Imiterere yimbere yibikoresho byo mu itanura bisobanurwa muburyo burambuye

Nkuko bigaragara hejuru, nibisanzwe

Igice cya mbere:
Gushyushya Element (gushyushya coil): biherereye hafi yigitereko cyitanura, ubusanzwe gikozwe mumigozi yo kurwanya, gikoreshwa mugushushya imbere yigitereko cyitanura.
Quartz Tube: Intangiriro y'itanura rishyushye rya okiside, ikozwe muri quartz ifite isuku nyinshi ishobora kwihanganira ubushyuhe bwinshi kandi igakomeza kuba inert.
Kugaburira gaze: Iherereye hejuru cyangwa kuruhande rwigitereko cy itanura, ikoreshwa mugutwara ogisijeni cyangwa indi myuka imbere mumatara.
SS Flange: ibice bihuza imiyoboro ya quartz n'imirongo ya gaze, byemeza gukomera no guhagarara neza.
Imirongo yo kugaburira gazi: Imiyoboro ihuza MFC nicyambu gitanga gaze yohereza gaze.
MFC (Mass Flow Controller): Igikoresho kigenzura urujya n'uruza rwa gaze imbere mu muyoboro wa quartz kugirango ugenzure neza ingano ya gaze isabwa.
Vent: Yifashishwa mu gusohora gaze isohoka ivuye imbere mu itanura kugeza hanze yibikoresho.

Igice cyo hepfo
Silicon Wafers muri Holder: Wafer ya Silicon ibikwa muri Holder idasanzwe kugirango ubushyuhe bumwe mugihe cya okiside.
Wafer Holder: Yifashishwa mu gufata wafer ya silicon no kwemeza ko wafer ya silicon ikomeza guhagarara mugihe cyibikorwa.
Icyicaro: Imiterere ifata silicon wafer Holder, mubisanzwe bikozwe mubintu birwanya ubushyuhe bwinshi.
Lifator: Yifashishwa mu kuzamura abafite Wafer mu tubari twa quartz no gusohoka mu buryo bwikora no gupakurura wafer ya silicon.
Imashini ya Wafer Transfer: iherereye kuruhande rwigikoresho cy itanura, ikoreshwa muguhita ikuramo wafer ya silicon mumasanduku ikayishyira mumatanura, cyangwa kuyikuraho nyuma yo gutunganywa.
Ububiko bwa Cassette Carousel: Carassel yo kubika Cassette ikoreshwa mukubika agasanduku karimo wafer ya silicon kandi irashobora kuzunguruka kugirango igere kuri robo.
Cassette ya Wafer: cassette ya wafer ikoreshwa mukubika no kohereza wafer ya silicon kugirango itunganyirizwe.