Ni ubuhe butumwa bw'ubwato bwa PECVD?

Nkumutwara wa silicon isanzwe ya wafers mugutunganya uburyo bwo gutwikira ,.ubwato bwa grafiteifite ubwato bwinshi bwubwato hamwe nintera runaka muburyo, kandi hariho umwanya muto cyane hagati yubwato bubiri bwegeranye, kandi wafer ya silicon ishyirwa kumpande zombi zumuryango wubusa.

Kuberako grafite, ibikoresho byubwato bwa grafite, bifite imiyoboro myiza nubushyuhe bwumuriro, voltage ya AC ikoreshwa hagati yubwato bubiri bwegeranye kugirango ikore electrode nziza kandi mbi. Iyo mucyumba hari umuvuduko wumwuka na gaze runaka, isohoka ryaka hagati yubwato bubiri. Gusohora urumuri rushobora kubora gaze ya SiH4 na NH3 mu kirere, igakora ion na Si na N, hanyuma igahuza gukora molekile ya SiNx Yashyizwe hejuru ya wafer wa silicon kugirango igere ku ntego yo gutwikira.

Nkumutwara wizuba rya antireflection yizuba, imiterere nubunini bwubwato bwa grafite bigira ingaruka kuburyo butaziguye bwo guhindura no gukora neza bya silicon wafer. Nyuma yimyaka myinshi yubushakashatsi bwa tekiniki niterambere, isosiyete yacu ubu ifite ibikoresho byiterambere bigezweho, abashushanya ikoranabuhanga bakuze hamwe nabakozi babimenyereye, kandi ibikoresho bitumizwa hanze. Kugeza ubu, ubwato bwa grafite bwakozwe na sosiyete yacu bufite ibyiza byo gukora neza Imiterere iroroshye kandi intera iri hagati yubwato bwa grafite irashyira mu gaciro, bigatuma igipfundikizo cyimyenda ya silicon, kizamura ubwiza bwa wafer wa silicon, kandi kigakora ingufu z'izuba zihindura imikorere neza. Isosiyete ya Shijin ifite ubwato bwubwoko bwose isoko ikeneye ubu

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Igihe cyo kohereza: Apr-08-2021
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