Nkuko bigaragara hejuru, nibisanzwe
Igice cya mbere:
Element Gushyushya Element (coil yo gushyushya):
giherereye hafi yigitereko cy itanura, ubusanzwe gikozwe mu nsinga zo guhangana, zikoreshwa mu gushyushya imbere yigitereko.
▪ Quartz Tube:
Intangiriro y'itanura rishyushye rya okiside, ikozwe muri quartz ifite isuku nyinshi ishobora kwihanganira ubushyuhe bwinshi kandi igakomeza kuba inert.
Feed Kugaburira gaze:
Iherereye hejuru cyangwa kuruhande rwigitereko cy itanura, ikoreshwa mugutwara ogisijeni cyangwa izindi myuka imbere mumatara.
▪ SS Flange:
ibice bihuza imirongo ya quartz numurongo wa gaze, byemeza gukomera no guhagarara kwihuza.
Line Imirongo yo kugaburira gaze:
Imiyoboro ihuza MFC n'icyambu gitanga gaze yohereza gaze.
▪ MFC (Igenzura rya Mass Flow):
Igikoresho kigenzura umuvuduko wa gaze imbere ya tari ya quartz kugirango igenzure neza ingano ya gaze isabwa.
Vent:
Byakoreshejwe mu gusohora gaze isohoka imbere mu itanura kugeza hanze yibikoresho.
Igice cyo hepfo:
▪ Silicon Wafers muri Holder:
Wafer ya Silicon ibikwa muri Holder idasanzwe kugirango ubushyuhe bumwe mugihe cya okiside.
Hold Ufite Wafer:
Byakoreshejwe mu gufata wafer ya silicon no kwemeza ko wafer ya silicon ikomeza guhagarara neza mugihe cyibikorwa.
▪ Ikirenge:
Imiterere ifata silicon wafer Holder, mubisanzwe bikozwe mubintu birwanya ubushyuhe bwo hejuru.
Hejuru.
Byakoreshejwe mu kuzamura abafite Wafer muri no muri tari ya quartz yo gupakira byikora no gupakurura wafer ya silicon.
Rob Imashini yimura ya Wafer:
giherereye kuruhande rwigikoresho cy itanura, gikoreshwa muguhita ukuramo wafer ya silicon mumasanduku hanyuma ukayishyira mumatanura, cyangwa kuyikuraho nyuma yo gutunganywa.
Ububiko bwa Cassette Carousel:
Ububiko bwa Cassette karuseli ikoreshwa mukubika agasanduku karimo wafer ya silicon kandi irashobora kuzunguruka kugirango igere kuri robo.
C Cassette ya Wafer:
cassette ya wafer ikoreshwa mukubika no kohereza wafer ya silicon kugirango itunganyirizwe.
Igihe cyo kohereza: Apr-22-2024