelei le faʻaogaina o le ufiufi ma se olaga sili ona lelei. faʻapea foʻi ma le maualuga o vailaʻau faʻamaʻi ma mea e mautu ai le vevela.

Vaega oa tatou oloa:

1. maualuga le vevela oxidation tetee atu i le 1700 ℃.
2. maualuga mama ma vevela tutusa
3. Lelei le fa'afefeteina: acid, alkali, masima ma meaola fa'aola.
4. Maaa maualuga, faʻapipiʻi luga, vaega laiti.
5. Le soifua tautua umi ma sili atu le umi

CVD SiC薄膜基本物理性能 Meatino fa'aletino autu o le CVD SiCufiufi
性质 / Meatotino	典型数值 / Taua masani
晶体结构 / Fa'a tioata	FCC β vaega多晶，主要为（111）取向
密度 / Malosi	3.21 g/cm³
硬度 / Maaa	2500 维氏硬度（500g uta）
晶粒大小 / Saito Tele	2~10μm
纯度 / Vailaau Mama	99.99995%
热容 / Malosiaga vevela	640 J·kg^-1·K^-1
升华温度 / Sulimation Temperature	2700 ℃
抗弯强度 / Malosi Fa'alilolilo	415 MPa RT 4-point
杨氏模量 / Young's Modulus	430 Gpa 4pt pi'o, 1300 ℃
导热系数 / ThermalConductivity	300W·m^-1·K^-1
热膨胀系数 / Fa'alauteleina o le vevela(CTE)	4.5×10^-6K^-1

O le VET Energy o le gaosiga moni lea o oloa faʻapipiʻi faʻapipiʻi ma carbide silicon ma faʻapipiʻi eseese e pei o le SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, ma isi, e mafai ona tuʻuina atu vaega faʻapitoa mo semiconductor ma photovoltaic alamanuia.

O la matou 'au fa'atekinisi e sau mai fa'alapotopotoga su'esu'e fa'apitonu'u pito i luga, e mafai ona tu'uina atu fa'afitauli fa'apitoa fa'apitoa mo oe.

O lo'o fa'aauau pea ona matou fa'atupuina faiga fa'agasolo e tu'uina atu ai mea e sili atu ona maualuga, ma ua fa'atinoina se tekonolosi pateni fa'apitoa, lea e mafai ona fa'amalosia atili ai le so'otaga i le va o le fa'apipi'i ma le mea fa'apipi'i ma fa'aitiitia ai le fa'ateteleina.

Faʻafeiloaʻi faʻafeiloaʻi oe e asiasi i la matou falegaosimea, seʻi o tatou faia nisi talanoaga!