O leCVD TaC ua ufiufiPlate Susceptor mai le vet-china ua fa'ainisinia mo le maualuga o le fa'atinoga i le fa'agasologa o ausa vaila'au (CVD). O lenei susceptor e iai se malosiTaC (Tantalum Carbide) faʻapipiʻi, e ofoina atu le faʻamautuina o le vevela faʻapitoa, teteʻeina o vailaʻau, ma le tumau, ma avea o se fofo lelei mo le gaosiga o semiconductor ma faʻaoga maualuga-vevela. O leCVD TaC ufiufifaʻamautinoa lelei le teteʻe atu i le faʻamaʻiina ma le ofuina, faʻatagaina le susceptor e faʻamautu lona faʻamaoni ma galuega i totonu o siosiomaga faigata.
vet-china'sCVD TaC ua ufiufiPlate Susceptor e tu i fafo mo lona gafatia e tufatufa tutusa le vevela i le faagasologa o le CVD, faʻamautinoaina le faʻapipiʻiina o le faʻapipiʻi saʻo ma faʻaleleia le lelei o le gaosiga o le semiconductor. O le Ta-C coating e maua ai le puipuiga faʻaopoopo mai vailaʻau faʻamaʻi, faʻalauteleina le ola o le susceptor ma faʻaleleia le faʻatinoga atoa. Faatasi ai ma le tuʻufaʻatasia o tekonolosi susceptor CVD sili atu ma tulaga maualuga TaC chemical coatings, o lenei susceptor o se vaega autu mo alamanuia e manaʻomia le saʻo ma le faʻamaoni i siosiomaga maualuga-vevela.
Pe faʻaaogaina i le gaosiga o semiconductor poʻo isi faʻaoga tekonolosi, o leCVD TaC Susceptor Plate Fa'apipi'iua mamanuina e faʻafetaui manaoga o gaosiga faʻaonapo nei. Faʻalagolago i le igoa o Semicera mo le faʻafouina ma le lelei, o lenei oloa e ofoina atu le faʻatinoga sili atu ma le umi umi, ma avea ai ma filifiliga faʻalagolago mo faiga CVD.
TaC coating o se ituaiga o tantalum carbide (TaC) faʻapipiʻiina saunia e ala i tekinolosi faʻaogaina o le ausa, o loʻo i ai uiga nei:
1. Maaa maualuga: TaC coating hardness e maualuga, e masani lava e mafai ona oʻo atu i le 2500-3000HV, o se faʻamalo sili ona lelei.
2. Faʻaofuofu teteʻe: TaC coating e matua ofuina lava, lea e mafai ona faʻaitiitia lelei le ofuina ma le faʻaleagaina o vaega faʻainisinia aʻo faʻaaogaina.
3. Lelei maualuga le tete'e o le vevela: TaC coating e mafai foi ona faatumauina lona tulaga sili ona lelei i lalo o le siosiomaga vevela maualuga.
4. Faʻamautu lelei vailaʻau: TaC coating e lelei le mautu vailaʻau ma e mafai ona tetee atu i le tele o vailaʻau, e pei o acids ma faʻavae.
| 碳化钽涂层物理特性物理特性 Meatotino faaletino o TaC ufiufi | |
| 密度/ Malosi | 14.3 (g/cm³) |
| 比辐射率 / Emisi fa'apitoa | 0.3 |
| 热膨胀系数 / Fa'aalili fa'alauteleina o le vevela | 6.3 10-6/K |
| 努氏硬度/ Malosi (HK) | 2000 HK |
| 电阻 / Tetee | 1×10-5 Ohm*cm |
| 热稳定性 / Mausali le vevela | <2500℃ |
| 石墨尺寸变化 / Suiga le tele o le kalafi | -10~-20um |
| 涂层厚度 / Ufiufi mafiafia | ≥20um tau masani (35um±10um) |
Ningbo VET Malosiaga Tekonolosi Co., Ltd o se atinaʻe faʻatekonolosi maualuga e taulaʻi i le gaosiga ma le faʻatau atu o mea maualuga maualuga, meafaitino ma tekinolosi e aofia ai graphite, carbide silicon, ceramics, togafitiga luga ma isi. O oloa e faʻaaogaina lautele i photovoltaic, semiconductor, malosi fou, metallurgy, ma isi.
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