Gukora buri gicuruzwa cya semiconductor bisaba inzira amagana. Tugabanije inzira zose zo gukora mubice umunani:wafergutunganya-okiside-Photolithography-etching-yoroheje ya firime yoherejwe-epitaxial gukura-gukwirakwiza-ion gushiramo.
Kugirango tugufashe kumva no kumenya igice cya semiconductor hamwe nibikorwa bifitanye isano, tuzasunika ingingo za WeChat muri buri nomero kugirango tumenye buri ntambwe yavuzwe haruguru umwe umwe.
Mu ngingo ibanziriza iyi, havuzwe ko mu rwego rwo kurinda uwaferbiturutse ku mwanda utandukanye, hakozwe firime ya oxyde - inzira ya okiside. Uyu munsi tuzaganira kuri "Photolithography process" yo gufotora umuzenguruko wa semiconductor kuri wafer hamwe na firime ya oxyde.
Uburyo bwo gufotora
1.Ni ubuhe buryo bwo gufotora
Photolithography nugukora imirongo hamwe nibikorwa bikora kugirango umusaruro wa chip.
Umucyo utangwa na mashini ya Photolithography ikoreshwa mugushira ahabona firime yoroheje yashizwemo na fotoreziste ukoresheje mask ifite ishusho. Ufotora azahindura imiterere nyuma yo kubona urumuri, kuburyo igishushanyo kiri kuri mask cyimuwe kuri firime yoroheje, kuburyo firime yoroheje ifite imikorere yishusho yumuzunguruko. Uru ninshingano za Photolithography, bisa no gufata amashusho hamwe na kamera. Amafoto yafashwe na kamera yacapishijwe kuri firime, mugihe Photolithography itanditseho amafoto, ahubwo igishushanyo cyumuzingi nibindi bikoresho bya elegitoroniki.
Photolithography nubuhanga bwuzuye bwo gutunganya mikoro
Ubusanzwe Photolithography ni inzira ikoresha urumuri rwa ultraviolet hamwe nuburebure bwumurambararo wa 2000 kugeza 4500 angstroms nkuwitwara amakuru yishusho, kandi ikoresha fotoreziste nkurwego rwo hagati (gufata amashusho) kugirango igere ku guhinduka, kwimura no gutunganya ibishushanyo, hanyuma amaherezo ikohereza ishusho. amakuru kuri chip (cyane cyane chip ya silicon) cyangwa dielectric layer.
Birashobora kuvugwa ko Photolithography ari ishingiro ryimyororokere igezweho, micrélectronics, ninganda zamakuru, kandi Photolithography igena neza urwego rwiterambere rwikoranabuhanga.
Mu myaka irenga 60 kuva havumbuwe neza imiyoboro ihuriweho mumwaka wa 1959, ubugari bwumurongo wibishushanyo byaragabanutseho ibyerekezo bine byubunini, kandi guhuza umuzunguruko byatejwe imbere nuburyo burenga butandatu bwubunini. Iterambere ryihuse ryikoranabuhanga riterwa ahanini niterambere rya Photolithography.
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2. Amahame shingiro ya Photolithography
Ibikoresho bya Photolithographe mubisanzwe bivuga abafotora, bizwi kandi nkabafotora, aribikoresho byingenzi bikora mumafoto. Ubu bwoko bwibikoresho bufite ibiranga urumuri (harimo urumuri rugaragara, urumuri ultraviolet, urumuri rwa electron, nibindi) reaction. Nyuma yimyitozo ya fotokome, ibisubizo byayo birahinduka cyane.
Muri byo, gukemura kwifotoza nziza mubateza imbere biriyongera, kandi uburyo bwabonetse ni kimwe na mask; Photoresist itari nziza ni ikinyuranyo, ni ukuvuga ko solubilité igabanuka cyangwa igahinduka idashobora gukemuka nyuma yo guhura nuwitezimbere, kandi uburyo bwabonetse butandukanye na mask. Porogaramu yimiterere yubwoko bubiri bwabafotora iratandukanye. Abafotozi beza bakoreshwa cyane, bangana na 80% byuzuye.
Ibyavuzwe haruguru nigishushanyo mbonera cyibikorwa bya Photolithography
. Kugirango hongerwe imbaraga hagati ya firime yifotozi na wafer ya silicon, akenshi birakenewe kubanza guhindura ubuso bwa wafer ya silicon hamwe nibintu nka hexamethyldisilazane (HMDS) na trimethylsilyldiethylamine (TMSDEA). Hanyuma, firime yifotozi itegurwa no kuzunguruka.
. Nyuma yo guteka ku bushyuhe bwo hejuru, umusemburo urashobora gukurwaho bike bishoboka. Nyuma yo guteka mbere, ibirimo gufotora bigabanuka kugera kuri 5%.
(3) Kumurika: Nukuvuga ko uwifotora ahura numucyo. Muri iki gihe, gufotora bibaho, kandi itandukaniro ryo gukemura hagati yumucyo nigice kitamurikirwa kibaho.
(4) Iterambere & gukomera: Igicuruzwa cyinjijwe mubateza imbere. Muri iki gihe, agace kagaragaye k'umufotozi mwiza hamwe n'ahantu hatagaragaye k'umufotozi mubi uzashonga mu iterambere. Ibi birerekana uburyo butatu. Nyuma yiterambere, chip ikenera uburyo bwo kuvura ubushyuhe bwo hejuru kugirango ibe firime ikomeye, ikora cyane cyane kugirango irusheho kunoza ifatira ryifotozi kuri substrate.
. Harimo ibishishwa bitose hamwe na gaze yumye. Kurugero, kubutaka bwa silicon butose, hakoreshwa igisubizo cyamazi ya acide ya acide hydrofluoric; kubutaka butose bwumuringa, hakoreshwa igisubizo gikomeye cya acide nka acide nitric na acide sulfurike, mugihe icyuma cyumye gikunze gukoresha plasma cyangwa ingufu za ion zifite ingufu nyinshi kugirango yangize ubuso bwibintu hanyuma bikarigata.
(6) Gutesha agaciro: Hanyuma, uwifotora agomba gukurwa hejuru yinzira. Iyi ntambwe yitwa degumming.
Umutekano nicyo kibazo cyingenzi mubikorwa byose bya semiconductor. Imyuka nyamukuru yangiza kandi yangiza imyuka ya fotolitografiya mugikorwa cya chip lithographie niyi ikurikira:
1. Hydrogene peroxide
Hydrogen peroxide (H2O2) ni okiside ikomeye. Guhura neza birashobora gutera uruhu n'amaso gutwika no gutwikwa.
2. Xylene
Xylene ni umusemburo kandi uteza imbere ukoreshwa mubitabo bibi. Irashya kandi ifite ubushyuhe buke bwa 27.3 only gusa (hafi yubushyuhe bwicyumba). Iraturika iyo kwibumbira mu kirere ari 1% -7%. Guhura kenshi na xylene birashobora gutera uruhu. Imyuka ya Xylene iraryoshye, isa numunuko windege yindege; guhura na xylene birashobora gutera uburibwe bw'amaso, izuru n'umuhogo. Guhumeka gaze birashobora gutera umutwe, umutwe, gutakaza ubushake n'umunaniro.
3. Hexamethyldisilazane (HMDS)
Hexamethyldisilazane (HMDS) ikoreshwa cyane nkigice cya primer kugirango yongere ifatira rya fotoreiste hejuru yibicuruzwa. Irashya kandi ifite flash point ya 6.7 ° C. Iraturika iyo kwibumbira mu kirere ari 0.8% -16%. HMDS ifata cyane amazi, inzoga na acide minerval kugirango irekure ammonia.
4. Hydroxide ya Tetramethylammonium
Tetramethylammonium hydroxide (TMAH) ikoreshwa cyane nkumushinga wimyandikire myiza. Nuburozi kandi bubora. Irashobora guhitana abantu iyo imizwe cyangwa ihuye neza nuruhu. Guhura n'umukungugu cyangwa TMAH birashobora gutera uburibwe bw'amaso, uruhu, izuru n'umuhogo. Guhumeka kwinshi kwa TMAH bizatera urupfu.
5. Chlorine na fluor
Chlorine (Cl2) na fluorine (F2) byombi bikoreshwa muri laseri ya excimer nka ultraviolet yimbitse na ultraviolet ikabije (EUV). Imyuka yombi ni uburozi, igaragara nk'icyatsi kibisi, kandi ifite impumuro ikomeye. Guhumeka umwuka mwinshi wa gaze bizatera urupfu. Gazi ya fluor irashobora gufata amazi kugirango itange gaze ya hydrogène. Gazi ya hydrogène ni aside ikomeye irakaza uruhu, amaso hamwe nubuhumekero kandi bishobora gutera ibimenyetso nko gutwika no guhumeka neza. Kwiyongera kwinshi kwa fluor birashobora gutera uburozi mumubiri wumuntu, bigatera ibimenyetso nko kubabara umutwe, kuruka, impiswi, na koma.
6. Argon
Argon (Ar) ni gaze ya inert ubusanzwe idatera kwangiza umubiri wumuntu. Mubihe bisanzwe, umwuka abantu bahumeka urimo argon hafi 0,93%, kandi uku kwibanda nta ngaruka zigaragara kumubiri wumuntu. Ariko rero, hamwe na hamwe, argon irashobora kwonona umubiri wumuntu.
Hano haribintu bimwe bishoboka: Mumwanya ufunzwe, kwibumbira hamwe kwa argon birashobora kwiyongera, bityo kugabanya umwuka wa ogisijeni mukirere no gutera hypoxia. Ibi birashobora gutera ibimenyetso nko kuzunguruka, umunaniro, no guhumeka neza. Byongeye kandi, argon ni gaze ya inert, ariko irashobora guturika munsi yubushyuhe bwinshi cyangwa umuvuduko mwinshi.
7. Neon
Neon (Ne) ni gaze itajegajega, itagira ibara kandi idafite impumuro ititabira gaze ya neon ntabwo igira uruhare mubikorwa byubuhumekero bwabantu, bityo guhumeka mumyuka myinshi ya gaze ya neon bizatera hypoxia. Niba uri muri hypoxia igihe kirekire, urashobora guhura nibimenyetso nko kubabara umutwe, isesemi, no kuruka. Byongeye kandi, gaze ya neon irashobora kwitwara hamwe nibindi bintu munsi yubushyuhe bwinshi cyangwa umuvuduko mwinshi kugirango bitere umuriro cyangwa guturika.
8. Xenon gaze
Gazi ya Xenon (Xe) ni gaze itajegajega, idafite ibara kandi idafite impumuro itagira uruhare mubikorwa byubuhumekero bwabantu, bityo guhumeka mukirere kinini cya gaze ya xenon bizatera hypoxia. Niba uri muri hypoxia igihe kirekire, urashobora guhura nibimenyetso nko kubabara umutwe, isesemi, no kuruka. Byongeye kandi, gaze ya neon irashobora kwitwara hamwe nibindi bintu munsi yubushyuhe bwinshi cyangwa umuvuduko mwinshi kugirango bitere umuriro cyangwa guturika.
9. Krypton gaze
Gazi ya Krypton (Kr) ni gaze itajegajega, idafite ibara kandi idafite impumuro itagira uruhare mubikorwa byubuhumekero bwabantu, bityo guhumeka mukirere kinini cya gaze ya krypton bizatera hypoxia. Niba uri muri hypoxia igihe kirekire, urashobora guhura nibimenyetso nko kubabara umutwe, isesemi, no kuruka. Byongeye kandi, gaze ya xenon irashobora kwitwara hamwe nibindi bintu munsi yubushyuhe bwinshi cyangwa umuvuduko mwinshi kugirango bitere umuriro cyangwa guturika. Guhumeka ahantu hamwe no kubura ogisijeni birashobora gutera hypoxia. Niba uri muri hypoxia igihe kirekire, urashobora guhura nibimenyetso nko kubabara umutwe, isesemi, no kuruka. Byongeye kandi, gaze ya krypton irashobora kwitwara hamwe nibindi bintu munsi yubushyuhe bwinshi cyangwa umuvuduko mwinshi kugirango bitere umuriro cyangwa guturika.
Ibyago bya gaze yo gutahura ibisubizo byinganda za semiconductor
Inganda ziciriritse zirimo gukora, gukora, no gutunganya imyuka yaka, iturika, uburozi, kandi yangiza. Nkumukoresha wa gaze munganda zikora za semiconductor, buri mukozi agomba gusobanukirwa namakuru yumutekano wa gaze zitandukanye zishobora guteza akaga mbere yo kuyikoresha, kandi agomba kumenya uko yakemura ibibazo byihutirwa mugihe iyo myuka isohotse.
Mu gukora, gukora, no kubika inganda zikoresha igice cya kabiri, kugirango hirindwe gutakaza ubuzima n’umutungo byatewe no kumeneka kwi myuka yangiza, birakenewe ko hashyirwaho ibikoresho byerekana gaze kugirango tumenye gaze.
Ibyuma bya gaze byahindutse ibikoresho byingenzi byo gukurikirana ibidukikije mu nganda zikoreshwa muri iki gihe, kandi ni n’ibikoresho bikurikirana.
Riken Keiki yamye yitondera iterambere ryumutekano winganda zikora za semiconductor, afite intego yo gushyiraho ahantu heza ho gukorera abantu, kandi yitangiye guteza imbere ibyuma bikoresha gaze bikwiranye ninganda ziciriritse, bitanga ibisubizo bifatika kubibazo bitandukanye byahuye nabyo abakoresha, no gukomeza kuzamura imikorere yibicuruzwa no guhindura sisitemu.
Igihe cyo kohereza: Nyakanga-16-2024