Iyo amasohoro kuriamakuru yubucuruzi, gusobanukirwa nuburyo bunoze bwo guhimba semiconductor ni ngombwa. semiconductor wafer ni ikintu cyingenzi muri uru ruganda, ariko akenshi bahura n’umwanda uturutse ku mwanda utandukanye. Ibi bihumanya, birimo atome, ibintu kama, ibintu byuma ion, na oxyde, birashobora kugira ingaruka muburyo bwo guhimba.
Ibicenka polymer na etching umwanda wizere kumbaraga intermolecular to adsorb hejuru ya wafer, bigira ingaruka kumafoto yibikoresho.umwanda kamankamavuta yuruhu rwa homo namavuta yimashini ikora firime kuri wafer, ibuza isuku.Ibyuma bya ionnk'icyuma na aluminiyumu akenshi bivanwaho binyuze muburyo bwa metallic element ion complex.Oxidekubuza uburyo bwo guhimba kandi mubisanzwe bikurwaho no gushiramo aside hydrofluoric.
uburyo bwa shiminibisanzwe bikoreshwa mugusukura na jerk semiconductor wafer. tekinike yo gusukura imiti yubushyuhe nkibisubizo byibisubizo hamwe na mashini ya scrub iriganje. uburyo bwogusukura supersonic na megasonic butanga inzira nziza zo gukuraho umwanda. isuku yumuti yumye, ushizemo plasma na tekinoroji ya tekinoroji, nayo ikina umurimo mubikorwa byo gusukura semiconductor wafer.
Igihe cyo kohereza: Ukwakira-29-2024